Rotation rate sensor
First Claim
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1. A rotation rate sensor, comprising:
- a substrate;
at least one Coriolis element situated above a surface of the substrate, the at least one Coriolis element being able to be induced to vibrate in parallel to a first axis, wherein;
an excursion of the at least one Coriolis element is detectable based on a Coriolis force in a second axis that is substantially perpendicular to the first axis, andthe first axis and the second axis are parallel to the surface of the substrate; and
electrode structures for generating a dynamic force effect, wherein the dynamic force is directly generated by the electrode structures;
wherein;
the electrode structures include a first electrode substructure and a second electrode substructure,the first substructure and the second substructure are asymmetrical,for each of the first substructure and the second substructure at least one cutout of the at least one Coriolis element is provided, andthe at least one cutout has a greater extension in a first cutout region in a direction of the second axis than in a second cutout region.
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Abstract
A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.
33 Citations
8 Claims
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1. A rotation rate sensor, comprising:
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a substrate; at least one Coriolis element situated above a surface of the substrate, the at least one Coriolis element being able to be induced to vibrate in parallel to a first axis, wherein; an excursion of the at least one Coriolis element is detectable based on a Coriolis force in a second axis that is substantially perpendicular to the first axis, and the first axis and the second axis are parallel to the surface of the substrate; and electrode structures for generating a dynamic force effect, wherein the dynamic force is directly generated by the electrode structures; wherein; the electrode structures include a first electrode substructure and a second electrode substructure, the first substructure and the second substructure are asymmetrical, for each of the first substructure and the second substructure at least one cutout of the at least one Coriolis element is provided, and the at least one cutout has a greater extension in a first cutout region in a direction of the second axis than in a second cutout region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification