Electron emitter and method of producing the same

• US 7,307,383 B2
• Filed: 09/28/2004
• Issued: 12/11/2007
• Est. Priority Date: 10/03/2003
• Status: Expired due to Fees

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Takeuchi, Yukihisa, Nanataki, Tsutomu, Ohwada, Iwao
• Primary Examiner(s): Chen, Shih-Chao
• Assistant Examiner(s): A, MINH D
• Application Number:
  US10/952,524
• Publication Number:
  US 20050073261A1
• Time in Patent Office: 1,169 Days
• Field of Search: 315/169.1, 315/169.2, 315/169.3, 315/169.4, 313/495, 313/497, 313/631, 313/633, 313/491, 313/493, 313/619, 313/621
• US Class Current: 315/169.1
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: H01J 1/312 having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type H01J1/304- H01J1/308 take precedence
• CPC Class Codes: H01J 1/32 Secondary-electron-emitting electrodes H01J1/35 takes precedence
• CPC Class Codes: H01J 9/022 of cold cathodes

Abstract

An electron emitter includes an emitter section having a plate shape, a cathode electrode formed on a front surface of the emitter section, and an anode electrode formed on a back surface of the emitter section. A gap is formed between an outer peripheral portion of the cathode electrode and the front surface of the emitter section. The front surface of the emitter section contacts a lower surface of the outer peripheral portion to form a base end as a triple junction. The gap expands from the base end toward a tip end of the outer peripheral portion.

Claims

1. An electron emitter comprising:

a substance comprising a dielectric material serving as an emitter;

a first electrode formed in contact with a first surface of said substance serving as the emitter; and

a second electrode formed in contact with a second surface of said substance serving as the emitter,

wherein a gap is formed at least between an outer peripheral portion of said first electrode and said first surface of said substance serving as the emitter;

a base end is formed by contact between said first surface of said substance serving as the emitter and a lower surface of said outer peripheral portion facing said first surface; and

when a drive voltage for inducing polarization reversal of said substance serving as the emitter is applied between said first electrode and said second electrode, electric field concentration occurs at a tip end of said outer peripheral portion and said base end for emitting electrons.

2. An electron emitter according to claim 1, wherein said tip end of said outer peripheral portion has an acute shape.

3. An electron emitter according to claim 1,

wherein an angle defined by contact between said first surface of said substance serving as the emitter and said lower surface of said outer peripheral portion is not greater than 90°

.

4. An electron emitter according to claim 1, wherein at least said first electrode comprises cermet.

5. An electron emitter according to claim 4, wherein said cermet includes gold, platinum, or silver, and a piezoelectro/electrostrictive material.

6. An electron emitter according to claim 5, said piezoelectro/electrostrictive material has a proportion ranging from 10 to 40 volume %.

7. An electron emitter according to claim 1, wherein at least said first electrode comprises metal oxide for reducing fatigue due to polarization reversal of said substance serving as the emitter which occurs when the drive voltage is applied between said first electrode and said second electrode.

8. An electron emitter according to claim 7, wherein said metal oxide of said first electrode comprises RuO₂, IrO₂, SrRuO₃, or La_1-xSr_xCoO₃.

9. An electron emitter according to claim 1, wherein said substance serving as the emitter comprises a dielectric material having a high melting point.

10. An electron emitter according to claim 9, wherein said dielectric material is a material which does not include Pb.

11. An electron emitter according to claim 10, wherein said material which does not include Pb is BaTiO₃ or Ba_1-xSr_xTiO₃.

12. An electron emitter according to claim 1, wherein said substance serving as the emitter comprises a material for reducing fatigue due to polarization reversal of said substance serving as the emitter which occurs when the drive voltage is applied between said first electrode and said second electrode.

13. An electron emitter according to claim 12, wherein said material for reducing fatigue due to polarization reversal comprises strontium tantalate bismuthate.

14. An electron emitter according to claim 1, wherein a plurality of said second electrodes are formed on an upper surface of a substrate;

a plurality of said substances serving as the emitters are formed on said upper surface of said substrate to cover said second electrodes;

a plurality of said first electrodes are formed on upper surfaces of said substances serving as the emitters at positions corresponding to said second electrodes, respectively; and

slits are formed between said substances serving as the emitters such that said upper surface of said substrate is exposed.

15. An electron emitter according to claim 1, wherein a plurality of dielectric substances are formed on an upper surface of a substrate;

a plurality of said second electrodes are formed on upper surfaces of said dielectric substances, respectively;

a plurality of said substances serving as the emitters are formed on upper surfaces of said second electrodes and upper surfaces of said dielectric substances;

a plurality of said first electrodes are formed on upper surfaces of said substances serving as the emitters at positions corresponding to said second electrodes, respectively;

wiring patterns are formed on said upper surface of said substrate; and

portions of said second electrodes are connected to said wiring patterns.

16. An electron emitter according to claim 1, wherein a third electrode is disposed above said substance serving as the emitter at a position facing at least said first electrodes, and a phosphor is formed on a surface of said third electrode.

17. An electron emitter comprising:

a substance comprising a dielectric material serving as an emitter;

a first electrode formed in contact with a first surface of said substance serving as the emitter; and

a second electrode formed in contact with a second surface of said substance serving as the emitter,

wherein when said first electrode is projected on said first surface, said second electrode is projected on said second surface, and a projection image of said first electrode and a projection image of said second electrode are compared with each other, the projection image of said second electrode protrudes from the projection image of said wherein an outer peripheral portion of the projection image of said second electrode protrudes from a tip end of an outer peripheral portion of the projection image of said first electrode by 1 to 500μ

at most.

18. An electron emitter according to claim 17, wherein at least said first electrode comprises cermet.

19. An electron emitter according to claim 18, wherein said cermet includes gold, platinum, or silver, and a piezoelectro/electrostrictive material.

20. An electron emitter according to claim 19, said piezoelectro/electrostrictive material has a proportion ranging from 10 to 40 volume %.

21. An electron emitter according to claim 17, wherein at least said first electrode comprises metal oxide for reducing fatigue due to polarization reversal of said substance serving as the emitter which occurs when the drive voltage is applied between said first electrode and said second electrode.

22. An electron emitter according to claim 21, wherein said metal oxide of said first electrode comprises RuO₂, IrO₂, SrRuO₃, or La_1-xSr_xCoO₃.

23. An electron emitter according to claim 17, wherein said substance serving as the emitter comprises a dielectric material having a high melting point.

24. An electron emitter according to claim 23, wherein said dielectric material is a material which does not include Pb.

25. An electron emitter according to claim 24, wherein said material which does not include Pb is BaTiO₃or Ba_1-xSr_xTiO₃.

26. An electron emitter according to claim 17, wherein said substance serving as the emitter comprises a material for reducing fatigue due to polarization reversal of said substance serving as the emitter which occurs when the drive voltage is applied between said first electrode and said second electrode.

27. An electron emitter according to claim 26, wherein said material for reducing fatigue due to polarization reversal comprises strontium tantalate bismuthate.

28. An electron emitter according to claim 17, wherein a plurality of said second electrodes are formed on an upper surface of a substrate;

a plurality of said substances serving as the emitters are formed on said upper surface of said substrate to cover said second electrodes;

a plurality of said first electrodes are formed on said upper surfaces of said substances serving as the emitters at positions corresponding to said second electrodes, respectively; and

slits are formed between substances serving as the emitters such that said upper surface of said substrate is exposed.

29. An electron emitter according to claim 17, wherein a plurality of dielectric substances are formed on an upper surface of a substrate;

a plurality of said second electrodes are formed on upper surfaces of said dielectric substances, respectively;

a plurality of said substances serving as the emitters are formed on upper surfaces of said second electrodes and upper surfaces of said dielectric substances;

a plurality of said first electrodes are formed on upper surfaces of said substances serving as the emitters at positions corresponding to said second electrodes, respectively;

wiring patterns are formed on said upper surface of said substrate; and

portions of said second electrodes are connected to said wiring patterns.

30. An electron emitter according to claim 17, wherein a third electrode is formed above said substances serving as emitters at a position facing at least said first electrodes, and a phosphor is formed on a surface of said third electrode.