Projection exposure apparatus and method, catadioptric optical system and manufacturing method of devices

• US 7,301,605 B2
• Filed: 01/26/2001
• Issued: 11/27/2007
• Est. Priority Date: 03/03/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Owa, Soichi, Shiraishi, Naomasa, Omura, Yasuhiro
• Primary Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US09/769,832
• Publication Number:
  US 20030011755A1
• Time in Patent Office: 2,496 Days
• Field of Search: 355/43, 355/45, 355/49, 355/51, 355/53, 355/57, 355/60, 355/66, 355/67, 355/71, 355/77, 359/355, 359636-640, 359726-727, 359/732
• US Class Current: 355/67
• CPC Class Codes: G02B 13/24 for reproducing or copying at short object distances
• CPC Class Codes: G02B 17/08 Catadioptric systems used in non-imaging applications G02B19/00
• CPC Class Codes: G02B 17/0892 specially adapted for the UV
• CPC Class Codes: G03F 7/70225 Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
• CPC Class Codes: G03F 7/70275 Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Abstract

A projection exposure apparatus includes a projection optical system, which is arranged in an optical path between a first surface and a second surface, projects a pattern on a negative plate arranged on the first surface onto a workpiece arranged on the second surface and exposes the pattern thereon. The projection optical system includes a first imaging optical subsystem having a dioptric imaging optical system; a second imaging optical subsystem having a concave reflecting system; a third imaging optical subsystem having a dioptric imaging optical system; a first folding mirror arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and a second folding mirror arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem. The first imaging optical subsystem forms a first intermediate image and the second imaging optical subsystem forms a second intermediate image.

Claims

1. A catadioptric optical system forming a reduced image of a first surface onto a second surface comprising:

a first imaging optical subsystem which is arranged in an optical path between the first surface and the second surface and includes a dioptric imaging optical system to form a first intermediate image of the first surface;

a first folding mirror which is arranged in the vicinity of a position of forming the first intermediate image to deflect a beam prior to or after the position where the first intermediate image is formed;

a second imaging optical subsystem which is arranged in an optical path between the first folding mirror and the second surface and which forms a second intermediate image with a magnification factor nearly equal to the first intermediate image in the vicinity of a position of forming the first intermediate image based on the beam from the first intermediate image, the second imaging optical subsystem includes a concave reflecting mirror and at least one negative lens;

a second folding mirror which is arranged in the vicinity of a position of forming the first intermediate image to deflect a beam prior to or after the position where the second intermediate image is formed; and

a third imaging optical subsystem which is arranged in an optical path between the second imaging optical subsystem and the second surface and includes a dioptric imaging optical system to form the reduced image onto the second surface based on the beam from the second intermediate image,

wherein the catadioptric optical system is a telecentric optical system on both sides of the first surface and the second surface.

2. The catadioptric optical system of claim 1, wherein a reflecting surface of the first folding mirror and a reflecting surface of the second folding mirror are positioned so that they do not overlap spatially.

3. The catadioptric optical system of claim 2, wherein all lenses constituting the first imaging optical subsystem and all lenses constituting the third imaging optical subsystem are arranged along a single optical axis.

4. The catadioptric optical system of claim 3, wherein a magnification factor β

2 of the second imaging optical subsystem satisfies the following condition;

0.082<

|β

2|<

1.20.

5. The catadioptric optical system of claim 4, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

6. The catadioptric optical system of claim 5, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

where a magnification of the catadioptric optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

7. The catadioptric optical system of claim 6, wherein the following condition is satisfied:

|E−

D|/|E|<

0.24,

where a distance between a surface of the first imaging optical subsystem on a most image side and an exit pupil position along the optical axis is defined as E, and a distance by air conversion from the surface of the first imaging optical subsystem on the most image side to the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as D.

8. The catadioptric optical system of claim 7, wherein:

the first intermediate image is formed in an optical path between the first folding mirror and the second imaging optical subsystem; and

the second intermediate image is formed in an optical path between the second imaging optical subsystem and the second folding mirror.

9. The catadioptric optical system of claim 8, wherein:

85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along the single optical axis.

10. The catadioptric optical system of claim 9, wherein:

an intersection line of an extension plane of the reflecting surface of the first folding mirror and an extension plane of the reflecting surface of the second folding mirror is set up so that an optical axis of the first imaging optical subsystem, an optical axis of the second imaging optical subsystem and an optical axis of the third imaging optical subsystem intersect at one point.

11. The catadioptric optical system of claim 10, wherein:

the second imaging optical subsystem has at least two negative lenses.

12. The catadioptric optical system of claim 11, wherein:

the first folding mirror has a back surface reflecting mirror for reflecting a beam from the first imaging optical subsystem to the second imaging optical subsystem; and

the second folding mirror has a back surface reflecting mirror for reflecting a beam from the second imaging optical subsystem to the third imaging optical subsystem.

13. The catadioptric optical system of claim 12, wherein:

the catadioptric optical system forms the reduced image on a position deviating from a position of reference in an optical axis of the catadioptric optical system on the second surface.

14. The catadioptric optical system of claim 1, wherein:

a plurality of lenses constituting the first imaging optical subsystem and a plurality of lenses constituting the third imaging optical subsystem are arranged along a single optical axis.

15. The catadioptric optical system of claim 1, wherein a magnification β

2 of the second imaging optical subsystem satisfies the following condition;

0.82<

|β

2|<

1.20.

16. The catadioptric optical system of claim 15, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

17. The catadioptric optical system of claim 1, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

18. The catadioptric optical system of claim 1, wherein the following condition is satisfied:

0.20<

|β

|β

1|<

0.50,

where a magnification of the catadioptric optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

19. The catadioptric optical system of claim 1, wherein the following condition is satisfied:

|E−

D|/|E|<

0.24,

where a distance between a surface of the first imaging optical subsystem on a most image side and an exit pupil position along the optical axis is defined as E, and a distance by air conversion from the surface of the first imaging optical subsystem on the most image side to the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as D.

20. The catadioptric optical system of claim 1, wherein:

the first intermediate image is formed in an optical path between the first folding mirror and the second imaging optical subsystem; and

the second intermediate image is formed in an optical path between the second imaging optical subsystem and the second folding mirror.

21. The catadioptric optical system of claim 1, wherein:

85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along the single optical axis.

22. The catadioptric optical system of claim 1, wherein an intersection line of an extension plane of a reflecting surface of the first folding mirror and an extension plane of a reflecting surface of the second folding mirror is set up so that an optical axis of the first imaging optical subsystem, an optical axis of the second imaging optical subsystem and an optical axis of the third imaging optical subsystem intersect at one point.

23. The catadioptric optical system of claim 1, wherein the second imaging optical subsystem has at least two negative lenses.

24. The catadioptric optical system of claim 1, wherein:

the first folding mirror has a back surface reflecting surface for reflecting a beam from the first imaging optical subsystem to the second imaging optical subsystem; and

the second folding mirror has a back surface reflecting surface for reflecting a beam from the second imaging optical subsystem to the third imaging optical subsystem.

25. The catadioptric optical system of claim 1, wherein:

the catadioptric optical system forms the reduced image in a position deviating from a position of a reference optical axis of the catadioptric optical system on the second surface.

26. A catadioptric optical system forming a reduced image of a first surface onto a second surface comprising:

a first imaging optical subsystem with a first optical axis, which is arranged in an optical path between the first surface and the second surface and includes a dioptric imaging optical system;

a second imaging optical subsystem with a concave reflecting mirror and a second optical axis, which is arranged in an optical path between the first imaging optical subsystem and the second surface; and

a third imaging optical subsystem with a third optical axis, which is arranged in an optical path between the second imaging optical subsystem and the second surface and includes a dioptric imaging optical system,

wherein the first optical axis and the second optical axis intersect with each other and the second optical axis and the third optical axis intersect with each other, and

wherein the catadioptric optical system is a telecentric optical system on both sides of the first surface and the second surface.

27. The catadioptric optical system of claim 26, further comprising:

a first reflection surface arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and

a second reflection surface arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem.

28. The catadioptric optical system of claim 27, wherein a first intermediate image is formed in an optical path between the first reflection surface and the second imaging optical subsystem by the first imaging optical subsystem, and a second intermediate image is formed in an optical path between the second imaging optical subsystem and the second reflection surface by the second imaging optical subsystem.

29. The catadioptric optical system of claim 28, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

30. The catadioptric optical system of claim 26, wherein a magnification factor β

2 of the second imaging optical subsystem satisfies the following condition;

0.082<

|β

2|<

1.20.

31. The catadioptric optical system of claim 30, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

where a magnification of the catadioptric optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

32. The catadioptric optical system of claim 31, wherein the following condition is satisfied:

|E−

D|/|E|<

0.24,

where a distance between a surface of the first imaging optical subsystem on a most image side and an exit pupil position along the optical axis is defined as E, and a distance by air conversion from the surface of the first imaging optical subsystem on the most image side to the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as D.

33. The catadioptric optical system of claim 30, wherein the second imaging optical subsystem has at least two negative lenses.

34. The catadioptric optical system of claim 26, wherein 85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along a single optical axis, and wherein the first optical axis and the third optical axis form the single optical axis.

35. The catadioptric optical system of claim 26, wherein the catadioptric optical system forms the reduced image in a position deviating from a position of a reference optical axis of the catadioptric optical system on the second surface.

36. A catadioptric optical system forming a reduced image of a first surface onto a second surface comprising:

a first imaging optical subsystem with a first optical axis, which is arranged in an optical path between the first surface and the second surface and includes a dioptric imaging optical system;

a second imaging optical subsystem with a concave reflecting mirror and a second optical axis, which is arranged in an optical path between the first imaging optical subsystem and the second surface; and

a third imaging optical subsystem with a third optical axis, which is arranged in an optical path between the second imaging optical subsystem and the second surface and includes a dioptric imaging optical system,

wherein the first optical axis and the third optical axis are located on a common axis, and

wherein the catadioptric optical system is a telecentric optical systemon both sides of the first surface and the second surface.

37. The catadioptric optical system of claim 36, further comprising:

a first reflection surface arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and

a second reflection surface arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem.

38. The catadioptric optical system of claim 37, wherein a first intermediate image is formed in an optical path between the first reflection surface and the second imaging optical subsystem by the first imaging optical subsystem, and a second intermediate image is formed in an optical path between the second imaging optical subsystem and the second reflection surface by the second imaging optical subsystem.

39. The catadioptric optical system of claim 38, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1 , and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

40. The catadioptric optical system of claim 37, wherein an intersection line of an extension plane of the first reflection surface and an extension plane of the second reflection surface is set up so that the first optical axis of the first imaging optical subsystem, the second optical axis of the second imaging optical subsystem and the third optical axis of the third imaging optical subsystem intersect at one point.

41. The catadioptric optical system of claim 36, wherein a magnification factor β

2 of the second imaging optical subsystem satisfies the following condition;

0.082<

|β

2|<

1.20.

42. The catadioptric optical system of claim 41, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

where a magnification of the catadioptric optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

43. The catadioptric optical system of claim 42, wherein following condition is satisfied:

|E−

D|/|E|<

0.24,

where a distance between a surface of the first imaging optical subsystem on a most image side and an exit pupil position along the optical axis is defined as E, and a distance by air conversion from the surface of the first imaging optical subsystem on the most image side to the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as D.

44. The catadioptric optical system of claim 41, wherein the second imaging optical subsystem has at least two negative lenses.

45. The catadioptric optical system of claim 36, wherein 85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along a single optical axis, and wherein the first optical axis and the third optical axis form the single optical axis.

46. The catadioptric optical system of claim 36, wherein the catadioptric optical system forms the reduced image in a position deviating from a position of a reference optical axis of the catadioptric optical system on the second surface.

47. A projection exposure apparatus comprising:

a projection optical system which is arranged in an optical path between a first surface and a second surface that projects and exposes a pattern located on the first surface onto a workpiece located on the second surface, and

the projection optical system that comprises;

a first imaging optical subsystem including a dioptric imaging optical system;

a second imaging optical subsystem including a concave reflecting mirror;

a third imaging optical subsystem including a dioptric imaging optical system;

a first folding mirror arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and

a second folding mirror arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem;

wherein the first imaging optical subsystem forms a first intermediate image of the first surface into the optical path between the first imaging optical subsystem and the second imaging optical subsystem,

the second imaging optical subsystem forms a second intermediate image of the first surface into the optical path between the second imaging optical subsystem, and

wherein the projection optical system is a telecentric optical system on both sides of the first surface and the second surface.

48. The projection exposure apparatus of claim 47, wherein:

the projection exposure apparatus projects the pattern on the mask onto the workpiece and exposes the pattern while the mask and the workpiece are moved in the same direction.

49. The projection exposure apparatus of claim 48, wherein:

the first folding mirror has a first reflecting surface;

the second folding mirror has a second reflecting surface; and

the first reflecting surface and the second reflecting surface are positioned so that they do not overlap spatially.

50. The projection exposure apparatus of claim 49, wherein:

the first and the second reflecting surfaces are substantially flat surfaces.

51. The projection exposure apparatus of claim 48, wherein:

the projection optical system forms a reduced image of the pattern onto the workpiece.

52. The projection exposure apparatus of claim 48, wherein:

at least one of the first imaging optical subsystem and the third imaging optical subsystem contains an aperture stop.

53. The projection exposure apparatus of claim 48, wherein:

a plurality of optical members in the first imaging optical subsystem are arranged along a first optical axis extending in a straight line;

the concave reflecting mirror in the second imaging optical subsystem are arranged along a second optical axis; and

a plurality of optical members in the third imaging optical subsystem are arranged along a third optical axis extending in a straight line.

54. The projection exposure apparatus of claim 48, wherein:

the first imaging optical subsystem and the third imaging optical subsystem have a common optical axis; and

the first surface and the second surface are orthogonal in a direction of gravity.

55. The projection exposure apparatus of claim 48, wherein a magnification β

2 of the second imaging optical subsystem satisfies the following condition;

0.82<

|β

2|<

1.20.

56. The projection exposure apparatus of claim 55, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50

wherein a magnification of the projection optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

57. The projection exposure apparatus of claim 48, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50

wherein a magnification of the projection optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

58. The projection exposure apparatus of claim 48, wherein:

the concave reflecting mirror in the second imaging optical subsystem is arranged in the vicinity of a pupil surface of the projection optical system.

59. The projection exposure apparatus of claim 48, wherein:

the first intermediate image is formed in the optical path between the first folding mirror and a concave reflecting mirror in the second imaging optical subsystem; and

the second intermediate image is formed in the optical path between the concave reflecting mirror in the second imaging optical subsystem and the second folding mirror.

60. The projection exposure apparatus of claim 59, wherein:

the first intermediate image and the second intermediate image are formed in both sides of a second optical axis of the second imaging optical subsystem.

61. The projection exposure apparatus of claim 48, wherein:

a second optical axis of the second imaging optical subsystem is orthogonal to a first optical axis of the first imaging optical subsystem and a third optical axis of the third imaging optical subsystem.

62. The projection exposure apparatus of claim 61, wherein:

the second optical axis of the second imaging optical subsystem extends in a straight line.

63. The projection exposure apparatus of claim 48, wherein:

an intersection line of an extension plane of a reflecting surface of the first optical path folding mirror and an extension plane of a reflecting surface of the second optical path folding mirror intersects with a first optical axis of the first imaging optical subsystem, a second optical axis of the second imaging optical subsystem and a third optical axis of the third imaging optical subsystem at one point.

64. The projection exposure apparatus of claim 48, wherein:

the first folding mirror has a back surface reflecting surface for reflecting a beam from the first imaging optical subsystem to the second imaging optical subsystem; and

the second folding mirror has a back surface reflecting surface for reflecting a beam from the second imaging optical subsystem to the third imaging optical subsystem.

65. The projection exposure apparatus of claim 48, wherein an image of the first surface is formed in a position deviating from a position of a reference optical axis of the projection optical system on the second surface.

66. A manufacturing method of micro-devices comprising:

preparing a mask with a pattern;

preparing a workpiece;

projecting the pattern onto the workpiece using the projection exposure apparatus of claim 48.

67. An exposure method for projecting a pattern onto a workpiece via a projection optical system, the method comprising:

directing an illuminating light in the ultraviolet region to the pattern;

directing the illuminating light to a first imaging optical subsystem including a dioptric imaging optical system via the pattern to form a first intermediate image of the pattern;

directing the illuminating light from the first intermediate image to a second imaging optical subsystem including a concave reflecting mirror to form a second intermediate image;

directing the illuminating a light from the second intermediate image to a third imaging optical subsystem including a dioptric imaging optical system;

deflecting the illuminating light from the first imaging optical subsystem by a first folding mirror arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and

deflecting the illuminating light from the second imaging optical subsystem by a second folding mirror arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem,

wherein the projection optical system is a telecentric optical system on the pattern side and the workpiece side.

68. The exposure method of claim 67, wherein:

the pattern is projected onto the workpiece and exposed while the workpiece is moved relative to the projection optical system.

69. The exposure method of claim 67, wherein the first intermediate image of the pattern is formed in an optical path between the first folding mirror and the second imaging optical subsystem by the first imaging optical subsystem, and the second intermediate image is formed in an optical path between the second imaging optical subsystem and the second folding mirror by the second imaging optical subsystem.

70. The exposure method of claim 69, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

71. The exposure method of claim 67, wherein an intersection line of an extension plane of the first folding mirror and an extension plane of the second folding mirror is set up so that an optical axis of the first imaging optical subsystem, an optical axis of the second imaging optical subsystem and an optical axis of the third imaging optical subsystem intersect at one point.

72. The exposure method of claim 67, wherein a magnification factor β

2 of the second imaging optical subsystem satisfies the following condition;

0.082<

|β

2|<

1.20.

73. The exposure method of claim 72, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

where a magnification of the catadioptric optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

74. The exposure method of claim 73, wherein the following condition is satisfied:

|E−

D|/|E|<

0.24,

where a distance between a surface of the first imaging optical subsystem on a most image side and an exit pupil position along the optical axis is defined as E, and a distance by air conversion from the surface of the first imaging optical subsystem on the most image side to the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as D.

75. The exposure method of claim 72, wherein the second imaging optical subsystem has at least two negative lenses.

76. The exposure method of claim 67, wherein 85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along a single optical axis, and wherein an optical axis of the first imaging optical subsystem and an optical axis of the third imaging optical subsystem form the single optical axis.

77. The exposure method of claim 67, further comprising:

the step of forming an image in a position deviating from a position of a reference optical axis of the third imaging optical subsystem on the workpiece.

78. A manufacturing method of micro-devices comprising the steps of:

preparing a pattern;

preparing a workpiece; and

exposing the pattern onto the workpiece with the exposure method of claim 67.

79. A catadioptric optical system forming a reduced image of a first surface onto a second surface comprising:

a first imaging optical subsystem with a first optical axis, which is arranged in an optical path between the first surface and the second surface and includes a dioptric imaging optical system;

a second imaging optical subsystem with a concave reflecting mirror and a second optical axis, which is arranged in an optical path between the first imaging optical subsystem and the second surface;

a third imaging optical subsystem with a third optical axis, which is arranged in an optical path between the second imaging optical subsystem and the second surface and includes a dioptric imaging optical system;

a first folding mirror which is arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and

a second folding mirror which is arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem,

wherein the first optical axis and the third optical axis are located on a common axis,

wherein the first folding mirror and the second folding mirror are formed monolithically, and

wherein the catadioptric optical system is a telecentric optical system on both sides of the first surface and the second surface.

80. The catadioptric optical system of claim 79, wherein:

a first intermediate image is formed in an optical path between the first folding mirror and the second imaging optical subsystem by the first imaging optical subsystem, and

a second intermediate image is formed in an optical path between the second imaging optical subsystem and the second folding mirror by the second imaging optical subsystem.

81. The catadioptric optical system of claim 80, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

82. The catadioptric optical system of claim 79, wherein an intersection line of an extension plane of the first folding mirror and an extension plane of the second folding mirror is set up so that the first optical axis of the first imaging optical subsystem, the second optical axis of the second imaging optical subsystem and the third optical axis of the third imaging optical subsystem intersect at one point.

83. The catadioptric optical system of claim 79, wherein a magnification factor β

2 of the second imaging optical subsystem satisfies the following condition;

0.082<

|β

2|<

1.20.

84. The catadioptric optical system of claim 83, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

where a magnification of the catadioptric optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

85. The catadioptric optical system of claim 84, wherein the following condition is satisfied:

|E−

D|/|E|<

0.24,

where a distance between a surface of the first imaging optical subsystem on a most image side and an exit pupil position along the optical axis is defined as E, and a distance by air conversion from the surface of the first imaging optical subsystem on the most image side to the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as D.

86. The catadioptric optical system of claim 83, wherein the second imaging optical subsystem has at least two negative lenses.

87. The catadioptric optical system of claim 86, wherein the at least two negative lenses have a meniscus lens.

88. The catadioptric optical system of claim 79, wherein 85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along a single optical axis, and wherein the first optical axis and the third optical axis form the single optical axis.

89. The catadioptric optical system of claim 79, wherein the catadioptric optical system forms the reduced image in a position deviating from a position of a reference optical axis of the catadioptric optical system on the second surface.

90. A catadioptric optical system forming an image of a first surface onto a second surface comprising:

a first imaging optical subsystem with a first optical axis, which is arranged in an optical path between the first surface and the second surface and includes a dioptric imaging optical system;

a second imaging optical subsystem with a concave reflecting mirror and a second optical axis, which is arranged in an optical path between the first imaging optical subsystem and the second surface;

a third imaging optical subsystem with a third optical axis, which is arranged in an optical path between the second imaging optical subsystem and the second surface and includes a dioptric imaging optical system;

a first folding mirror which is arranged in an optical path between the first imaging optical subsystem and the second imaging optical subsystem; and

a second folding mirror which is arranged in an optical path between the second imaging optical subsystem and the third imaging optical subsystem,

wherein the first optical axis and the third optical axis are located on a common axis,

wherein an intersection line of an extension plane of a reflecting surface of the first folding mirror and an extension plane of a reflecting surface of the second folding mirror is on the common axis, and

wherein the catadioptric optical system is a telecentric optical system on both sides of the first surface and the second surface.

91. The catadioptric optical system according to claim 90, wherein the first folding mirror and the second folding mirror are formed monolithically.

92. The catadioptric optical system of claim 91, wherein the first and the second folding mirrors have substantially flat reflection surfaces.

93. The catadioptric optical system of claim 90, wherein at least one of the first imaging optical subsystem and the third imaging optical subsystem contains an aperture stop.

94. The catadioptric optical system of claim 90, wherein a plurality of optical members in the first imaging optical subsystem are arranged along the first optical axis extending in a straight line, the concave reflecting mirror in the second imaging optical subsystem is arranged along the second optical axis, and a plurality of optical members in the third imaging optical subsystem are arranged along the third optical axis extending in a straight line.

95. The catadioptric optical system of claim 94, wherein 85% of the number of lenses in all lenses constituting the catadioptric optical system are arranged along the common axis.

96. The catadioptric optical system of claim 94, wherein the second optical axis of the second imaging optical subsystem is orthogonal to the first optical axis of the first imaging optical subsystem and the third optical axis of the third imaging optical subsystem.

97. The catadioptric optical system of claim 90, wherein the first surface and the second surface are orthogonal in a direction of gravity.

98. The catadioptric optical system of claim 90, wherein a magnification factor β

2 of the second imaging optical subsystem satisfies the following condition;

0.082<

|β

2|<

1.20.

99. The catadioptric optical system of claim 98, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

wherein a magnification of the projection optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

100. The catadioptric optical system of claim 98, wherein the second imaging optical subsystem has at least two negative lenses.

101. The catadioptric optical system of claim 90, wherein the following condition is satisfied:

0.20<

|β

|/|β

1|<

0.50,

wherein a magnification of the projection optical system is defined as β

, and a magnification of the first imaging optical subsystem is defined as β

1.

102. The catadioptric optical system of claim 90, wherein the concave reflecting mirror in the second imaging optical subsystem is arranged in the vicinity of a pupil surface of the projection optical system.

103. The catadioptric optical system of claim 90, wherein a first intermediate image is formed in the optical path between the first folding mirror and the concave reflecting mirror in the second imaging optical subsystem, and a second intermediate image is formed in the optical path between the concave reflecting mirror in the second imaging optical subsystem and the second folding mirror.

104. The catadioptric optical system of claim 103, wherein the first intermediate image and the second intermediate image are formed in both sides of the second optical axis of the second imaging optical subsystem.

105. The catadioptric optical system of claim 103, wherein the following condition is satisfied:

|L1−

L2|/|L1|<

0.15,

where a first distance between the first intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L1, and a second distance between the second intermediate image and the concave reflecting mirror in the second imaging optical subsystem along the optical axis is defined as L2.

106. The catadioptric optical system of claim 103, wherein the second optical axis of the second imaging optical subsystem extends in a straight line.

107. The catadioptric optical system of claim 90, wherein the intersection line of the extension plane of the reflecting surface of the first optical path folding mirror and the extension plane of the reflecting surface of the second optical path folding mirror intersects with the first optical axis of the first imaging optical subsystem, the second optical axis of the second imaging optical subsystem and the third optical axis of the third imaging optical subsystem at one point.

108. The catadioptric optical system of claim 90, wherein the image of the first surface is formed in a position deviating from a position of a reference optical axis of the projection optical system on the second surface.