Arc detection and handling in radio frequency power applications

• US 7,305,311 B2
• Filed: 04/22/2005
• Issued: 12/04/2007
• Est. Priority Date: 04/22/2005
• Status: Active Grant

• Current Assignee: AES Global Holdings Pte Ltd. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: van Zyl, Gideon J.
• Primary Examiner(s): Ramos-Feliciano; Eliseo
• Assistant Examiner(s): SUAREZ, FELIX E
• Application Number:
  US11/112,113
• Publication Number:
  US 20060241879A1
• Time in Patent Office: 956 Days
• Field of Search: 702/57, 702/106, 702/117, 702/182, 702/183, 702/188, 702/58, 702/75, 219/121, 219/769, 372/55, 700/121, 218/154, 250/423, 345211-213
• US Class Current: 702/57
• CPC Class Codes: H01J 2237/0206 Extinguishing, preventing or controlling unwanted discharges
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge
• CPC Class Codes: H01L 21/67069 for drying etching

Abstract

A radio frequency power delivery system comprises an RF power generator, arc detection circuitry, and control logic responsive to the arc detection circuitry. A dynamic boundary is computed about the measured value of a parameter representative of or related to the power transferred from the power generator to a load. A subsequently measured value of the parameter that exceeds the computed dynamic boundary of the parameter indicates detection of an arc. Upon detection of an arc, power delivery from the generator is interrupted or adjusted, or other action is taken, until the arc is extinguished. By employing dynamic computation of arc detection boundaries, the invention allows for arc handling in RF power deliver systems regardless of whether the system has reached a stable power delivery condition.

Claims

1. A method of delivering radio frequency power to a plasma load, comprising:

a) providing an RF power generator that transfers radio frequency power to the plasma load;

b) measuring a value of a parameter related to the power transfer from the RF power generator to the plasma load;

c) computing a dynamic boundary about the value of the parameter;

d) measuring a subsequent value of the parameter; and

e) indicating the occurrence of an arc within the plasma load if the subsequent value of the parameter exceeds the dynamic boundary.

2. The method of claim 1 wherein the parameter is reflected power.

3. The method of claim 1 wherein the parameter is a DC bias.

4. The method of claim 1 wherein the dynamic boundary is computed based upon a filtered value of the parameter.

5. The method of claim 1 wherein the dynamic boundary is computed based upon values of at least two parameters related to the power transfer from the RF power generator to the load.

6. The method of claim 1 wherein the dynamic boundary comprises an upper limit and a lower limit.

7. The method of claim 1 wherein the dynamic boundary is computed based upon a user-defined offset from the parameter.

8. The method of claim 1, further comprising the step of extinguishing the arc.

9. The method of claim 8 wherein the step of extinguishing the arc comprises interrupting power transfer to the load.

10. The method of claim 8 wherein the step of extinguishing the arc comprises reducing power transfer to the load.

11. The method of claim 8 wherein the step of extinguishing the arc occurs during tuning of power transfer from the RF power generator to the load.

12. The method of claim 8, further comprising the step of holding the dynamic boundary constant during the step of extinguishing the arc.

13. A radio frequency power delivery system, comprising:

a) an RF power generator, wherein the RF power generator provides a measured value of a parameter related to power transfer from the RF power generator to a plasma load;

b) arc detection circuitry that computes a dynamic boundary about the value of the parameter; and

c) controller logic responsive to the arc detection circuitry, wherein the controller logic indicates an occurrence of an arc within the plasma load if a subsequent value of the parameter exceeds the dynamic boundary.

14. The system of claim 13 wherein the parameter is reflected power.

15. The system of claim 13 wherein the parameter is a DC bias.

16. The system of claim 13 wherein the arc detection circuitry computes the dynamic boundary based upon a filtered value of the parameter.

17. The system of claim 16 wherein the arc detection circuitry comprises a fast filter and a slow filter, and wherein the arc detection circuitry computes the dynamic boundary based upon the parameter as filtered by the slow filter and the controller logic indicates an occurrence of an arc if a subsequent value of the parameter as filtered by the fast filter exceeds the dynamic boundary.

18. The system of claim 13 wherein the arc detection circuitry computes the dynamic boundary based upon values of at least two parameters related to the power transfer from the RE power generator to the load.

19. The system of claim 13 wherein the dynamic boundary comprises an upper limit and a lower limit.

20. The system of claim 13 wherein the arc detection circuitry computes the dynamic boundary based upon a user-defined offset from the parameter.

21. The system of claim 13, further comprising a switch responsive to the controller logic that acts to extinguish the arc.

22. The system of claim 21 wherein the switch interrupts power transfer to the load to extinguish the arc.

23. A plasma processing system, comprising:

a) a plasma processing chamber;

b) an RE power generator that delivers RF power to a plasma in the plasma processing chamber;

c) arc detection circuitry that computes a dynamic boundary about the value of the parameter; and

d) controller logic responsive to the arc detection circuitry, wherein the controller logic indicates an occurrence of an arc if a subsequent value of the parameter exceeds the dynamic boundary.

24. The system of claim 23 wherein the parameter is reflected power.

25. The system of claim 23 wherein the parameter is a DC bias.

26. The system of claim 23 wherein the arc detection circuitry computes the dynamic boundary based upon a filtered value of the parameter.

27. The system of claim 26 wherein the arc detection circuitry comprises a fast filter and a slow filter, and wherein the arc detection circuitry computes the dynamic boundary based upon the parameter as filtered by the slow filter and the controller logic indicates an occurrence of an arc if a subsequent value of the parameter as filtered by the fast filter exceeds the dynamic boundary.

28. The system of claim 23 wherein the arc detection circuitry computes the dynamic boundary based upon values of at least two parameters related to the power transfer from the RF power generator to the load.

29. The system of claim 23 wherein the dynamic boundary comprises an upper limit and a lower limit.

30. The system of claim 23 wherein the arc detection circuitry computes the dynamic boundary based upon a user-defined offset from the parameter.

31. The system of claim 23, further comprising a switch responsive to the controller logic that acts to extinguish the arc.

32. The system of claim 31 wherein the switch interrupts power transfer to the load to extinguish the arc.

33. The system of claim 23, further comprising an impedance matching network disposed between the RF power generator and the plasma processing chamber.

34. The system of claim 31, further comprising an impedance matching network disposed between the RF power generator and the plasma processing chamber, and wherein the switch acts to extinguish the arc during tuning of the impedance matching network.