Method and system for detecting leak in electronic devices

• US 7,299,681 B2
• Filed: 03/25/2005
• Issued: 11/27/2007
• Est. Priority Date: 09/27/2004
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: IDC, LLC
• Inventors: Cummings, William
• Primary Examiner(s): Williams; Hezron
• Assistant Examiner(s): Rogers; David A.
• Application Number:
  US11/090,775
• Publication Number:
  US 20060065043A1
• Time in Patent Office: 977 Days
• Field of Search: 73 40- 498
• US Class Current: 73/40
• CPC Class Codes: G01M 3/229 removably mounted in a test cell
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The methods and systems for testing electronic devices for leak detection are provided. In one method of detecting a leak in a sealed package, a sealed package is placed in a test gas environment, allowing the test gas to diffuse into an internal space of the sealed package through a leak formed in the sealed package. Thereafter, the sealed package is placed in an environment substantially free of the test gas and allowing the test gas to diffuse out of the internal space. The amount of the test gas in the test gas-free environment is detected. Based on the information obtained from the detection, it is determined whether the sealed package has one or more unintended leaks based on information obtained from the detecting.

Claims

1. A method of detecting a leak in an electronic device, comprising:

providing an electronic device having an interior space, wherein the electronic device is substantially free of a test gas;

placing the electronic device in a substantially atmospheric pressure test gas environment comprising the test gas, whereby the test gas may diffuse into the interior space;

placing the electronic device in a substantially atmospheric pressure non-test gas environment substantially free of the test gas; and

detecting test gas that leaked from the electronic device or the interior space of the electronic device while the electronic device is placed in the non-test gas environment,

wherein the test gas environment and the non-test gas environment are created in a single chamber.

2. The method of claim 1, wherein the test gas environment has a pressure that is non-destructive to the electronic device.

3. The method of claim 1, wherein the non-destructive pressure is from about 0.8 atm to about 1.2 atm.

4. The method of claim 1, wherein detecting leakage comprises measuring an amount of the test gas existing in the non-test gas environment.

5. The method of claim 1, wherein detecting leakage comprises monitoring a relative amount of the test gas in the non-test gas environment over time.

6. The method of claim 1, further comprising determining whether the electronic device has an unintended leak based on the detection.

7. The method of claim 1, wherein the test gas environment is created by flowing the test gas through an area where the electronic device is placed.

8. The method of claim 1, wherein the non-test gas environment is created in a closed chamber substantially free of the test gas.

9. The method of claim 1, wherein the non-test gas environment is created by flowing a non-test gas through an area where the electronic device is placed.

10. The method of claim 1, wherein the non-test gas environment has a pressure that is non-destructive to the electronic device.

11. The method of claim 10, wherein the non-destructive pressure is from about 0.8 atm to about 1.2 atm.

12. The method of claim 1, wherein detecting leakage comprises sensing existence of the test gas within the electronic device.

13. The method of claim 12, wherein detecting leakage comprises measuring a relative amount of the test gas within the electronic device.

14. The method of claim 12, wherein sensing existence of the test gas within the electronic device comprises:

applying radiation of light to the electronic device; and

detecting a response of the test gas to the radiation.

15. The method of claim 14, wherein the light is UV, and wherein the test gas emits visible light when exposed to the UV.

16. The method of claim 14, wherein radiation of light is applied to a portion of the electronic device that is transparent to the light.

17. The method of claim 14, wherein the light is a laser beam, and wherein the test gas absorbs the laser beam.

18. The method of claim 17, wherein detecting a response comprises measuring reduction of intensity of the laser beam.

19. A method of detecting a leak in an electronic device, comprising:

providing an electronic device in a chamber, wherein the electronic device is substantially free of a test gas;

supplying the test gas to the chamber to create a substantially atmospheric pressure test gas environment within the chamber, wherein the test gas diffuses into the electronic device;

flushing the test gas out of the chamber;

supplying a non-test gas to the chamber to create a substantially atmospheric pressure non-test gas environment within the chamber; and

detecting test gas that leaked from the electronic device or the electronic device existing in the non-test gas environment,

wherein the test gas environment and the non-test gas environment are created in a single chamber.

20. The method of claim 19, wherein the test gas comprises a noble gas.

21. The method of claim 19, wherein the test gas is substantially non-reactive with a desiccant.

22. The method of claim 19, wherein the electronic device is substantially hermetically sealed with regard to water vapor.

23. The method of claim 19, wherein the electronic device is substantially permeably sealed with regard to water vapor.

24. A system for testing an electronic device for leakage, comprising:

a test chamber;

a supply of a test gas connected to the test chamber;

a supply of a non-test gas connected to the chamber;

a test gas sensor connected to the test chamber; and

a controller coupled to the supply of a test gas, the supply of a non-test gas, and the sensor, where the controller is adapted to sequentially supply the test gas into the test chamber to create a substantially atmospheric pressure test gas environment within the test chamber;

then to supply the non-test gas into the test chamber to purge the test gas and to create a substantially atmospheric pressure non-test gas environment within the test chamber; and

then to detect the test gas existing in the test chamber or flowing out of the test chamber while the electronic device is in the non-test gas environment.

25. The system of claim 24, further comprising a processor configured to determine from data of the test gas detected by the sensor whether there is leak in an electronic device under test.

26. A system for testing an electronic device for leakage, comprising:

a test chamber;

means for creating a test gas environment in the test chamber;

means for creating a non-test gas environment in the test chamber;

means for detecting the test gas; and

a controller coupled to means for creating a test gas environment, means for creating a non-test gas environment, and the means for detecting the test gas, where the controller is adapted to sequentially create a substantially atmospheric pressure test gas environment within the test chamber, then to purge the test gas by creating a substantially atmospheric pressure non-test gas environment within the test chamber, and then to operate the means for detecting the test gas in order to detect test gas that has leaked from the interior of the electronic device when the device is in the non-test gas environment.

27. A method of detecting a leak in an electronic device, comprising:

providing an electronic device having an interior space;

placing the electronic device in a test gas environment comprising a test gas, wherein the electronic device is substantially free of the test gas;

placing the electronic device in a non-test gas environment substantially free of the test gas; and

detecting the test gas while the electronic device is placed in the non-test gas environment,

wherein detecting leakage comprises sensing existence of the test gas within the electronic device, and wherein sensing existence of the test gas within the electronic device comprises;

applying energy particles to the electronic device, wherein the test gas involves in a nuclear reaction with the energy particle; and

detecting radiation resulting from the nuclear reaction.