Liquid crystal display device and method of fabricating the same
First Claim
1. A method of fabricating a liquid crystal display device, comprising the steps of:
- forming a gate electrode, a gate bus line, and a gate pad on a substrate using a first mask process;
forming a gate insulating layer and an active layer on an entire surface of the substrate;
forming a first organic material film on an entire surface of the substrate;
moving a portion of the first organic material film to expose a first portion of the gate pad;
depositing a transparent film on an entire surface of the substrate;
patterning the transparent film using a second half-tone mask to form a data bus line, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer;
exposing portions of the data pad and data bus line using a third mask;
forming a second organic material film on an entire surface of the substrate;
depositing a low resistance material on the data bus line;
coating a passivation film on the substrate;
removing the second organic material film using a lift-off process to expose a second portion of the gate pad and a first portions of the data pad.
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Accused Products
Abstract
A method of fabricating a liquid crystal display device includes forming a gate electrode, a gate bus line, and a gate pad on a substrate using a first mask process, forming a gate insulating layer and an active layer on an entire surface of the substrate, forming a first organic material film on an entire surface of the substrate, removing a portion of the first organic material film to expose a first portion of the gate pad, depositing a transparent film on an entire surface of the substrate, patterning the transparent film using a second half-tone mask to form a data bus line, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer, exposing portions of the data pad and data bus line using a third mask, forming a second organic material film on an entire surface of the substrate, depositing a low resistance material on the data bus line, coating a passivation film on the substrate, removing the second organic material film using a lift-off process to expose a second portion of the gate pad and a first portions of the data pad.
21 Citations
13 Claims
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1. A method of fabricating a liquid crystal display device, comprising the steps of:
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forming a gate electrode, a gate bus line, and a gate pad on a substrate using a first mask process; forming a gate insulating layer and an active layer on an entire surface of the substrate; forming a first organic material film on an entire surface of the substrate; moving a portion of the first organic material film to expose a first portion of the gate pad; depositing a transparent film on an entire surface of the substrate; patterning the transparent film using a second half-tone mask to form a data bus line, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer; exposing portions of the data pad and data bus line using a third mask; forming a second organic material film on an entire surface of the substrate; depositing a low resistance material on the data bus line; coating a passivation film on the substrate; removing the second organic material film using a lift-off process to expose a second portion of the gate pad and a first portions of the data pad. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of fabricating a liquid crystal display device, comprising the steps of:
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forming a gate electrode, a gate bus line, and a gate pad on a substrate; forming a gate insulating layer, an active layer, and a transparent conductive film on an entire surface of the substrate; patterning the active layer and the transparent conductive film to concurrently form a data bus line, a data pad, a source electrode, a drain electrode, a pixel electrode, a channel layer, and an ohmic contact layer; forming an organic material film on the gate and data pads; forming a passivation layer on an entire surface of the substrate including the organic material film; and exposing portions of the gate and data pads, wherein the data bus line, and the source, drain, and pixel electrodes include the transparent conductive film. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification