Stress detection method for sensor device with multiple axis sensor and sensor device employing this method

• US 7,320,253 B2
• Filed: 03/08/2005
• Issued: 01/22/2008
• Est. Priority Date: 04/01/2004
• Status: Expired due to Fees

• Current Assignee: Tamagawa Seiki Co., Ltd.
• Original Assignee: Fujitsu Limited, Fujitsu Media Devices Limited (Fujitsu Limited)
• Inventors: Ono, Masaaki, Ishikawa, Hiroshi, Tokunaga, Hiroshi, Miyashita, Tsutomu, Hanazawa, Toshio
• Primary Examiner(s): Lefkowitz; Edward
• Assistant Examiner(s): Kirkland, III; Freddie
• Application Number:
  US11/073,944
• Publication Number:
  US 20050229720A1
• Time in Patent Office: 1,050 Days
• Field of Search: 73/13.7, 73/13.8, 73/17.7, 73/17.8, 734/93, 735/040.2, 738/620.42, 738/620.43
• US Class Current: 73/862.042
• CPC Class Codes: G01P 15/123 by piezo-resistive elements, e.g. semiconductor strain gauges
• CPC Class Codes: G01P 15/18 in two or more dimensions
• CPC Class Codes: G01P 2015/084 the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

The present invention provides the stress detection method for force sensor device with multiple axis sensor device and force sensor device employing this method, whose installation angle is arbitrary. The stress detection method includes, first and second force sensors whose detection axes are orthogonal to each other. When the detection axis of first force sensor forms angle θ with direction of detected stress Ax, and the stress component of direction perpendicular to direction of the detected stress Ax is Az, output Apx of the axis direction of first force sensor is found as Apx=α_x (Ax×cos θ+Az×sin θ), and output Apz of the axis direction of the second force sensor is found as Apz=α_z (Ax×sin θ+Az×cos θ), and, when α_x and α_z are detection sensitivity coefficients of first and second force sensors respectively, the detection sensitivity coefficient α_z of second force sensor is set as α_z=α_x tan θ, and the detected stress Ax is found as Ax=(Apx−Apz)/α_x(cos θ−tan θ×sin θ).

Claims

1. A stress detection method for a sensor device with a multiple axis sensor comprising, as the multiple axis sensor, first and second sensors having detection axes of which are orthogonal to one other,

wherein, when the detection axis of the first sensor forms an angle θ

with the axis direction in which detected stress Ax is delivered, and the stress component of an axis direction that is perpendicular to the axis in which the detected stress Ax is delivered as Az,

an output Apx of the axis direction of the first sensor is found as Apx=α

_x (Ax ×

cos θ

+Az×

sin θ

), and

an output Apz of the axis direction of the second sensor is found as Apz=α

_z (Ax×

sin θ

+Az×

cos θ

), and, when α

_x and α

_z are detection sensitivity coefficients of the first and second sensors respectively, the detection sensitivitycoefficient α

_z of the second sensor is set as α

_z=α

_x tan θ

,the difference Apx−

Apz between the output Apx and output Apz is found, and the detected stress Ax is found from the difference as Ax=(Apx−

Apz)/α

_x(cos θ

−

tan θ

×

sin θ

).

2. The stress detection method for a sensor device with a multiple axis sensor according to claim 1, comprising:

prestoring the relationship of correspondence between the output Apz in the axis direction of the second sensor and the angle θ

;

keeping the force sensor device at rest such that the first axis is in a horizontal direction;

finding the corresponding angle θ

on the basis of the stored relationship of correspondence from the output of the second sensor thus found; and

storing the angle θ

thus found and finding the detection sensitivity coefficient of the corresponding second sensor based on the angle θ

thus found.

5. The stress detection method for a sensor device with a multiple axis sensor according to claim 2 or 4, wherein the storage of the angle θ

thus found can be reset.

3. A stress detection method for a sensor device with a multiple axis sensor comprising, as the multiple axis sensor:

first and second sensors the directions of which form an angle Φ

in mutually opposite directions with the direction of a detected stress F1; and

a third sensor with a detection axis in a direction that is perpendicular to the plane formed with the detection axes of the first and second sensors,

wherein, when the plane formed with the detection axes of the first and second sensors forms an angle θ

with the axis direction of the detected stress F1, and the stress component in an axis direction that is perpendicular to the axis in which the detected stress F1 is delivered is F2,

an output Fx of the axis direction of the first sensor is found as Fx=α

_x×

(F1 ×

cos Φ

×

cos θ

−

F2×

sin θ

),

an output Fy of an axis direction of the second sensor is found as Fy=α

_y×

(F1×

cos Φ

×

cos θ

−

F2×

sin θ

),

an output Fz of an axis direction of the third sensor is found as Fz=α

_z×

(F1×

sin θ

−

F2×

cos θ

), and

the combined output F of the outputs Fx, Fy and Fz is found as F=Fx+Fy−

Fz; and

,

when α

_x, α

_y and α

_z are detection sensitivity coefficients of the first, second, and third sensors respectively, the detection sensitivity coefficient α

_z of the third sensor is α

_z=(α

_x+α

_y)×

tan θ

, and the detected stress F1 is then found from the composite output F as F1=F/{(α

_x+α

_y)cos Φ

×

cos θ

−

α

_z×

sin θ

}.

4. The stress detection method for a sensor device with a multiple axis sensor according to claim 3, comprising:

prestoring the relationship of correspondence between an output Fz of the axis direction of the third sensor and the angle θ

;

keeping the sensor device at rest such that the plane formed with the detection axes of the first and second sensors is placed in a horizontal direction;

finding the corresponding angle θ

on the basis of the stored relationship of correspondence from the output of the third sensor thus found; and

storing the angle θ

thus found and finding the corresponding detection sensitivity coefficient of the third sensor based on the angle θ

thus found.

6. A sensor device with a multiple axis sensor comprising:

first and second sensors the detection axes of which are mutually orthogonal; and

a circuit for processing the outputs of the first and second sensors,

wherein, when the detection axis of the first sensor forms an angle θ

with the axis direction in which the detected stress Ax is delivered and the stress component of an axis direction that is perpendicular to the axis in which the detected stress Ax is delivered is Az, the circuit outputs;

Apx=α

_x (Ax×

cos θ

+Az×

sin θ

) as an output in the axis direction of the first sensor, and

Apz=α

_z (Ax×

sin θ

+Az×

cos θ

) as an output in the axis direction of the second sensor,

where α

_x and α

_z are detection sensitivity coefficients of the first and second sensors respectively and the detection sensitivity coefficient α

_z of the second sensor is set as α

_z=α

_x tan θ

;

the difference Apx−

Apz between the output Apx and output Apz is found; and

the detected stress Ax is detected from the difference and outputted as Ax=(Apx −

Apz)/α

_x(cos θ

−

tan θ

×

sin θ

).

7. The sensor device with a multiple axis sensor according to claim 6, comprising:

prestoring the relationship of correspondence between the output Apz of the axis direction of the second force sensor and the angle θ

;

keeping the force sensor device at rest such that the first axis is in a horizontal direction;

finding the corresponding angle θ

on the basis of the stored relationship of correspondence from the output of the second sensor thus found; and

storing the angle θ

thus found and establishing the detection sensitivity coefficient for the angle θ

thus found.

8. The sensor device with a multiple axis sensor according to claims 7, wherein the storage of the angle θ

thus found can be reset.

9. A sensor device with a multiple axis sensor comprising, as the multiple axis sensor:

first and second sensors that form an angle Φ

in mutually opposite directions with the axis direction in which the detected stress F1 is delivered; and

a third sensor with a detection axis in a direction that is perpendicular to the plane formed with the detection axes of the first and second sensors, the plane formed with the first and second sensors forming an angle θ

with the axis direction in which the detected stress F1 is delivered; and

a circuit that processes the outputs of the first, second, and third sensors, such that, when the stress component in an axis direction that is perpendicular to the axis in which the detected stress F1 is delivered is F2, the circuit outputs;

an output Fx of the axis direction of the first sensor as Fx=α

_x×

(F1×

cos Φ

×

cos θ

−

F2×

sin θ

),

an output Fy of the axis direction of the second sensor as Fy=α

_y×

(F1×

cos Φ

×

cos θ

−

F2×

sin θ

),

an output Fz of the axis direction of the second sensor as Fz=α

_z×

(F1×

sin θ

−

F2×

cos θ

), and

the combined output F of the outputs Fx, Fy and Fz as F=Fx+Fy−

Fz; and

,

wherein α

_x, α

_y and α

_z are detection sensitivity coefficients of the first, second, and third sensors respectively,

the detection sensitivity coefficient α

_z of the third sensor is α

_z=(α

_x+α

_y)×

tan θ

, and

the detected stress F1 is obtained from the composite output F and outputted as F1=F/{(α

_x+α

_y)cos Φ

×

cos θ

−

α

_z ×

sin θ

}.

10. The sensor device with a multiple axis sensor according to claim 9,

wherein the relationship of correspondence between the output Fz of the axis direction of the third sensor and the angle θ

is prestored;

the sensor device is kept in rest such that the plane formed with the detection axes of the first and second sensors is placed in a horizontal direction;

the corresponding angle θ

is then found on the basis of the stored relationship of correspondence from the output of the third sensor thus found; and

the angle θ

thus found is stored and the corresponding detection sensitivity coefficient of the third sensor is established from the angle θ

thus found.

11. The sensor device with a multiple axis sensor according to claim 10, wherein the storage of the angle θ

thus found can be reset.