Shielded probe for high-frequency testing of a device under test

• US 7,304,488 B2
• Filed: 12/01/2006
• Issued: 12/04/2007
• Est. Priority Date: 05/23/2002
• Status: Expired due to Fees

• Current Assignee: FormFactor Incorporated
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Gleason, K. Reed, Andrews, Mike, Martin, John, Lesher, Tim, Dunklee, John, Hayden, Leonard, Strid, Eric W., Safwat, Amr M. E.
• Primary Examiner(s): Nguyen; Vinh P.
• Application Number:
  US11/607,398
• Publication Number:
  US 20070075716A1
• Time in Patent Office: 368 Days
• Field of Search: 324754-762, 324/72.5, 324/765, 439/482, 439/824, 333246-248
• US Class Current: 324/756.01
• CPC Class Codes: G01R 1/06711 Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
• CPC Class Codes: G01R 1/06755 Material aspects
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/06777 High voltage probes

Abstract

A shielded probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies. The probe may include a probe tip that extends through a dielectric substrate that supports on a first surface a signal path to test instrumentation and on a second surface a ground path that shields both the signal path and the probe tip.

Claims

1. A probe comprising:

(a) a dielectric substrate having opposed first and second surfaces and a thickness of less than 40 microns and a dielectric constant of less than 7;

(b) an elongate conductor supported by said first surface and suitable to be electrically interconnected to a test signal supported by a first side of said substrate;

(c) a conductive member supported by said second surface and suitable to be electrically interconnected to a ground signal supported by said second side of said substrate wherein said conductive member is under a majority of the length of said elongate conductor;

(d) said elongate conductor extending through said dielectric substrate to extend beyond said second surface which surrounds a cross-sectional periphery of said elongate conductor, said elongate conductor free from electrical interconnection with said conductive member and terminating in a contact for testing a device under test.