×

In-plane mechanically coupled microelectromechanical tuning fork resonators

  • US 7,319,372 B2
  • Filed: 07/15/2005
  • Issued: 01/15/2008
  • Est. Priority Date: 07/15/2005
  • Status: Active Grant
First Claim
Patent Images

1. A resonator array for providing at least one output signal, the resonator array comprising:

  • a plurality of in-plane vibration microelectromechanical tuning fork resonators, including;

    a first resonator having two or more tines, wherein each tine of the first resonator includes a distal end and a proximal end;

    a second resonator, having a distal end and a proximal end, wherein the proximal end of the second resonator is mechanically coupled to the proximal end of the first resonator, and wherein the shape of the second resonator is substantially identical to the first resonator;

    a third resonator, having a distal end and a proximal end, wherein the proximal end of the third resonator is mechanically coupled to the proximal end of the second resonator, and wherein the shape of the third resonator is substantially identical to the second resonator; and

    a fourth resonator, having a distal end and a proximal end, wherein the proximal end of the fourth resonator is mechanically coupled to the proximal end of the first resonator, and wherein the shape of the fourth resonator is substantially identical to the third resonator.

View all claims
  • 8 Assignments
Timeline View
Assignment View
    ×
    ×