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Laminographic system for 3D imaging and inspection

  • US 7,319,737 B2
  • Filed: 04/07/2006
  • Issued: 01/15/2008
  • Est. Priority Date: 04/07/2006
  • Status: Expired due to Fees
First Claim
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1. A method of analyzing a three dimensional volume of an object using a computer and a memory, comprising the steps of:

  • generating radiation using a radiation source;

    positioning a plurality of detectors to receive said radiation from said radiation source such that each said detector receives said radiation along paths oriented at different angles with respect to each other;

    each said detector comprising of a first part and a second part, said plurality of detectors so arranged that none of said parts are parallel, further each said part of said detector comprises an array of small elemental or pixel detectors;

    interposing said object between said detectors and said radiation source;

    translating said object relative to said detectors and said radiation source;

    recording data repetitively from said detectors as said object is translated relative to said radiation source and said detectors;

    storing said data in memory; and

    using a computer for analyzing a three dimensional volume of said object from said data.

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