Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
First Claim
Patent Images
1. A method for making a spatial light modulator, comprising:
- forming a plurality of deflectable reflective elements on a first or second substrate;
bonding the first and second substrates together to form a substrate assembly;
bonding the substrate assembly onto a package substrate that does not fully encapsulate the substrate assembly to form an exposed and packaaged substrate assembly; and
wire bonding the substrate assembly to the package substrate.
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Abstract
A projection system, a spatial light modulator, and a method for forming a MEMS device is disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micromirror array. The two substrates can be bonded at the wafer level after depositing a getter material andlor solid or liquid lubricant on one or both of the wafers. The wafers can be bonded together hermetically if desired, and the pressure between the two substrates can be below atmosphere.
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Citations
161 Claims
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1. A method for making a spatial light modulator, comprising:
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forming a plurality of deflectable reflective elements on a first or second substrate; bonding the first and second substrates together to form a substrate assembly; bonding the substrate assembly onto a package substrate that does not fully encapsulate the substrate assembly to form an exposed and packaaged substrate assembly; and wire bonding the substrate assembly to the package substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 83, 84)
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56. A method for forming a micromirror array, comprising:
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providing a first substrate; providing a second substrate; forming a plurality of micromirror elements on the first or second substrate; bonding the first and second substrates together at subatmospheric pressure to form a substrate assembly; and singulating the substrate assembly into individual dies, each die comprised of bonded first and second substrate portions with micromirror elements therebetween in a subatmospheric environment. - View Dependent Claims (57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82, 85, 86, 87, 88, 89, 90, 91, 92, 93, 94, 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105)
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106. A spatial light modulator, comprising:
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a first substrate comprising an array of micromirrors; a second substrate comprising circuitry and electrodes for electrostatically actuating the micromirrors; wherein the first and second substrates are bonded together hermetically as a substrate assembly so that the micromirrors are hermetically sealed from surrounding air. - View Dependent Claims (107, 108, 109, 110, 111)
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112. A spatial light modulator, comprising:
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a first substrate comprising an array of micromirrors; a second substrate comprising circuitry and electrodes for electrostatically actuating the micromirror; wherein the first and second substrates are bonded together with an adhesive as a substrate assembly; and wherein the first and second substrates are hermetically bonded together and a gas different from air is within the hermetic environment between the first and second substrates. - View Dependent Claims (113, 114, 115, 116, 117, 118, 119, 120)
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121. A spatial light modulator, comprising:
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a first substrate comprising an array of micromirrors; a second substrate comprising circuitry and electrodes for electrostatically actuating the micromirrors; wherein the first and second substrates are bonded together as a substrate assembly that has the micromirrors therebetween and a gas therebetween at a pressure less than 1 atmosphere. - View Dependent Claims (122, 123, 124, 125, 126, 127, 128, 129, 130, 131, 132, 133)
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134. A spatial light modulator, comprising:
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a first substrate comprising an array of micromirrors; a second substrate comprising circuitry and electrodes for electrostatically actuating the micromirrors; wherein the first and second substrates are bonded together as a substrate assembly that has the micromirrors therebetween and a solid or liquid lubricant and/or getter disposed between the first and second substrates proximate to the micromirrors. - View Dependent Claims (135, 136, 137, 138, 139, 140, 141, 142, 143, 144, 145, 146)
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147. A spatial light modulator, comprising:
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a first semiconductor substrate comprising an array of micromirrors and circuitry and electrodes for electrostatically actuating the micromirrors; a second substrate that is light transmissive; the first and second substrates being bonded together. - View Dependent Claims (148, 149, 150, 151, 152, 153, 154, 155, 156, 157, 158, 159)
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160. A method for making a spatial light modulator, comprising:
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forming circuitry, electrodes and micromirrors on a semiconductor substrate; bonding a light transmissive substrate to the semiconductor substrate to form a substrate assembly; bonding the substrate assembly onto a package substrate that does not fully encapsulate the substrate assembly to form an exposed and packaged substrate assembly; wire bonding the substrate assembly to the package substrate; and disposing the exposed and packaged substrate assembly into a projection system.
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161. A method for making a plurality of spatial light modulators, comprising:
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forming circuitry, electrodes and micromirrors on a semiconductor substrate; bonding a light transmissive substrate to the semiconductor substrate to form a substrate assembly; singulating the substrate assembly into individual substrate assembly portions each comprising a spatial light modulator; and packaging the individual substrate assembly portions.
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Specification