Micro-switching element fabrication method and micro-switching element

• US 7,312,677 B2
• Filed: 06/29/2004
• Issued: 12/25/2007
• Est. Priority Date: 02/27/2004
• Status: Active Grant

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Nakatani, Tadashi, Miyashita, Tsutomu
• Primary Examiner(s): Donovan, Lincoln
• Assistant Examiner(s): Rojas, Bernard
• Application Number:
  US10/878,330
• Publication Number:
  US 20050190023A1
• Time in Patent Office: 1,274 Days
• Field of Search: 335/78, 200/181
• US Class Current: 335/78
• CPC Class Codes: B81B 2201/016 having a bridge fixed on two ends and connected to one or more dimples
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81C 1/00142 Bridges deformable micromirrors G02B26/0841
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

A method is provided for making a micro-switching element. The switching element includes a substrate, two supporting members fixed to the substrate, and a movable beam bridging between the supporting members. The beam includes a membrane, a movable contact electrode and a movable driving electrode, both disposed on the membrane. The switching element also includes a pair of stationary contact electrodes facing the movable contact electrode, and a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force. The method includes the steps of making a sacrifice layer on the substrate, making the membrane on the sacrifice layer, and subjecting the sacrifice layer to etching with the membrane intervening, so that the supporting members are formed as remaining portions of the sacrifice layer between the substrate and the membrane.

Claims

1. A micro-switching element comprising:

a substrate;

a pair of supporting members spaced from each other and fixed to the substrate;

a movable beam that includes a membrane bridging between the supporting members, a movable contact electrode formed on one surface of the membrane directed away from the substrate and a movable driving electrode formed on said one surface of the membrane, the membrane including a pair of enlarged end portions corresponding in position to the pair of supporting members;

a pair of stationary contact electrodes arranged to face the movable contact electrode;

a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force,

wherein the supporting members are smaller than the enlarged end portions, respectively, of the membrane both with respect to width and length; and

wherein the membrane is formed with an opening in facing relationship to the stationary contact electrodes, the movable contact electrode extending through and beyond the opening of the membrane to project toward the stationary contact electrodes.

2. A micro-switching element comprising:

a substrate;

a pair of supporting members spaced from each other and fixed to the substrate;

a movable beam that includes a membrane bridging between the supporting members, a movable contact electrode on the membrane and a movable driving electrode on the membrane, the membrane including a pair of enlarged end portions corresponding in position to the pair of supporting members;

a pair of stationary contact electrodes arranged to face the movable contact electrode; and

a stationary driving electrode cooperating with the movable driving electrode for generation of electrostatic force,

wherein the supporting members are entirely concealed behind the enlarged end portions of the membrane; and

wherein the membrane includes a main portion extending between the pair of enlarged end portions, the main portion of the membrane being formed with a plurality of openings, the movable contact electrode bing formed with a plurality of openings that communicate with selected ones of the openings of the membrane, the movable driving electrode being also formed with a plurality of openings that communicate with other ones of the openings of the membrane.

3. The micro-switching element according to claim 2, wherein the supporting members are made of silicon, the membrane being made of silicon dioxide or silicon nitride.

4. The micro-switching element according to claim 2, wherein the supporting members are made of silicon dioxide, the membrane being made of silicon.

5. The micro-switching element according to claim 2, wherein the membrane has a thickness no smaller than 1.5 μ

m.

6. The micro-switching element according to claim 2, wherein the movable contact electrode and the movable driving electrode are formed on a surface of the membrane facing away from the substrate, the movable contact electrode including downward projections penetrating through the membrane for contact with the stationary contact electrodes.