Ultra-low voltage capable zipper switch

• US 7,321,275 B2
• Filed: 06/23/2005
• Issued: 01/22/2008
• Est. Priority Date: 06/23/2005
• Status: Expired due to Fees

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Melki, Joseph, Heck, John, Ma, Qing, Bar, Hanan, Chou, Tsung-Kuan Allen, Tran, Quan
• Primary Examiner(s): TAKAOKA, DEAN O
• Application Number:
  US11/165,795
• Publication Number:
  US 20060290443A1
• Time in Patent Office: 943 Days
• Field of Search: 333/262, 333/101, 333/105, 333/78, 200/181
• US Class Current: 333/105
• CPC Class Codes: B81B 2201/014 having a cantilever fixed on one side connected to one or more dimples
• CPC Class Codes: B81B 3/0013 Structures dimensioned for mechanical prevention of stiction, e.g. spring with increased stiffness
• CPC Class Codes: H01H 2059/0063 with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
• CPC Class Codes: H01H 2059/0072 with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

An electromechanical switch includes an actuation electrode, an anchor, a cantilever electrode, a contact, and signal lines. The actuation electrode and anchor are mounted to a substrate. The cantilever electrode is supported by the anchor above the actuation electrode. The contact is mounted to the cantilever electrode. The signal lines are positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

Claims

1. An apparatus, comprising:

an actuation electrode mounted to a substrate;

an anchor mounted to the substrate;

a cantilever electrode supported by the anchor proximate the actuation electrode;

a contact mounted to the cantilever electrode and protruding below the cantilever electrode between the anchor and a middle of the cantilever electrode; and

signal lines positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a progressive movement starting from a distal end of the cantilever electrode.

2. The apparatus of claim 1, wherein the cantilever electrode comprises polysilicon.

3. The apparatus of claim 2, wherein the cantilever electrode includes multiple spring constants, a first of the multiple spring constants to provide a first restoring force to open circuit the signal lines with the contact when the actuation voltage is removed and a second of the multiple spring constants to provide a second restoring force smaller than the first restoring force to separate the distal end of the cantilever electrode from the actuation electrode after the actuation voltage is removed.

4. The apparatus of claim 2, further comprising a plurality of stopper stubs formed on an underside of the cantilever electrode to prevent the cantilever electrode from electrically contacting the actuation electrode when the actuation voltage is applied.

5. The apparatus of claim 4, further comprising stopper butts disposed within the actuation electrode but electrically insulated from the actuation electrode, the stopper butts positioned to abut the stopper stubs when the cantilever electrode bends towards the actuation electrode.

6. The apparatus of claim 1, further comprising another anchor and wherein the cantilever electrode comprises two narrow members coupled to a plate member at first ends and mounted to the anchors at opposite ends, wherein the contact comprises two protruding contacts extending below the cantilever electrode and interconnected above the cantilever electrode by a suspended trace.

7. The apparatus of claim 1, wherein the apparatus comprises a micro-electromechanical system (“

MEMS”

) radio frequency (“

RF”

) switch and wherein the signal lines comprise;

an input RF signal line to carry an RF signal into the MEMS RF switch; and

an output RF signal line to carry the RF signal out of the MEMS RF switch.

8. The apparatus of claim 1, wherein the substrate comprises an insulating layer disposed over a bulk silicon layer, wherein the actuation electrode, the anchor, and the signal lines are disposed on the insulating layer.

9. The apparatus of claim 1, wherein the apparatus comprises a switch module including four micro-electromechanical system (“

MEMS”

) switches coupled in parallel, each of the MEMS switches including the actuation electrode, the anchor, and the signal lines mounted to the substrate and the cantilever electrode supported by the anchor, wherein the switch module further comprises;

first interconnects electrically interconnecting the actuation electrode of each of the MEMS switches;

second interconnects electrically interconnecting the anchor of a first and a second pair of the MEMS switches in a back-to-back configuration; and

cross-interconnects electrically interconnecting the anchor of one of the MEMS switches of the first pair to the anchor of one of the MEMS switches of the second pair such that the anchor of all four MEMS switches are electrically interconnected.

10. The apparatus of claim 9, wherein each of the second interconnects comprises a metal air bridge over a metal conductor line, the metal air bride coupling to one of the signal lines and the metal conductor line coupling to the anchor.

11. The apparatus of claim 9, further comprising:

a first resistor electrically coupled at a first input port of the actuation electrode of one of the MEMS switches to filter RF signal loss through the actuation electrodes; and

a second resistor electrically coupled a second input port coupled to the cantilever electrode of one of the MEMS switches to filter RF signal loss through the cantilever electrode.

12. The apparatus of claim 1, wherein the progressive movement comprises a zipper like movement that starts from the distal end of the cantilever electrode and progressively moves towards the anchor.

13. A method of operating an electromechanical switch, comprising:

propagating an radio frequency (“

RE”

) signal along an input signal line;

applying an actuation voltage, between an actuation electrode and a cantilever electrode suspended above the actuation electrode by an anchor, to bend the cantilever electrode toward the actuation electrode with a zipper like movement starting from a distal end of the cantilever electrode and moving towards the anchor, wherein the actuation voltage is less than approximately 8V;

close circuiting the input signal line with an output signal line through a contact mounted to the actuation electrode while the actuation voltage is applied; and

propagating the RF signal from the input signal line through the contact to the output signal line.

14. The method of claim 13, wherein the contact protrudes below the cantilever electrode and is mounted to the cantilever electrode between the anchor and a middle of the cantilever electrode, and wherein the cantilever electrode comprises polysilicon.

15. The method of claim 13, wherein the actuation voltage comprises a digital logic level voltage.

16. The method of claim 13, wherein the RF signal is decoupled from the actuation voltage.

17. The method of claim 16, wherein the actuation voltage is applied between the actuation electrode and the cantilever electrode with alternating polarity between instances of close circuiting the input signal line with the output signal line.

18. A wireless device, comprising:

an amplifier;

an antenna; and

a micro-electromechanical system (“

MEMS”

) switch including;

an actuation electrode mounted to a substrate;

an anchor mounted to the substrate;

a cantilever electrode supported by the anchor above the actuation electrode;

a contact mounted to the cantilever electrode between the anchor and a center of the cantilever electrode, the contact protruding below the cantilever electrode;

an input signal line mounted to the substrate and coupled to the antenna; and

an output signal line mounted to the substrate and coupled to the amplifier, the input and output signal lines positioned to form a closed circuit with the contact when an actuation voltage is applied between the actuation electrode and the cantilever electrode causing the cantilever electrode to bend towards the actuation electrode in a zipper like movement starting from a distal end of the cantilever electrode.

19. The wireless device of claim 18, further comprising control logic coupled to apply the actuation voltage between the cantilever and actuation electrodes, the actuation voltage comprises a logic level voltage used by logic elements of the control logic.

20. The wireless device of claim 19, wherein the cantilever electrode comprises polysilicon.