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Method and apparatus for fault detection classification of multiple tools based upon external data

  • US 7,321,993 B1
  • Filed: 07/01/2004
  • Issued: 01/22/2008
  • Est. Priority Date: 07/01/2004
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • monitoring each of a plurality of tools to determine if a fault condition occurs in any of said tools, each of said tools being comprised of at least one integrated metrology device;

    monitoring external data regarding at least one parameter that may impact an operation performed in each of said tools; and

    determining if an indicated fault condition in at least one of said tools is a valid fault condition or a systemic fault condition associated with a change in a value of said at least one parameter.

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