Sunken electrode configuration for MEMs Micromirror
First Claim
1. A micro-electro-mechanical device mounted on a substrate comprising:
- an array of pivoting members pivotally mounted on said substrate about a first axis;
a first hot electrode beneath each pivoting member providing electro-static forces therebetween for pivoting respective pivoting members about the first axis; and
a first ground electrode adjacent to each first hot electrode separated by a substantially vertical surface;
wherein each of the vertical surfaces comprises a dielectric surface for isolating the first hot electrodes from the first ground electrodes;
wherein the first hot electrodes are sunken relative to the first ground electrodes, whereby the first ground electrodes substantially surround the first hot electrodes; and
wherein each substantially vertical surface is under cut at a negative angle beneath each first ground electrode.
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Accused Products
Abstract
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention electrostatic charges, which build up on exposed dielectric surfaces causing the mirror'"'"'s angular position to drift over time, are minimized by positioning the hot and ground electrodes at different levels separated by a vertical surface, and placing the dielectric material on the vertical surface.
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Citations
15 Claims
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1. A micro-electro-mechanical device mounted on a substrate comprising:
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an array of pivoting members pivotally mounted on said substrate about a first axis; a first hot electrode beneath each pivoting member providing electro-static forces therebetween for pivoting respective pivoting members about the first axis; and a first ground electrode adjacent to each first hot electrode separated by a substantially vertical surface; wherein each of the vertical surfaces comprises a dielectric surface for isolating the first hot electrodes from the first ground electrodes; wherein the first hot electrodes are sunken relative to the first ground electrodes, whereby the first ground electrodes substantially surround the first hot electrodes; and wherein each substantially vertical surface is under cut at a negative angle beneath each first ground electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micro-electro-mechanical device mounted on a substrate comprising:
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an array of pivoting members pivotally mounted on said substrate about a first axis; a first hot electrode beneath each pivoting member providing electro-static forces therebetween for pivoting respective pivoting members about the first axis; and a first ground electrode adjacent to each first hot electrode separated by a substantially vertical surface; wherein each of the vertical surfaces comprises a dielectric surface for isolating the first hot electrodes from the first ground electrodes; wherein the first hot electrodes are sunken relative to the first ground electrodes, whereby the first ground electrodes substantially surround the first hot electrodes; and wherein each pivoting member includes a first end proximate the first axis, and an outer free end remote from the first axis;
wherein each first hot electrode includes a first step beneath the first end, and a second step, lower than the first step, beneath the outer free end. - View Dependent Claims (8, 9, 10, 11)
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12. A micro-electro-mechanical device mounted on a substrate comprising:
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an array of pivoting members pivotally mounted on said substrate about a first axis; a first hot electrode beneath each pivoting member providing electro-static forces therebetween for pivoting respective pivoting members about the first axis; and a first ground electrode adjacent to each first hot electrode separated by a substantially vertical surface; wherein the vertical surfaces comprises a dielectric surface for isolating the first hot electrodes from the first ground electrodes; wherein each pivoting member includes a first and a second supporting region on opposite sides of said first axis; wherein each first electrode is beneath respective first supporting region; wherein the first and second supporting regions include a reflective surface; and wherein reflective cusps with angled or curved reflective surfaces extend from the substrate beneath a gap between the first and second supporting regions of adjacent pivoting members for deflecting light traveling therebetween in a direction substantially parallel to the first and second supporting regions, whereby the light is not reflected straight back. - View Dependent Claims (13, 14, 15)
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Specification