In-plane mechanically coupled microelectromechanical tuning fork resonators
First Claim
1. A resonator array for providing at least one output signal, the resonator array comprising:
- a plurality of in-plane vibration microelectromechanical tuning fork resonators, including;
a first resonator having two or more tines, wherein each tine of the first resonator includes a distal end and a proximal end;
a second resonator, having a distal end and a proximal end, wherein the proximal end of the second resonator is mechanically coupled to the proximal end of the first resonator, and wherein the shape of the second resonator is substantially identical to the first resonator;
a third resonator, having a distal end and a proximal end, wherein the proximal end of the third resonator is mechanically coupled to the proximal end of the second resonator, and wherein the shape of the third resonator is substantially identical to the second resonator; and
a fourth resonator, having a distal end and a proximal end, wherein the proximal end of the fourth resonator is mechanically coupled to the proximal end of the first resonator, and wherein the shape of the fourth resonator is substantially identical to the third resonator.
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Accused Products
Abstract
There are many inventions described and illustrated herein, as well as many aspects and embodiments of those inventions. In one aspect, the present invention is directed to a resonator architecture including a plurality of in-plane vibration microelectromechanical resonators (for example, 2 or 4 resonators) that are mechanically coupled to provide, for example, a differential signal output. In one embodiment, the present invention includes four commonly shaped microelectromechanical tuning fork resonators (for example, tuning fork resonators having two or more rectangular-shaped or square-shaped tines). Each resonator is mechanically coupled to another resonator of the architecture. For example, each resonator of the architecture is mechanically coupled to another one of the resonators on one side or a corner of one of the sides. In this way, all of the resonators, when induced, vibrate at the same frequency.
28 Citations
14 Claims
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1. A resonator array for providing at least one output signal, the resonator array comprising:
a plurality of in-plane vibration microelectromechanical tuning fork resonators, including; a first resonator having two or more tines, wherein each tine of the first resonator includes a distal end and a proximal end; a second resonator, having a distal end and a proximal end, wherein the proximal end of the second resonator is mechanically coupled to the proximal end of the first resonator, and wherein the shape of the second resonator is substantially identical to the first resonator; a third resonator, having a distal end and a proximal end, wherein the proximal end of the third resonator is mechanically coupled to the proximal end of the second resonator, and wherein the shape of the third resonator is substantially identical to the second resonator; and a fourth resonator, having a distal end and a proximal end, wherein the proximal end of the fourth resonator is mechanically coupled to the proximal end of the first resonator, and wherein the shape of the fourth resonator is substantially identical to the third resonator. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A resonator array for providing at least one output signal, the resonator array comprising:
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a plurality of in-plane vibration microelectromechanical tuning fork resonators, including; a first resonator having two or more tines that are substantially rectangular in shape, wherein each tine of the first resonator includes a distal end and a proximal end a second resonator, having a distal end and a proximal end, wherein a corner of the proximal end of the second resonator is mechanically coupled to a corner of the proximal end of the first resonator, and wherein the shape of the second resonator is substantially identical to the first resonator; a third resonator, having a distal end and a proximal end, wherein a corner of the proximal end of the third resonator is mechanically coupled to a corner of the proximal end of the second resonator, and wherein the shape of the third resonator is substantially identical to the second resonator; and a fourth resonator, having a distal end and a proximal end, wherein a corner of the proximal end of the fourth resonator is mechanically coupled to a corner of the proximal end of the first resonator, and wherein the shape of the fourth resonator is substantially identical to the third resonator; and a coupling junction wherein the proximal end of each of resonator is mechanically coupled to the coupling junction via coupling supports. - View Dependent Claims (9, 10, 11)
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12. A resonator array for providing at least one output signal, the resonator array comprising:
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a plurality of in-plane vibration microelectromechanical tuning fork resonators, including; a first resonator having a plurality of tines, wherein each tine of the first resonator includes a distal end and a proximal end; and a second resonator, having a distal end and a proximal end, wherein a corner of the proximal end of the second resonator is mechanically coupled to a corner of the proximal end of the first resonator, and wherein the shape of the second resonator is substantially identical to the first resonator; a coupling junction wherein the proximal end of each of resonator is mechanically coupled to the coupling junction via coupling supports; a first anchor to fix the resonator array to a substrate; and a first stress/strain relief mechanism coupled to the first anchor and the distal end of the first resonator. - View Dependent Claims (13, 14)
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Specification