Force compensated comb drive
First Claim
1. A force compensated comb device for microelectromechanical system (MEMS) comprising:
- a MEMS mechanism for providing an output signal representative of a physical quantity;
a comb drive for actuating said MEMS mechanism;
a comb drive circuit for providing a drive signal to said comb drive for developing a force applied by said comb drive to said MEMS mechanism to effect a predetermined amplitude of displacement;
an automatic gain control responsive to a change in said predetermined force to provide a correction signal to said comb drive circuit to maintain said predetermined force; and
a compensation drive responsive to said correction signal for adjusting the output signal of said MEMS mechanism to compensate for errors in said output signal due to a change in said force.
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Accused Products
Abstract
A force compensated comb drive for a microelectromechanical system includes a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating the MEMS mechanism; a comb drive circuit for providing a drive signal to the comb drive for developing a predetermined displacement applied by the comb drive to the MEMS mechanism; an automatic gain control responsive to a change in the force to provide a correction signal to the comb drive circuit to maintain the predetermined motion; and a compensation device responsive to the correction signal for adjusting the output signal of the MEMS mechanism to compensate for errors in the output signal due to a change in the predetermined force.
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Citations
8 Claims
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1. A force compensated comb device for microelectromechanical system (MEMS) comprising:
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a MEMS mechanism for providing an output signal representative of a physical quantity; a comb drive for actuating said MEMS mechanism; a comb drive circuit for providing a drive signal to said comb drive for developing a force applied by said comb drive to said MEMS mechanism to effect a predetermined amplitude of displacement; an automatic gain control responsive to a change in said predetermined force to provide a correction signal to said comb drive circuit to maintain said predetermined force; and a compensation drive responsive to said correction signal for adjusting the output signal of said MEMS mechanism to compensate for errors in said output signal due to a change in said force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification