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Rotational rate sensor

  • US 7,313,958 B2
  • Filed: 09/25/2002
  • Issued: 01/01/2008
  • Est. Priority Date: 01/12/2002
  • Status: Expired due to Fees
First Claim
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1. A rotational rate sensor, comprising:

  • a substrate;

    a plurality of sensor elements including a Coriolis element situated over a surface of the substrate, wherein;

    the Coriolis element is capable of being induced to vibrate in parallel to a first axis,an excursion of the Coriolis element is detectable and is based on a Coriolis force in a second axis that is essentially perpendicular to the first axis,the first axis and the second axis are parallel to a surface of the substrate, andthe plurality of sensor elements are at least partially movable with respect to the substrate and the plurality of sensor elements include a driving mass which performs movement solely in relation to the first axis; and

    a force conveying arrangement for conveying a static force effect between the substrate and at least one of the sensor elements, wherein the static force effect corresponds to a torque with respect to a third axis that is essentially perpendicular to the surface of the substrate.

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