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Position control device, measuring device and machining device

  • US 7,319,909 B2
  • Filed: 01/17/2006
  • Issued: 01/15/2008
  • Est. Priority Date: 01/17/2005
  • Status: Active Grant
First Claim
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1. A position control device that controls a position of a driven body driven by a driver according to a predetermined position command, comprising:

  • a position control loop including a position comparator that compares a current position of the driven body with the position command, and a position characteristic compensator that performs position characteristic compensation of the driven body based on a comparison result of the position comparator;

    a speed control loop including a speed comparator that compares a current speed of the driven body with an output value from the position characteristic compensator as a speed command, and a speed characteristic compensator that performs speed characteristic compensation of the driven body based on a comparison result of the speed comparator;

    an adder that adds the output value from the position characteristic compensator and an output value from the speed characteristic compensator; and

    a drive controller that operates the driver to drive the driven body based on an addition result of the adder.

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