Eccentricity measuring method and eccentricity measuring apparatus

• US 7,307,708 B2
• Filed: 11/09/2004
• Issued: 12/11/2007
• Est. Priority Date: 11/28/2003
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Murata, Yasunori
• Primary Examiner(s): Toatley, Jr., Gregory J.
• Assistant Examiner(s): Richey, Scott M
• Application Number:
  US10/983,605
• Publication Number:
  US 20050128468A1
• Time in Patent Office: 1,127 Days
• Field of Search: 356/124, 356/127, 356/140, 356/142, 356/139.02, 356/139.04, 356/125
• US Class Current: 356/127
• CPC Class Codes: G01M 11/0221 by determining the optical axis or position of lenses
• CPC Class Codes: G01M 11/0257 by analyzing the image formed by the object to be tested

Abstract

A surface to be tested and an optical system for projecting an index to an apparent spherical center position of the surface to be tested are moved relative to each other and an eccentric quantity of the surface to be tested is calculated from an movement quantity. A focal distance of an optical system is changed according to an apparent radius of curvature of each surface to be tested, which is calculated in advance. A reflection image on a surface to be tested, which is to be measured, is determined from the apparent radius of curvature of each surface to be tested, which is calculated in advance. Thus, an eccentric quantity of the entire lens system is accurately measured.

Claims

1. An eccentricity measuring method, comprising:

a first moving step of moving a surface to be tested relative to an optical system along a measurement reference axis;

projecting an index to an apparent spherical center position of at least the surface to be tested through the optical system;

a second moving step of moving the surface to be tested relative to the optical system in a direction perpendicular to the measurement reference axis based on a position of a reflection image which is obtained by reflecting an image of the index by the surface to be tested;

using a sensor to detect a value of a relative movement quantity between the surface to be tested and the optical system in the direction perpendicular to the measurement reference axis; and

calculating an eccentric quantity of the surface to be tested as a function of the value of the relative movement quantity between the surface to be tested and the optical system in the direction perpendicular to the measurement reference axis.

2. An eccentricity measuring method according to claim 1, wherein the first moving step, the projecting step, the second moving step, and the calculating step are executed on each of a plurality of surfaces to be tested to calculate an eccentric quantity of each of the surfaces to be tested.

3. An eccentricity measuring method according to claim 1, wherein a focal distance of the optical system is changed based on an apparent radius of curvature of the surface to be tested when the index is projected to the apparent spherical center position of the surface to be tested through the optical system.

4. An eccentricity measuring method according to claim 1, wherein a focal distance of the optical system is changed based on an apparent radius of curvature of the surface to be tested when the index is projected to the apparent spherical center position of the surface to be tested through the optical system.

5. An eccentricity measuring method according to claim 2, wherein it is determined, based on an apparent radius of curvature of each of the surfaces to be tested, which reflection image, among a plurality of reflection images of the surfaces to be tested, corresponds to a reflection image of the surface to be tested.