Microvalve package assembly
First Claim
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1. A microvalve assembly, comprising:
- a base fixture including a recessed clamp fixture receiving region-wherein the recessed clamp fixture receiving region comprises a recessed microvalve receiving region;
a clamp fixture, wherein the recessed clamp fixture receiving region is complementary in size and shape to the clamp fixture, such that the clamp fixture fits at least substantially into the recessed clamp fixture receiving region;
an electrostatically activated microvalve disposed between the base fixture and the clamp fixture; and
wherein the clamp fixture is mechanically secured to the base fixture without an adhesive.
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Abstract
A microvalve assembly that can help protect a microvalve or an assembly of microvalves from the environment. Such a microvalve assembly may be mechanically assembled, without the use of adhesives and/or other materials that might out-gas and/or otherwise reduce the performance of the electrostatically actuated devices contained therein. In particular, a microvalve assembly can include a base fixture, a clamp fixture that is configured to be attached to the base fixture, and an electrostatically actuated microvalve that is disposed between the base fixture and the clamp fixture. The clamp fixture may be mechanically secured to the base fixture.
95 Citations
10 Claims
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1. A microvalve assembly, comprising:
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a base fixture including a recessed clamp fixture receiving region-wherein the recessed clamp fixture receiving region comprises a recessed microvalve receiving region; a clamp fixture, wherein the recessed clamp fixture receiving region is complementary in size and shape to the clamp fixture, such that the clamp fixture fits at least substantially into the recessed clamp fixture receiving region; an electrostatically activated microvalve disposed between the base fixture and the clamp fixture; and wherein the clamp fixture is mechanically secured to the base fixture without an adhesive. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A microvalve assembly, comprising:
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a base fixture comprising a recessed clamp fixture receiving region and a recessed microvalve receiving region disposed within the recessed clamp fixture receiving region; a clamp fixture configured to fit at least substantially into the recessed clamp receiving region of the base fixture, the clamp fixture comprising a raised microvalve receiving region at least substantially aligned with the recessed microvalve receiving region of the base fixture; and an array of electrostatically activated microvalves disposed between the base fixture and the clamp fixture; wherein the clamp fixture is mechanically secured to the base fixture without adhesives. - View Dependent Claims (8, 9, 10)
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Specification