Magnetic tunnel junctions with high tunneling magnetoresistance using non-bcc magnetic materials

• US 7,300,711 B2
• Filed: 10/29/2004
• Issued: 11/27/2007
• Est. Priority Date: 10/29/2004
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Parkin, Stuart Stephen P.
• Primary Examiner(s): Bernatz; Kevin M.
• Application Number:
  US10/904,243
• Publication Number:
  US 20060093862A1
• Time in Patent Office: 1,124 Days
• Field of Search: None
• US Class Current: 428/811.1
• CPC Class Codes: G11B 5/39 using magneto-resistive devices or effects
• CPC Class Codes: H10N 50/01 Manufacture or treatment
• CPC Class Codes: H10N 50/10 Magnetoresistive devices
• CPC Class Codes: Y10T 428/1114 having tunnel junction effect
• CPC Class Codes: Y10T 428/1143 with defined structural feature
• CPC Class Codes: Y10T 428/115 Magnetic layer composition
• CPC Class Codes: Y10T 428/1157 Substrate composition

Abstract

Magnetic material, which is not normally bcc-structured under ambient conditions, is induced into becoming bcc as a result of its proximity to a suitable templating material, such as a bcc-structured underlayer that is in contact with the magnetic material. The magnetic material, in combination with a tunnel barrier and other elements, forms a magnetic tunneling device, such as a magnetic tunnel junction that may have a tunneling magnetoresistance of 100% or more. Suitable tunnel barriers include MgO and Mg—ZnO, and the magnetic material may be Co. The templating material may include such elements as V, Cr, Nb, Mo, and W, or the tunnel barrier MgO may itself serve as the templating material.

Claims

1. A method, comprising:

depositing magnetic material onto a bcc-structured underlayer to induce the magnetic material to form a bcc-structured magnetic layer, wherein the magnetic material by itself does not form a thermodynamically stable bcc-structure at room temperature and a pressure less than 1 atmosphere, and wherein the magnetic material includes material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials; and

forming a tunnel barrier over the deposited magnetic material to permit spin-polarized current to pass between the tunnel barrier and the magnetic material, wherein the tunnel barrier is selected from the group of tunnel barriers consisting of MgO and Mg—

ZnO.

2. The method of claim 1, wherein the deposited magnetic material is at least partially (100) oriented to improve the performance of the tunnel barrier.

3. The method of claim 1, wherein the tunnel barrier is (100) oriented.

4. The method of claim 1, wherein the bcc-structured underlayer is neither ferromagnetic nor ferrimagnetic.

5. The method of claim 1, wherein the bcc-structured underlayer includes at least one of V, Cr, Nb, Mo, and W.

6. The method of claim 1, wherein the bcc-structured underlayer includes at least one of V, Cr, Nb, Mo, and W that is alloyed with at least one of Fe, Co, and Ni.

7. The method of claim 1, wherein the deposited magnetic material includes Co.

8. The method of claim 1, wherein the deposited magnetic material includes material selected from the group consisting of CoNi and NiFe alloys.

9. The method of claim 1, wherein the deposited magnetic material has a thickness of between 0.5 and 1.5 nm.

10. The method of claim 1, wherein the bcc-structured underlayer includes an alloy of at least one of Fe, Ni, and Co.

11. The method of claim 1, wherein the bcc-structured underlayer includes a CoFe alloy having an Fe content of at least 14 atomic percent.

12. The method of claim 1, wherein the bcc-structured underlayer includes a layer of non-ferromagnetic, non-ferrimagnetic material over a layer of magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials.

13. The method of claim 1, wherein the tunnel barrier, the deposited magnetic material, and the bcc-structured underlayer form a magnetic tunneling device, the method further comprising annealing the device to improve its performance.

14. The method of claim 13, comprising annealing the magnetic tunneling device at a temperature of at least 220°

C.

15. The method of claim 1, further comprising depositing a layer of magnetic material over the tunnel barrier to form a magnetic tunnel junction.

16. The method of claim 15, comprising annealing the magnetic tunnel junction to improve its tunneling magnetoresistance.

17. The method of claim 15, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 80%.

18. The method of claim 15, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 100%.

19. The method of claim 1, wherein the tunnel barrier includes a MgO tunnel barrier, and the MgO tunnel barrier is formed by:

depositing Mg onto the deposited magnetic material to form a Mg layer thereon; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the deposited magnetic material, the oxygen reacting with the additional Mg and the Mg layer.

20. The method of claim 1, wherein the tunnel barrier includes a Mg—

ZnO tunnel barrier formed by;

depositing a metal layer onto the deposited magnetic material; and

directing additional metal towards the metal layer, in the presence of oxygen, to form a magnesium-zinc oxide tunnel barrier in contact with the deposited magnetic material, the oxygen reacting with the additional metal and the metal layer, wherein;

at least one of the metal layer and the additional metal includes Zn, and

at least one of the metal layer and the additional metal includes Mg.

21. The method of claim 1, wherein the magnetic material is selected because it has a desirable physical parameter related to at least one of the following:

corrosion resistance, magnetic anisotropy, and magnetorestriction.

22. A device, comprising:

a tunnel barrier selected from the group of tunnel barriers consisting of MgO and Mg—

ZnO;

a bcc structure; and

a magnetic layer between the tunnel barrier and the bcc structure, wherein the magnetic layer;

i) by itself does not form a thermodynamically stable bcc-structure at room temperature and a pressure less than 1 atmosphere,

ii) but is nevertheless bcc-structured because of its proximity to the bcc structure,

iii) includes material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials, and

iv) is in proximity with the tunnel barrier, thereby permitting spin-polarized current to pass between the tunnel barrier and the magnetic layer.

23. The device of claim 22, wherein the bcc structure includes:

a layer of non-ferromagnetic, non-ferrimagnetic material in contact with the magnetic layer, and

a layer of material selected from the group consisting of ferromagnetic and ferrimagnetic materials.

24. The device of claim 22, wherein the tunnel barrier is in contact with the magnetic layer.

25. The device of claim 22, wherein the magnetic material is at least partially (100) oriented to improve the performance of the tunnel barrier.

26. The device of claim 22, wherein the tunnel barrier is (100) oriented.

27. The device of claim 22, wherein the bcc structure is neither ferromagnetic nor ferrimagnetic.

28. The device of claim 22, wherein the bcc structure includes at least one of V, Cr, Nb, Mo, and W.

29. The device of claim 22, wherein the bcc structure includes at least one V, Cr, Nb, Mo, and W that is alloyed with at least one of Fe, Co, and Ni.

30. The device of claim 22, wherein the magnetic layer includes Co.

31. The device of claim 22, wherein the magnetic layer includes material selected from the group consisting of CoNi and NiFe alloys.

32. The device of claim 22, wherein the magnetic layer has a thickness of between 0.5 and 1.5 nm.

33. The device of claim 22, wherein the bcc structure includes an alloy of at least one of Fe, Ni, and Co.

34. The device of claim 22, wherein the bcc structure includes a CoFe alloy having an Fe content of at least 14 atomic percent.

35. The device of claim 22, wherein the bcc structure includes a layer of non-ferromagnetic, non-ferrimagnetic material in contact with a layer of magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials.

36. The device of claim 22, wherein the device has been annealed to improve its performance.

37. The device of claim 22, wherein the magnetic material is selected because it has a desirable physical parameter related to at least one of the following:

corrosion resistance, magnetic anisotropy, and magnetorestriction.

38. The device of claim 37, wherein the selected magnetic material includes an alloy of Co.

39. The device of claim 37, wherein the selected magnetic material includes an alloy of Fe.

40. The device of claim 37, wherein the selected magnetic material includes an alloy of Ni.

41. The device of claim 22, further comprising a second layer of magnetic material in proximity with the tunnel barrier, so that the device forms a magnetic tunnel junction.

42. The device of claim 41, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 80%.

43. The device of claim 41, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 100%.

44. A device, comprising:

a bcc magnetic material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials; and

a tunnel barrier in proximity with the bcc magnetic material, permitting spin-polarized current to pass between the tunnel barrier and the magnetic layer,

wherein the bcc magnetic material by itself does not form a thermodynamically stable bcc-structure at room temperature and a pressure less than 1 atmosphere, but is nevertheless bcc because of its proximity to a nearby material having a structure that induces the magnetic material to form a bcc-structure.

45. The device of claim 44, wherein the tunnel barrier includes a MgO tunnel barrier.

46. The device of claim 44, wherein the tunnel barrier includes a Mg—

Zn oxide tunnel barrier.

47. The device of claim 44, wherein the tunnel barrier includes a tunnel barrier selected from the group of tunnel barriers consisting of ZnS, ZnSe, ZnTe, CdS, CdSe, CdTe, AlAs and Al_1-xGa_xAs.

48. The device of claim 44, wherein the magnetic material includes Co.

49. The device of claim 44, wherein the magnetic material includes material selected from the group consisting of CoNi and NiFe alloys.

50. The device of claim 44, wherein the nearby material includes at least one of V, Cr, Nb, Mo, W, and alloys thereof.

51. The device of claim 44, wherein the nearby material includes at least one of V, Cr, Nb, Mo, and W that is alloyed with at least one of Fe and Co.

52. The device of claim 44, wherein the nearby material is MgO of a simple cubic structure.

53. The device of claim 52, wherein the simple-cubic MgO is in contact with the bcc magnetic material.

54. The device of claim 44, wherein the bcc magnetic material is at least partially (100) oriented to improve the performance of the tunnel barrier, and the tunnel barrier is (100) oriented.

55. The device of claim 44, further comprising a layer of magnetic material that together with the bcc magnetic material and the tunnel barrier forms a magnetic tunnel junction.

56. The device of claim 55, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 80%.

57. The device of claim 55, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 100%.

58. A method, comprising:

positioning preselected magnetic material and a tunnel barrier in proximity with each other, to form a structure that permits spin-polarized current to pass between the tunnel barrier and bcc magnetic material, wherein the preselected magnetic material;

i) by itself does not form a thermodynamically stable bcc-structure at room temperature and a pressure less than 1 atmosphere,

ii) but is nevertheless bcc-structured because of its proximity to a nearby material having a structure that induces it to form said bcc magnetic material, and

iii) includes material selected from the group consisting of ferromagnetic materials and ferrimagnetic materials.

59. The method of claim 58, wherein the nearby material is the tunnel barrier.

60. The method of claim 59, wherein the tunnel barrier includes simple cubic MgO.

61. The method of claim 58, wherein the preselected magnetic material is selected because it has a desirable physical parameter related to at least one of the following:

corrosion resistance, magnetic anisotropy, and magnetorestriction.

62. The method of claim 58, wherein the preselected magnetic material includes Co.

63. The method of claim 58, wherein the preselected magnetic material includes material selected from the group consisting of CoNi and NiFe alloys.

64. The method of claim 58, wherein the nearby material includes at least one of V, Cr, Nb, Mo, and W.

65. The method of claim 58, wherein the nearby material includes at least one of V, Cr, Nb, Mo, and W that is alloyed with at least one of Fe and Co.

66. The method of claim 58, wherein the tunnel barrier includes a MgO tunnel barrier.

67. The method of claim 58, wherein the tunnel barrier includes a Mg—

Zn oxide tunnel barrier.

68. The method of claim 58, wherein the tunnel barrier includes a tunnel barrier selected from the group of tunnel barriers consisting of ZnS, ZnSe, ZnTe, CdS, CdSe, CdTe, AlAs and Al_1-xGa_xAs.

69. The method of claim 58, wherein the bcc magnetic material is at least partially (100) oriented to improve the performance of the tunnel barrier, and the tunnel barrier is (100) oriented.

70. The method of claim 58, wherein the tunnel barrier includes a MgO tunnel barrier, and the MgO tunnel barrier is formed by:

depositing Mg onto an underlayer to form a Mg layer thereon; and

directing additional Mg, in the presence of oxygen, towards the Mg layer to form a MgO tunnel barrier in contact with the underlayer, the oxygen reacting with the additional Mg and the Mg layer.

71. The method of claim 58, wherein the tunnel barrier includes a Mg—

ZnO tunnel barrier, and the Mg—

ZnO tunnel barrier is formed by;

depositing a metal layer onto an underlayer; and

directing additional metal towards the metal layer, in the presence of oxygen, to form a magnesium-zinc oxide tunnel barrier in contact with the underlayer, the oxygen reacting with the additional metal and the metal layer, wherein;

at least one of the metal layer and the additional metal includes Zn, and

at least one of the metal layer and the additional metal includes Mg.

72. The method of claim 58, further comprising forming a magnetic layer in proximity with the tunnel barrier, so that the magnetic layer, the preselected magnetic material, and the tunnel barrier form a magnetic tunnel junction.

73. The method of claim 72, comprising annealing the magnetic tunnel junction at a temperature of at least 220°

C. to improve its tunneling magnetoresistance.

74. The method of claim 72, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 80%.

75. The method of claim 72, wherein the magnetic tunnel junction has a tunneling magnetoresistance of at least 100%.