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Multiple local probe measuring device and method

  • US 7,312,619 B2
  • Filed: 07/17/2006
  • Issued: 12/25/2007
  • Est. Priority Date: 09/20/1999
  • Status: Expired due to Fees
First Claim
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1. A local probe measuring device for effecting local measurements referring to a sample, comprising:

  • a first local probe for local measurements with respect to a sample or a reference surface,a second local probe for local measurements with respect to the sample or the reference surface,a rigid mechanical coupling between the first local probe and the second local probe,a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjusta first measurement condition of the first local probe with respect to the sample or the reference surface anda second measurement condition of the second local probe with respect to the sample or the reference surface,a detection arrangement comprisinga first detection arrangement associated with the first local probe adapted to independently detect first measurement data referring to local measurements effected by said first local probe anda second detection arrangement associated with the second local probe adapted to independently detect second measurement data referring to local measurements effected by said second local probe,wherein at least one of said local probes has associated an interaction field generator generating an interaction field to bring about or to influence an local interaction of the respective local probe with the sample or the reference surface.

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