×

Anisotropic conductive connector, conductive paste composition, probe member, wafer inspection device and wafer inspection method

  • US 7,311,531 B2
  • Filed: 03/23/2004
  • Issued: 12/25/2007
  • Est. Priority Date: 03/26/2003
  • Status: Expired due to Term
First Claim
Patent Images

1. An anisotropically conductive connector comprisingan elastic anisotropically conductive film, in which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film have been formed,wherein the conductive particles contained in the conductive parts for connection are obtained by laminating an intermediate coating layer and a surface coating layer each formed of a high-conductive metal on a surface of core particle exhibiting magnetism, and the outermost coating layer is a coating layer having a high hardness and the intermediate coating layer is a coating layer having a lower hardness than the outermost coating layer.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×