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Force compensated comb drive

  • US 7,302,848 B2
  • Filed: 03/10/2005
  • Issued: 12/04/2007
  • Est. Priority Date: 03/10/2005
  • Status: Active Grant
First Claim
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1. A force compensated comb device for microelectromechanical system (MEMS) comprising:

  • a MEMS mechanism for providing an output signal representative of a physical quantity;

    a comb drive for actuating said MEMS mechanism;

    a comb drive circuit for providing a drive signal to said comb drive for developing a force applied by said comb drive to said MEMS mechanism to effect a predetermined amplitude of displacement;

    an automatic gain control responsive to a change in said predetermined force to provide a correction signal to said comb drive circuit to maintain said predetermined force; and

    a compensation drive responsive to said correction signal for adjusting the output signal of said MEMS mechanism to compensate for errors in said output signal due to a change in said force.

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