Electro-optical device and electronic apparatus
First Claim
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1. An electro-optical device comprising, above a substrate:
- a data line extending in a first direction;
a scanning line extending in a second direction that intersects the data line;
a pixel electrode and a thin film transistor disposed so as to correspond to an intersection region of the data line and the scanning line;
a shielding layer disposed between the data line and the pixel electrode, the shielding layer being applied with a fixed electric potential, the shielding layer including a titanium nitride film, being formed following the data line, and being wider than the data line so as to cover the data line; and
a second nitride film formed on a top surface and a side surface of the data line.
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Abstract
An electro-optical device includes, above a substrate: data lines extending in a first direction; scanning lines extending in a second direction and intersecting the data lines; pixel electrodes and thin film transistors disposed so as to correspond to intersection regions of the data lines and the scanning lines; storage capacitors electrically connected to the thin film transistors and the pixel electrodes; and shielding layers disposed between the data lines and the pixel electrodes. Further, nitride films are included in the shielding layers and are formed along the data lines and are wider than the data lines.
27 Citations
9 Claims
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1. An electro-optical device comprising, above a substrate:
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a data line extending in a first direction; a scanning line extending in a second direction that intersects the data line; a pixel electrode and a thin film transistor disposed so as to correspond to an intersection region of the data line and the scanning line; a shielding layer disposed between the data line and the pixel electrode, the shielding layer being applied with a fixed electric potential, the shielding layer including a titanium nitride film, being formed following the data line, and being wider than the data line so as to cover the data line; and a second nitride film formed on a top surface and a side surface of the data line. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification