Moveable micro-electromechanical device
First Claim
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1. An interferometric modulator, comprising:
- a first movable plate;
a second movable plate defining a cavity with the first movable plate;
a first transducer configured to cause a first relative movement between the first and second plates; and
a second transducer configured to cause a second relative movement between the first and second plates,wherein the first movable plate and second movable plate comprise an interferometric modulator configured to cause light interference within the cavity.
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Abstract
A MEMS device is provided. The MEMS device may include a first plate and a second plate defining a cavity with the first plate. The MEMS device may also include a first transducer configured to cause a first relative movement between the first and second plates and a second transducer configured to cause a second relative movement between the first and second plates.
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Citations
31 Claims
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1. An interferometric modulator, comprising:
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a first movable plate; a second movable plate defining a cavity with the first movable plate; a first transducer configured to cause a first relative movement between the first and second plates; and a second transducer configured to cause a second relative movement between the first and second plates, wherein the first movable plate and second movable plate comprise an interferometric modulator configured to cause light interference within the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of manufacturing an interferometric modulator, the method comprising:
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positioning a first plate over a substrate; positioning a second plate over the first plate to define a cavity between the first plate and the second plate; configuring the first plate to be movable; configuring the second plate to be movable; configuring the first plate and the second plate to cause light interference within the cavity; configuring a first transducer to cause a first relative movement between the first plate and the second plate; and configuring a second transducer to cause a second relative movement between the first plate. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. An interferometric modulator comprising:
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first and second movable means for defining a cavity; means for causing a first movement between the first and second means for defining the cavity; and means for causing a second movement between the first and second means for defining the cavity, wherein the first and second movable means for defining the cavity comprise an interferometric modulator configured to cause light interference within the cavity. - View Dependent Claims (26, 27, 28, 29, 30, 31)
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Specification