Electrical x-talk shield for MEMs micromirrors
First Claim
1. A micro-electro-mechanical device mounted on a substrate comprising:
- a first pivoting member pivotally mounted above the substrate;
a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member;
a first electrode for actuating the first pivoting member;
a second electrode positioned proximate the first electrode for actuating the second pivoting member;
a first shield positioned between the first and second electrodes for shielding the first pivoting member from fringing electric fields from the second electrode; and
a second shield extending downwardly from the first or second pivoting member, laterally offset from the first shield, whereby during movement of the first or second pivoting member the first and second shields overlap providing increased shielding effects,wherein the first shield extends the full length of the first electrode under the first pivoting member enabling the first and second pivoting members to be closely packed with only an air gap therebetween with enough clearance between the first shield and the first pivoting member to prevent any contact therebetween during a full range of motion thereof.
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Accused Products
Abstract
A micro-electro-mechanical (MEMs) mirror device for use in an optical switch is disclosed. A “piano”-style MEMs device includes an elongated platform pivotally mounted proximate the middle thereof by a torsional hinge. The middle portion of the platform and the torsional hinge have a combined width less than the width of the rest of the platform, whereby several of these “piano” MEMs devices can be positioned adjacent each other pivotally mounted about the same axis with only a relatively small air gap therebetween. In a preferred embodiment of the present invention specially designed for wavelength switching applications, a greater range of arcuate motion for a mirror mounted thereon is provided by enabling the platform to rotate about two perpendicular axes. The MEMs mirror device according to the preferred embodiment of the present invention enables the mirror to tilt about two perpendicular axes, by the use of an “internal” gimbal ring construction, which ensures that a plurality of adjacent mirror devices have a high fill factor, without having to rely on complicated and costly manufacturing processes. To limit the amount of electrical crosstalk between adjacent mirrors, shielding can be positioned between the electrodes. The shielding can extend upwardly from the substrate and/or downwardly from the undersurface of the mirrors. When both types of shielding are provided, one set is offset from the other to prevent abutment thereof, and to enable an overlapping effect, which enhances the protection.
10 Citations
18 Claims
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1. A micro-electro-mechanical device mounted on a substrate comprising:
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a first pivoting member pivotally mounted above the substrate; a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member; a first electrode for actuating the first pivoting member; a second electrode positioned proximate the first electrode for actuating the second pivoting member; a first shield positioned between the first and second electrodes for shielding the first pivoting member from fringing electric fields from the second electrode; and a second shield extending downwardly from the first or second pivoting member, laterally offset from the first shield, whereby during movement of the first or second pivoting member the first and second shields overlap providing increased shielding effects, wherein the first shield extends the full length of the first electrode under the first pivoting member enabling the first and second pivoting members to be closely packed with only an air gap therebetween with enough clearance between the first shield and the first pivoting member to prevent any contact therebetween during a full range of motion thereof. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micro-electro-mechanical device mounted on a substrate comprising:
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a first pivoting member pivotally mounted above the substrate; a second pivoting member pivotally mounted above the substrate adjacent the first pivoting member; a first electrode for actuating the first pivoting member; a second electrode positioned proximate the first electrode for actuating the second pivoting member; and a first shield positioned between the first and second electrodes for shielding the first pivoting member from fringing electric fields from the second electrode; wherein the first shield extends the full length of the first electrode under the first pivoting member enabling the first and second pivoting members to be closely packed with only an air gap therebetween with enough clearance between the first shield and the first pivoting member to prevent any contact therebetween during a full range of motion thereof; wherein each of the first and second pivoting members includes; a brace means extending between first and second supporting regions; and a first torsional hinge rotatable about the first pivot axis extending between the brace means and an anchor post extending from the substrate; and wherein a total width of the first torsional hinge and said brace means is less than a width of the first or the second supporting regions;
whereby the first and second pivoting member are pivotable about the first pivot axis and are positionable in close proximity with only an air gap between adjacent first supporting regions and between adjacent second supporting regions. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A micro-electro-mechanical device mounted on a substrate comprising:
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a plurality of platforms pivotally mounted above the substrate adjacent each other with only air gaps therebetween, and pivotable about a first pivot axis or one of a pair of first pivot axes; an electrode disposed beneath each of the platforms for pivoting each platform independently; and shielding comprising a first shield positioned under each platform on opposite sides of each electrode for reducing fringing electric fields from interfering with adjacent platforms; wherein the shielding also includes a second shield extending downwardly from each platform on opposite sides of each electrode, laterally offset from the first shield, whereby during movement of the platforms the first and second shields overlap to increase shielding effects. - View Dependent Claims (15)
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16. A micro-electro-mechanical device mounted on a substrate comprising:
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a plurality of platforms pivotally mounted above the substrate adjacent each other with only air gaps therebetween, and pivotable about a first pivot axis or one of a pair of first pivot axes; an electrode disposed beneath each of the platforms for pivoting each platform independently; and shielding comprising a first shield positioned under each platform on opposite sides of each electrode for reducing fringing electric fields from interfering with adjacent platforms; wherein each platform includes; a brace means extending between first and second supporting regions; a first torsional hinge rotatable about one of the first pivot axes extending between the brace means and an anchor post extending from the substrate; wherein a total width of the first torsional hinge and said brace means is less than a width of the first or the second supporting regions. - View Dependent Claims (17, 18)
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Specification