MEM switching device

• US 7,317,232 B2
• Filed: 10/20/2003
• Issued: 01/08/2008
• Est. Priority Date: 10/22/2002
• Status: Expired due to Fees

• Current Assignee: Cabot Microelectronics Corporation (Entegris Incorporated)
• Original Assignee: Cabot Microelectronics Corporation (Entegris Incorporated)
• Inventors: Busta, Heinz H.
• Primary Examiner(s): Baumeister; B. William
• Assistant Examiner(s): Fulk; Steven J.
• Application Number:
  US10/689,167
• Publication Number:
  US 20050040484A1
• Time in Patent Office: 1,541 Days
• Field of Search: 257/415, 257/77, 257/678, 257/420, 257/E29.324, 257/690, 438/52, 438/51, 438/55
• US Class Current: 257/415
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009
• CPC Class Codes: H01H 2001/0063 having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
• CPC Class Codes: H01H 2001/0084 with perpendicular movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2001/0089 Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems, e.g. of movable element to substrate

Abstract

A MEM device and method for fabricating a MEM device. A MEM device comprising a lever mechanism residing along a substrate is disclosed. A contact material is deposited on a first surface of the lever mechanism. In one arrangment, the first surface is disposed towards the substrate. A first contact region may be deposited on the substrate. The first contact region attracts the lever mechanism towards the substrate such that the contact material becomes operationally coupled to a second contact region. The MEM device may also comprise a first anchor portion and a second anchor portion. The first and second anchor portions may be integral to a top surface of the substrate. Aspects of the invention are also particularly useful in providing an encapsulated MEM switching device.

Claims

1. A micro-machined structure for enclosing at least one MEM device, said structure comprising:

a structure extending from a substrate and at least partially enclosing said at least one MEM device; and

a cover structure residing on a portion of said substrate structure,

a contact region, said contact region provided on said cover substrate structure, said

contact region acting as a pull-back contact for a MEM device residing on said substrate;

wherein said micro-machined structure defines at least one tortuous path, wherein said tortuous path provides for a removal of material residing along said substrate structure.

2. The invention of claim 1 wherein said contact region comprises a shielding member, said shielding member preventing passage of electromagnetic radiation.

3. The invention of claim 1 further comprising a sealing member, said sealing member engaging said tortuous path such that said sealing member seals said enclosure.

4. The invention of claim 3 further comprising a gaseous material provided in said sealed enclosure.

5. The invention of claim 4 wherein said gaseous material comprises an inert gas.

6. The invention of claim 4 wherein said gaseous material comprises an arc preventing gaseous material.

7. The invention of claim 3 wherein said sealing member seals said enclosure in a vacuum sealed state.

8. The invention of claim 1 wherein said tortuous path defines a labyrinth path.

9. The invention of claim 1 further comprising a second MEM device, said second MEM device enclosed by said micro-machined structure.

10. The invention of claim 1 wherein said micro-machined apparatus is an integral micro-machined structure.

11. The invention of claim 1 wherein said micro-machined structure for enclosing at least one MEM device comprises diamond.