Scanning electron microscope
First Claim
Patent Images
1. A scanning electron microscope comprising:
- a moving stage for moving a sample with said sample being held thereon;
means for moving said moving stage to a location indicated by a coordinate value on a corrected coordinate system, said coordinate value being transformed from a coordinate value on a sample coordinate system about one or more foreign matters on said sample obtained by another device through the effect of a coordinates transforming expression generated in accordance with errors between a coordinate value of said foreign matters in said sample coordinate system and a coordinate value indicating actual position of said foreign matters, for observing said foreign matters; and
means for selecting said foreign matters on said sample substantially spirally in the farther direction from the center of said sample with said foreign matter located closer to the center of said sample as a start point.
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Abstract
This SEM has a capability of preventing shift of a view field of the foreign matters at a stage where no sufficient correction is carried out when obtaining the SEM coordinate values used for transforming the coordinate values of the foreign matters on the sample sent from another device into the SEM coordinate values. The SEM selects the foreign matters closer to the center of the sample at first and then the foreign matters spirally from the center of the sample to the outer periphery.
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Citations
8 Claims
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1. A scanning electron microscope comprising:
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a moving stage for moving a sample with said sample being held thereon; means for moving said moving stage to a location indicated by a coordinate value on a corrected coordinate system, said coordinate value being transformed from a coordinate value on a sample coordinate system about one or more foreign matters on said sample obtained by another device through the effect of a coordinates transforming expression generated in accordance with errors between a coordinate value of said foreign matters in said sample coordinate system and a coordinate value indicating actual position of said foreign matters, for observing said foreign matters; and means for selecting said foreign matters on said sample substantially spirally in the farther direction from the center of said sample with said foreign matter located closer to the center of said sample as a start point. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A scanning electron microscope comprising:
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a moving stage for moving a sample with said sample being held thereon; means for moving said moving stage to a location indicated by a coordinate value on a corrected coordinate system, said coordinate value being transformed from a coordinate value on a sample coordinate system about one or more foreign matters on said sample obtained by another device through the effect of a coordinates transforming expression, for observing said foreign matters; and means for selecting said foreign matters on said sample substantially spirally in the farther direction from the center of said sample with said foreign matter located closer to the center of said sample as a start point; wherein said means for selecting foreign matters has a function of automatically setting said condition of enabling said means for selecting and/or parameters for prescribing said enabling condition based on any one or more of a history of said enabling condition, information about said foreign matters, information about said sample, and information about said another device.
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Specification