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Resonant micro-electro-mechanical system with analog driving

  • US 7,305,880 B2
  • Filed: 08/02/2005
  • Issued: 12/11/2007
  • Est. Priority Date: 08/03/2004
  • Status: Active Grant
First Claim
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1. A resonant micro-electro-mechanical system, comprising:

  • a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom; and

    a driving device coupled to said mass for maintaining said mass in oscillation at a resonance frequency, said driving device including;

    a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said mass,an actuation and control stage supplying second signals for driving said mass on the basis of said first signals, anda filter, of a high-pass type, connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency.

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