Integrated gyroscope and temperature sensor
First Claim
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1. A device for determining an angular rotation and/or angular rotation rate of a body, said device comprising:
- a substrate;
a gyroscope formed above said substrate; and
a temperature sensor formed above said substrate for sensing the temperature of said gyroscope; and
wherein said temperature sensor has a plurality of resistors that are formed above a substrate surface of said substrate.
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Abstract
A gyroscope and temperature sensor are formed on a single chip using SOI-MEMS technology. The temperature sensor has an array of resistors to accurately detect the temperature of the gyroscope in temperatures and conditions that can range from extreme heat to extreme cold. The positioning of the gyroscope and temperature sensor on the same chip allow for extremely accurate real-time feedback of the gyroscope'"'"'s temperature for utilization by a control system.
10 Citations
17 Claims
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1. A device for determining an angular rotation and/or angular rotation rate of a body, said device comprising:
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a substrate; a gyroscope formed above said substrate; and a temperature sensor formed above said substrate for sensing the temperature of said gyroscope; and wherein said temperature sensor has a plurality of resistors that are formed above a substrate surface of said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A device for measuring motion of an object, comprising:
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a substrate; means for detecting motion of the object, said means for detecting motion being formed above said substrate; a temperature sensor electrically connected to said means for detecting motion, said temperature sensor being formed above said substrate such that a gap exists between said temperature sensor and said substrate; and said temperature sensor comprises at least one resistor having two beams that are electrically connected to an anchor at one end and which form a folded region at another end, said folded region being supported by a non-conductive support. - View Dependent Claims (14, 15, 16, 17)
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Specification