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Moveable micro-electromechanical device

  • US 7,301,704 B2
  • Filed: 09/08/2006
  • Issued: 11/27/2007
  • Est. Priority Date: 04/08/1998
  • Status: Expired due to Fees
First Claim
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1. An interferometric modulator, comprising:

  • a first movable plate;

    a second movable plate defining a cavity with the first movable plate;

    a first transducer configured to cause a first relative movement between the first and second plates; and

    a second transducer configured to cause a second relative movement between the first and second plates,wherein the first movable plate and second movable plate comprise an interferometric modulator configured to cause light interference within the cavity.

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