Resonant micro-electro-mechanical system with analog driving
First Claim
1. A resonant micro-electro-mechanical system, comprising:
- a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom; and
a driving device coupled to said mass for maintaining said mass in oscillation at a resonance frequency, said driving device including;
a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said mass,an actuation and control stage supplying second signals for driving said mass on the basis of said first signals, anda filter, of a high-pass type, connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency.
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Abstract
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance frequency. The driving device includes a differential sense amplifier supplying first signals indicative of a velocity of oscillation of the mass, and an actuation and control stage supplying second signals for driving the mass on the basis of the first signals. The driving device moreover includes a filtering circuit of a high-pass type, which is connected between the differential sense amplifier and the actuation and control stage, and has a bandpass that includes the resonance frequency.
73 Citations
25 Claims
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1. A resonant micro-electro-mechanical system, comprising:
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a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom; and a driving device coupled to said mass for maintaining said mass in oscillation at a resonance frequency, said driving device including; a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said mass, an actuation and control stage supplying second signals for driving said mass on the basis of said first signals, and a filter, of a high-pass type, connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An integrated micro-electro-mechanical gyroscope, comprising:
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a microstructure having a first mass which is free to oscillate along a first axis; a driving device coupled to said first mass for maintaining said first mass in oscillation at a resonance frequency, said driving device including; a differential sense amplifier supplying first signals indicative of a velocity of oscillation of said first mass; an actuation and control stage supplying second signals for driving said first mass on the basis of said first signals; and a filter, of a high-pass type, connected between said differential sense amplifier and said actuation and control stage and having a bandpass including said resonance frequency; and an inertial sensor mechanically coupled to said first mass so as to be fixedly drawn along by said first mass along said first axis and having an axis of detection perpendicular to said first axis. - View Dependent Claims (13, 14, 15)
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16. An integrated micro-electro-mechanical system, comprising:
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a microstructure including a first mass constrained to oscillate along a first axis and a second mass constrained to oscillate along the first axis and a second axis, the second mass coupled to the first mass; an analog driving device coupled to the first mass in a feedback loop for maintaining the first mass in oscillation at a resonance frequency and including; a differential sense amplifier electrically coupled to the first mass, the differential sense amplifier adapted to receive first signals indicative of a velocity of the first mass and generate second signals indicative of the velocity of the first mass; and a high-pass filter coupled to the differential sense amplifier and configured to filter the second signals, the high-pass filter having a bandpass that includes the resonance frequency; and an analog reading device coupled to the second mass for detecting motion of the second mass along the second axis. - View Dependent Claims (17, 18, 19, 20)
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21. A method for driving a resonant micro-electro-mechanical system, comprising the steps of:
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receiving reading currents indicative of an oscillation velocity of a driving mass constrained to move along a first axis, the driving mass being coupled to a sensing mass and the sensing mass being configured to move along the first axis and a second axis; convening the reading currents to reading voltages indicative of the oscillation velocity of the driving mass; filtering the reading voltages to eliminate offset voltages; generating a control voltage based upon the filtered reading voltages and a reference voltage; and amplifying the filtered reading voltages via a variable gain amplifier to generate driving signals; and applying the driving signals to the driving mass to maintain the driving mass in oscillation along the first axis at a resonance frequency. - View Dependent Claims (22)
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23. A system, comprising:
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a microstructure having a mass which is free to oscillate in accordance with a degree of freedom; and a driving means for maintaining the mass in oscillation at a resonance frequency, coupled to the mass and including; means for supplying a velocity signal indicative of a velocity of oscillation of the mass; means for supplying a driving signal for driving the mass; and means for filtering the velocity signal coupled between the means for supplying the velocity signal and the means for supplying the driving signal. - View Dependent Claims (24, 25)
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Specification