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Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package

  • US 7,322,242 B2
  • Filed: 08/10/2005
  • Issued: 01/29/2008
  • Est. Priority Date: 08/13/2004
  • Status: Active Grant
First Claim
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1. A micro-electromechanical structure comprising:

  • a rotor having a centroidal axis extending substantially perpendicular to an upper face of said rotor, and including a suspended structure which carries mobile electrodes, said suspended structure being connected to a rotor-anchoring region via elastic elements; and

    a stator including fixed electrodes facing said mobile electrodes,said stator further including at least one stator element, carrying a plurality of said fixed electrodes, said stator element being fixed to a stator-anchoring region; and

    wherein one of said rotor-anchoring region and stator-anchoring region extends along said centroidal axis and the other of said rotor-anchoring region and stator-anchoring region extends near said centroidal axis.

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