Method and apparatus for fault detection classification of multiple tools based upon external data

• US 7,321,993 B1
• Filed: 07/01/2004
• Issued: 01/22/2008
• Est. Priority Date: 07/01/2004
• Status: Active Grant

• Current Assignee: Advanced Micro Devices, Inc.
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Markle, Richard J., Coss, Jr., Elfido
• Primary Examiner(s): LE, DIEU MINH T
• Application Number:
  US10/883,364
• Time in Patent Office: 1,300 Days
• Field of Search: 714/47, 714/46, 714/48, 702/185
• US Class Current: 714/47.1
• CPC Class Codes: G05B 2223/02 Indirect monitoring, e.g. monitoring production to detect faults of a system
• CPC Class Codes: G05B 23/0235 based on a comparison with predetermined threshold or range, e.g. "classical methods", carried out during normal operation; threshold adaptation or choice; when or how to compare with the threshold

Abstract

The present invention is generally directed to various methods and systems for fault detection control of multiple tools based upon external data. In one illustrative embodiment, the method includes monitoring each of a plurality of tools to determine if a fault condition occurs in any of the tools, each of the tools being comprised of at least one integrated metrology device, monitoring external data regarding at least one parameter that may impact an operation performed in each of the tools, and determining if an indicated fault condition in at least one of the tools is a valid fault condition or a systemic fault condition associated with a change in a value of the at least one parameter.

Claims

1. A method, comprising:

monitoring each of a plurality of tools to determine if a fault condition occurs in any of said tools, each of said tools being comprised of at least one integrated metrology device;

monitoring external data regarding at least one parameter that may impact an operation performed in each of said tools; and

determining if an indicated fault condition in at least one of said tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

2. The method of claim 1, wherein said plurality of tools are process tools.

3. The method of claim 1, wherein said plurality of tools are metrology tools.

4. The method of claim 1, further comprising indicating that said indicated fault condition is a valid fault condition when a value of said at least one parameter remains within established acceptable limits.

5. The method of claim 1, wherein a fault condition is indicated for each of said plurality of tools and wherein the method further comprises indicating that said indicated fault conditions for said plurality of tools are not valid fault conditions when a value of said parameter is not within established acceptable limits.

6. The method of claim 1, further comprising providing an adjustment factor to future metrology data received from said at least one integrated metrology device on each of said plurality of tools based upon a determination that said value of said parameter is not within established acceptable limits.

7. The method of claim 1, further comprising adjusting at least one parameter of an operation to be performed in each of said plurality of tools based upon a determination that said value of said parameter is not within established acceptable limits.

8. The method of claim 1, wherein said step of monitoring each of said plurality of tools and monitoring said external data is performed in a fault detection module.

9. The method of claim 1, wherein said parameter is comprised of at least one of atmospheric pressure, pressure within a manufacturing facility, humidity, a flow rate of a liquid supplied to all of said tools, a pressure of a fluid supplied to all of said tools, ambient temperature, a concentration of chemical supplied to all of said tools, a concentration of a chemical mechanical polishing slurry, and a chemical make-up of at least one gas.

10. The method of claim 1, wherein said at least one parameter reflects a physical characteristic of at least one workpiece.

11. The method of claim 1, wherein said parameter comprises at least one of a thickness of a process layer formed above at least one workpiece, a surface profile of at least one workpiece, a critical dimension of a feature formed on at least one workpiece, and an optical property of a film.

12. The method of claim 1, wherein said at least one integrated metrology device comprises at least one sensor operatively coupled to said tool.

13. The method of claim 1, wherein said at least one integrated metrology device comprises a metrology chamber having at least one sensor positioned adjacent thereto.

14. The method of claim 1, wherein each of said tools are process tools that can perform at least one of a deposition process, a thermal growth process, an ion implant process, a heating process, a chemical mechanical polishing process, an etching process and a photolithography process.

15. The method of claim 1, wherein each of said plurality of tools comprises a local controller operatively coupled to said tool, and wherein a supervisory computer operatively coupled to each of said local controllers performs the steps recited in claim 1.

16. The method of claim 1, further comprising processing a plurality of workpieces in said tools after said step of determining if said indicated fault condition is a valid fault condition or a systemic fault condition is performed.

17. A method, comprising:

monitoring each of a plurality of tools to determine if a fault condition occurs in any of said tools, each of said tools being comprised of at least one integrated metrology device;

monitoring external data regarding at least one environmental parameter that may impact an operation performed in each of said tools; and

determining if an indicated fault condition in at least one of said tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

18. The method of claim 17, wherein said plurality of tools are process tools.

19. The method of claim 17, wherein said plurality of tools are metrology tools.

20. The method of claim 17, further comprising indicating that said indicated fault condition is a valid fault condition when a value of said at least one parameter remains within established acceptable limits.

21. The method of claim 17, wherein a fault condition is indicated for each of said plurality of tools and wherein the method further comprises indicating that said indicated fault conditions for said plurality of tools are not valid fault conditions when a value of said parameter is not within established acceptable limits.

22. The method of claim 17, further comprising providing an adjustment factor to future metrology data received from said at least one integrated metrology device on each of said plurality of tools based upon a determination that said value of said parameter is not within established acceptable limits.

23. The method of claim 17, further comprising adjusting at least one parameter of an operation to be performed in each of said plurality of tools based upon a determination that said value of said parameter is not within established acceptable limits.

24. The method of claim 17, further comprising processing a plurality of wafers in said tools after said step of determining if said indicated fault condition is a valid fault condition or a systemic fault condition is performed.

25. A method, comprising:

monitoring each of a plurality of tools that process at least one wafer to determine if a fault condition occurs in any of said tools, each of said tools being comprised of at least one integrated metrology device;

monitoring external data regarding at least one parameter that reflects a physical characteristic of said at least one wafer; and

determining if an indicated fault condition in at least one of said tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

26. The method of claim 25, wherein said plurality of tools are process tools.

27. The method of claim 25, wherein said plurality of tools are metrology tools.

28. The method of claim 25, further comprising indicating that said indicated fault condition is a valid fault condition when a value of said at least one parameter remains within established acceptable limits.

29. The method of claim 25, wherein a fault condition is indicated for each of said plurality of tools and wherein the method further comprises indicating that said indicated fault conditions for said plurality of tools are not valid fault conditions when a value of said parameter is not within established acceptable limits.

30. The method of claim 25, further comprising providing an adjustment factor to future metrology data received from said at least one integrated metrology device on each of said plurality of tools based upon a determination that said value of said parameter is not within established acceptable limits.

31. The method of claim 25, further comprising adjusting at least one parameter of an operation to be performed in each of said plurality of tools based upon a determination that said value of said parameter is not within established acceptable limits.

32. A method, comprising:

monitoring each of a plurality of process tools that process at least one workpiece to determine if a fault condition occurs in any of said process tools, each of said process tools being comprised of at least one integrated metrology device;

monitoring external data regarding at least one parameter that may impact a process operation performed in each of said process tools; and

determining if an indicated fault condition in at least one of said process tools, is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

33. The method of claim 32, further comprising indicating that said indicated fault condition is a valid fault condition when a value of said at least one parameter remains within established acceptable limits.

34. The method of claim 32, wherein a fault condition is indicated for each of said plurality of process tools and wherein the method further comprises indicating that said indicated fault conditions for said plurality of process tools are not valid fault conditions when a value of said parameter is not within established acceptable limits.

35. The method of claim 32, further comprising providing an adjustment factor to future metrology data received from said at least one integrated metrology device on each of said plurality of process tools based upon a determination that said value of said parameter is not within established acceptable limits.

36. The method of claim 32, further comprising adjusting at least one parameter of a process operation to be performed in each of said plurality of process tools based upon a determination that said value of said parameter is not within established acceptable limits.

37. The method of claim 32, wherein said step of monitoring each of said plurality of process tools and monitoring said external data is performed in a fault detection module.

38. The method of claim 32, wherein said at least one parameter reflects a physical characteristic of said at least one workpiece.

39. The method of claim 32, wherein said at least one integrated metrology device comprises at least one sensor operatively coupled to each of said process tools.

40. The method of claim 32, wherein said at least one integrated metrology device comprises a metrology chamber having at least one sensor positioned adjacent thereto.

41. The method of claim 32, wherein each of said process tools can perform at least one of a deposition process, a thermal growth process, an ion implant process, a heating process, an etching process and a photolithography process.

42. The method of claim 32, wherein each of said plurality of process tools comprises a local controller operatively coupled to said tool, and wherein a supervisory computer operatively coupled to each of said local controllers performs the steps recited in claim 32.

43. The method of claim 32, further comprising processing a plurality of workpieces in said process tools after said step of determining if said indicated fault condition is a valid fault condition or a systemic fault condition is performed.

44. A method, comprising:

monitoring each of a plurality of process tools that process at least one semiconducting wafer to determine if a fault condition occurs in any of said process tools, each of said process tools being comprised of at least one integrated metrology device;

monitoring external data regarding at least one environmental parameter that may impact a process operation performed in each of said process tools; and

determining if an indicated fault condition in at least one of said process tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

45. The method of claim 44, further comprising indicating that said indicated fault condition is a valid fault condition when a value of said at least one parameter remains within established acceptable limits.

46. The method of claim 44, wherein a fault condition is indicated for each of said plurality of process tools and wherein the method further comprises indicating that said indicated fault conditions for said plurality of process tools are not valid fault conditions when a value of said parameter is not within established acceptable limits.

47. The method of claim 44, further comprising providing an adjustment factor to future metrology data received from said at least one integrated metrology device on each of said plurality of process tools based upon a determination that said value of said parameter is not within established acceptable limits.

48. The method of claim 44, further comprising adjusting at least one parameter of a process operation to be performed in each of said plurality of process tools based upon a determination that said value of said parameter is not within established acceptable limits.

49. The method of claim 44, further comprising processing a plurality of wafers in said process tools after said step of determining if said indicated fault condition is a valid fault condition or a systemic fault condition is performed.

50. A method, comprising:

monitoring each of a plurality of process tools that process at least one wafer to determine if a fault condition occurs in any of said process tools, each of said process tools being comprised of at least one integrated metrology device;

monitoring external data regarding at least one parameter that reflects a physical characteristic of said at least one wafer; and

determining if an indicated fault condition in at least one of said process tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

51. The method of claim 50, further comprising indicating that said indicated fault condition is a valid fault condition when a value of said at least one parameter remains within established acceptable limits.

52. The method of claim 50, wherein a fault condition is indicated for each of said plurality of process tools and wherein the method further comprises indicating that said indicated fault conditions for said plurality of tools are not valid fault conditions when a value of said parameter is not within established acceptable limits.

53. The method of claim 50, further comprising providing an adjustment factor to future metrology data received from said at least one integrated metrology device on each of said plurality of process tools based upon a determination that said value of said parameter is not within established acceptable limits.

54. The method of claim 50, further comprising adjusting at least one parameter of a process operation to be performed in each of said plurality of process tools based upon a determination that said value of said parameter is not within established acceptable limits.

55. The method of claim 50, further comprising processing a plurality of wafers in said process tools after said step of determining if said indicated fault condition is a valid fault condition or a systemic fault condition is performed.