Methods for producing uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors using sequential lateral solidification

• US 7,319,056 B2
• Filed: 06/01/2005
• Issued: 01/15/2008
• Est. Priority Date: 05/28/1996
• Status: Expired due to Fees

• Current Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Original Assignee: Trustees Of Columbia University In The City Of New York (Columbia University)
• Inventors: Sposili, Robert S., Im, James S., Crowder, Mark A.
• Primary Examiner(s): Booth; Richard A.
• Application Number:
  US11/141,815
• Publication Number:
  US 20050255640A1
• Time in Patent Office: 958 Days
• Field of Search: 438151-166, 257/E21.561
• US Class Current: 438/166
• CPC Class Codes: B23K 26/0622 by shaping pulses
• CPC Class Codes: B23K 26/0626 Energy control of the laser beam B23K26/0622 takes precedence
• CPC Class Codes: B23K 26/066 by using masks
• CPC Class Codes: G03F 7/70041 by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/0268 Shape of mask
• CPC Class Codes: H01L 21/02686 Pulsed laser beam
• CPC Class Codes: H01L 21/02691 Scanning of a beam
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
• CPC Class Codes: H01L 27/1296 adapted to increase the uniformity of device parameters
• CPC Class Codes: H01L 29/04 characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes characterised by physical imperfections H01L29/30

Abstract

Methods for processing an amorphous silicon thin film sample into a polycrystalline silicon thin film are disclosed. In one preferred arrangement, a method includes the steps of generating a sequence of excimer laser pulses, controllably modulating each excimer laser pulse in the sequence to a predetermined fluence, homoginizing each modulated laser pulse in the sequence in a predetermined plane, masking portions of each homoginized fluence controlled laser pulse in the sequence with a two dimensional pattern of slits to generate a sequence of fluence controlled pulses of line patterned beamlets, each slit in the pattern of slits being sufficiently narrow to prevent inducement of significant nucleation in region of a silicon thin film sample irradiated by a beamlet corresponding to the slit, irradiating an amorphous silicon thin film sample with the sequence of fluence controlled slit patterned beamlets to effect melting of portions thereof corresponding to each fluence controlled patterned beamlet pulse in the sequence of pulses of patterned beamlets, and controllably sequentially translating a relative position of the sample with respect to each of the fluence controlled pulse of slit patterned beamlets to thereby process the amorphous silicon thin film sample into a single or polycrystalline silicon thin film.

Claims

1. A method for processing a silicon thin film into a polycrystalline silicon thin film, comprising the steps of:

(a) generating a sequence of excimer laser pulses, each having a substantially predetermined size;

(b) masking a laser pulse in the sequence with a mask having one or more slits having a predetermined width to generate one or more first laser beamlets corresponding to the laser pulse, such that each beamlet has a shape defined by a length corresponding to the predetermined laser pulse size and a width corresponding to the slit width;

(c) irradiating a silicon thin film with the one or more first laser beamlets to effect melting of a first portion of the thin film corresponding to the shape of the one or more laser beamlets;

(d) translating at least one of the thin film and the excimer laser pulses relative to each other so that one or more laser beamlets corresponding to a second laser pulse is incident on a second location of the thin film; and

(e) after step (d), irradiating a second portion of the thin film with the one or more second laser beamlets corresponding to the second pulse to effect melting of the second portion at the second film location, wherein the second portion partially overlaps the first portion,

wherein each of the irradiated portions is melted through a thickness of the thin film and a lateral growth is effectuated in each molten portion of the thin film.

2. The method according to claim 1, wherein the second portion partially overlaps less than one half of the first portion.

3. The method according to claim 1, wherein the laser beamlet width is sufficient to prevent inducement of significant nucleation in a portion of the thin film that is irradiated by the laser beamlet.

4. The method according to claim 3, wherein at least one of the thin film and the excimer laser pulses is translated relative to one another by a distance of about 3 micrometers.

5. The method according to claim 1, wherein at least one of the thin film and the excimer laser pulses is translated for a distance that is greater than the lateral growth and less than the laser beamlet width.

6. The method according to claim 1, wherein the slit extends as far across the mask as the laser pulse incident on the mask permits.