Optical device

• US 7,315,672 B2
• Filed: 11/22/2004
• Issued: 01/01/2008
• Est. Priority Date: 11/28/2003
• Status: Active Grant

• Current Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Original Assignee: Sumitomo Electric Industries Limited (Sumitomo Corporation)
• Inventors: Katayama, Makoto, Kanie, Tomohiko
• Primary Examiner(s): KIANNI, KAVEH C
• Application Number:
  US10/993,172
• Publication Number:
  US 20050123234A1
• Time in Patent Office: 1,135 Days
• Field of Search: 385/18, 385/14, 385/31
• US Class Current: 385/18
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/266 the optical element being an attenuator
• CPC Class Codes: G02B 6/3514 the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
• CPC Class Codes: G02B 6/3532 the optical element being a wavelength independent filter or having spatially dependent transmission properties, e.g. neutral filter or neutral density wedge substrate with plurality of density filters
• CPC Class Codes: G02B 6/3548 1xN switch, i.e. one input and a selectable single output of N possible outputs
• CPC Class Codes: G02B 6/3566 involving bending a beam, e.g. with cantilever
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3588 of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate

Abstract

An optical variable attenuator 1 has a planar waveguide 2 and an actuator structure 3. The planar waveguide 2 is provided with an input optical waveguide core 4A for input of an optical signal, an output optical waveguide core 4B for outputting an optical signal from the optical waveguide core 4A, and an a movable mirror optical waveguide core 4C for guiding light that does not enter the optical waveguide core 4B, out of the optical signal from the optical waveguide core 4A. The actuator structure 3 has a movable mirror 7 for reflecting the optical signal emerging from the input optical waveguide core 4A, toward the output optical waveguide core 4B. A light receiving device 10 for receiving light passing the optical waveguide core 4C is provided at one end face of the planar waveguide 2.

Claims

1. An optical device comprising:

a planar optical waveguide including;

an input optical waveguide for input of an optical signal;

an output optical waveguide for outputting an optical signal from the input optical waveguide; and

an auxiliary optical waveguide for guiding light that does not enter the output optical waveguide, out of the optical signal from the input optical waveguide;

a movable mirror for reflecting the optical signal from the input optical waveguide toward the output optical waveguide or toward the auxiliary optical waveguide;

driving means for driving the movable mirror; and

light monitoring means for monitoring light passing at least one of the input optical waveguide, the output optical waveguide, and the auxiliary optical waveguide, wherein the light monitoring means is provided on an end face of the planar optical waveguide.

2. The optical device according to claim 1, wherein the light monitoring means comprises a light receiving device for receiving light passing the auxiliary optical waveguide, which is provided on the exit end side of the auxiliary optical waveguide.

3. The optical device according to claim 1, wherein the light monitoring means comprises light branching means for extracting part of light passing at least one of the input optical waveguide and the output optical waveguide;

and a light receiving device for receiving the light extracted by the light branching means.

4. The optical device according to claim 3, wherein the light branching means is a branching optical waveguide forming a directional coupler, and

wherein the light receiving device is provided on the exit end side of the branching optical waveguide.

5. The optical device according to claim 3, wherein the light branching means is a branching filter, and

wherein the light receiving device is provided at a position where light extracted by the branching filter is to be received.

6. The optical device according to claim 3, wherein the light branching means is a branching mirror, and

wherein the light receiving device is provided at a position where light extracted by the branching mirror is to be received.

7. The optical device according to claim 1, wherein the movable mirror has a knife edge shape.

8. The optical device according to claim 1, wherein the driving means comprises a movable electrode supporting the movable mirror, a stationary electrode provided so as to face the movable mirror, and means for generating an electrostatic force between the movable electrode and the stationary electrode.