Returnable and reusable, bag-in-drum fluid storage and dispensing container system

• US 7,316,329 B2
• Filed: 09/13/2005
• Issued: 01/08/2008
• Est. Priority Date: 05/03/2002
• Status: Expired due to Term

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Wertenberger, Richard
• Primary Examiner(s): Jacyna; J. Casimer
• Application Number:
  US11/225,409
• Publication Number:
  US 20060006193A1
• Time in Patent Office: 847 Days
• Field of Search: 222/94, 222/105, 222/107, 222/464.1
• US Class Current: 222/105
• CPC Class Codes: B65D 77/06 Liquids or semi-liquids or other materials or articles enclosed in flexible containers disposed within rigid containers
• CPC Class Codes: B67D 7/0261 specially adapted for transferring liquids of high purity
• CPC Class Codes: Y02W 30/80 Packaging reuse or recycling, e.g. of multilayer packaging bio-packaging Y02W90/10

Abstract

A “bag-in-a-drum” container for storage and dispensing of fluids. The container is adapted to minimize volumetric space requirements in storage, transport and use of the container. The containers are usefully employed in a system of supplying liquid in containers to an end user market and refabricating containers subsequent to consumption of the liquid from the containers.

Claims

1. A container adapted for pressurized dispensation of a liquid and containing said liquid, the container comprising:

a collapsible liner comprising a flexible polymeric film material, a first rigid port affixed to the film material and defining a first aperture, and a second rigid port affixed to the film material and defining a second aperture;

a housing adapted to contain the collapsible liner, said housing defining at least a first orifice adapted to receive any of the first rigid port and the second rigid port, wherein the housing and liner define a sealable first volume therebetween, and wherein the housing is more rigid than the liner; and

a gas feed passage coupleable to a source of pressurized gas to pressurize the first volume during dispensing operations;

wherein said liquid comprises a semiconductor manufacturing liquid reagent and is contained within the liner.

2. The container of claim 1, wherein the polymeric film material is formed of a virgin polymeric film material.

3. The container of claim 2, wherein the virgin polymeric film material has a thickness in a range of from about 0.005 inch to about 0.030 inch.

4. The container of claim 1, wherein at least one of the first rigid port and the second rigid port is adapted to couple the liner with a connector having a liquid flow passage defined therein.

5. The container of claim 1, further comprising a dip tube coupled to the first port opening and extending into a second volume defined by the polymeric film material.

6. The container of claim 1, wherein the liquid has a purity of greater than 99.99% by weight.

7. The container of claim 1, wherein the semiconductor manufacturing liquid reagent comprises a material selected from the group consisting of acids, solvents, bases, photoresists, dopants, metalorganic reagents, silicon source compounds, and chemical mechanical planarization compositions.

8. The container of claim 1, wherein the liner is formed from tubular stock polymeric film material.

9. The container of claim 1, wherein said liner is free of heat seal welded seams along the sides of said liner.

10. The container of claim 1, being free of plastic additives.

11. The container of claim 1, being free of ultraviolet stabilizers, plasticizers, antioxidants, fillers, extenders, pigments and processing agents.

12. The container of claim 1, wherein the collapsible liner defines a second volume, and the container further comprises a dispense connector having a dip tube insertable through any of the first rigid port and the second rigid port into the second volume.

13. The container of claim 12, wherein the dispense connector is adapted to engage the container.

14. The container of claim 12, wherein the dispense connector defines the gas feed passage.

15. The container of claim 1, wherein the container comprises a dispense connector adapted to matably engage any of the first rigid port, the second rigid port, and a portion of the container adjacent to the first rigid port or the second rigid port, wherein the connector defines a the gas feed passage and a liquid passage adapted to permit flow of the liquid therethough during dispensing operation.

16. A semiconductor processing system comprising:

a semiconductor processing tool; and

a container adapted for pressurized dispensation of a semiconductor manufacturing liquid reagent coupled in fluid supply relationship to said semiconductor processing tool, the container comprising;

(i) a collapsible liner comprising a flexible polymeric film material, a first rigid port affixed to the film material and defining a first aperture, and a second rigid port affixed to the film material and defining a second aperture;

(ii) a housing adapted to contain the collapsible liner, said housing defining at least a first orifice adapted to receive any of the first rigid port and the second rigid port, wherein the housing and liner define a sealable first volume therebetween, and wherein the housing is more rigid than the liner; and

(iii) a gas feed passage coupleable to a source of pressurized gas to pressurize the first volume during dispensing operation;

wherein;

the collapsible liner defines a second volume; and

the container further comprises a dispense connector having a dip tube insertable through any of the first rigid port and the second rigid port into the second volume, with the dispense connector defining the gas feed passage.

17. A container adapted for pressurized dispensation of a liquid, the container comprising:

a collapsible liner comprising a flexible polymeric film material, a first rigid port affixed to the film material and defining a first aperture, and a second rigid port affixed to the film material and defining a second aperture;

a housing adapted to contain the collapsible liner, said housing defining at least a first orifice adapted to receive any of the first rigid port and the second rigid port, wherein the housing and liner define a sealable first volume therebetween, and wherein the housing is more rigid than the liner; and

a gas feed passage coupleable to a source of pressurized gas to pressurize the first volume during dispensing operation;

wherein;

the collapsible liner defines a second volume;

the container further comprises a dispense connector having a dip tube insertable through any of the first rigid port and the second rigid port into the second volume, with the dispense connector defining the gas feed passage.

18. The container of claim 17, wherein the second volume is closed except for the presence of the first rigid port and the second rigid port.

19. The container of claim 17, wherein the liner is three-dimensional.

20. The container of claim 17, wherein at least one of the first rigid port and second rigid port is adapted to lock the liner to a portion of the housing proximate to the at least one orifice.

21. The container of claim 17, further comprising any of a first cap coupled to the first rigid port and a second cap coupled to the second rigid port.

22. The container of claim 17, further comprising said liquid contained within the liner.

23. The container of claim 17, wherein the liquid comprises a semiconductor manufacturing liquid reagent.

24. The container of claim 17, wherein the polymeric film material comprises any of polyethylene, polytetrafluoroethylene, polypropylene, polyurethane, polyvinylidene chloride, polyvinylchloride, polyacetal. polystyrene, polyacrylonitrile, and polybutylene.

25. The container of claim 17, wherein the polymeric film material comprises any of virgin polyethylene and virgin polytetrafluoroethylene.

26. The container of claim 17, adapted to prevent infiltration of gas into the second volume.

27. The container of claim 17, being collapsible to ten percent of the second volume.

28. The container of claim 17, wherein each of the first rigid port and the second rigid port is disposed along a first upper end of the liner.

29. The container of claim 17, wherein the housing comprises a removable or openable lid.

30. The container of claim 17, wherein the housing comprises a polymeric material.

31. The container of claim 17, wherein the polymeric film material is formed of a virgin polymeric film material.

32. The container of claim 31, wherein the virgin polymeric film material has a thickness in a range of from about 0.005 inch to about 0.030 inch.

33. The container of claim 17, wherein the liner is formed from tubular stock polymeric film material.

34. The container of claim 33, wherein said liner is free of heat seal welded seams along the sides of said liner.