Micromachined electrode array
First Claim
1. A micromachined electrode array, comprising:
- (a) a monocrystalline silicon body;
(b) a plurality of electrodes formed, at least in part, from the monocrystalline silicon body, with each electrode extending outward substantially perpendicular to a plane of the monocrystalline silicon body;
(c) an electrically-insulating layer disposed over the monocrystalline silicon body to attach each electrode thereto; and
(d) addressing circuitry located above the electrically-insulating layer and connected to the plurality of electrodes through an electrically-conducting via formed through the electrically-insulating layer at the location of each electrode.
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Accused Products
Abstract
An electrode array is disclosed which has applications for neural stimulation and sensing. The electrode array, in certain embodiments, can include a plurality of electrodes each of which is flexibly attached to a common substrate using a plurality of springs to allow the electrodes to move independently. In other embodiments of the electrode array, the electrodes can be fixed to the substrate. The electrode array can be formed from a combination of bulk and surface micromachining, and can include electrode tips having an electroplated metal (e.g. platinum, iridium, gold or titanium) or a metal oxide (e.g. iridium oxide) for biocompatibility. The electrode array can be used to form a part of a neural prosthesis, and is particularly well adapted for use in an implantable retinal prosthesis.
55 Citations
32 Claims
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1. A micromachined electrode array, comprising:
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(a) a monocrystalline silicon body; (b) a plurality of electrodes formed, at least in part, from the monocrystalline silicon body, with each electrode extending outward substantially perpendicular to a plane of the monocrystalline silicon body; (c) an electrically-insulating layer disposed over the monocrystalline silicon body to attach each electrode thereto; and (d) addressing circuitry located above the electrically-insulating layer and connected to the plurality of electrodes through an electrically-conducting via formed through the electrically-insulating layer at the location of each electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An electrode array for neural stimulation, comprising:
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(a) a silicon-on-insulator substrate; and (b) a plurality of electrodes arranged in an array and protruding outward substantially normal to a major surface of the silicon-on-insulator substrate and connected thereto, with the electrodes being formed, at least in part, from the silicon-on-insulator substrate, and with each electrode comprising a monocrystalline silicon layer portion, a monocrystalline silicon body portion, and an intervening electrically-insulating layer of silicon dioxide, and with each electrode further comprising an electrically-conducting via formed through the intervening electrically-insulating layer of silicon dioxide to electrically connect the monocrystalline silicon layer portion to the monocrystalline silicon body portion. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A micromachined electrode array, comprising:
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(a) a silicon-on-insulator substrate further comprising a monocrystalline silicon body and a monocrystalline silicon layer supported above the monocrystalline silicon body and separated therefrom by an intervening electrically-insulating layer of silicon dioxide; and (b) a plurality of electrodes spaced apart from each other and formed, at least in part, from the silicon-on-insulator substrate, with the plurality of electrodes protruding outward substantially normal to a major surface of the silicon-on-insulator substrate, and with each electrode being electrically isolated from adjacent electrodes while being mechanically and electrically connected to the silicon-on-insulator substrate, and with each electrode having an electrically-conducting via through the electrically-insulating layer of silicon dioxide to connect a monocrystalline silicon layer portion of that electrode to a monocrystalline silicon body portion thereof. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification