Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package
First Claim
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1. A micro-electromechanical structure comprising:
- a rotor having a centroidal axis extending substantially perpendicular to an upper face of said rotor, and including a suspended structure which carries mobile electrodes, said suspended structure being connected to a rotor-anchoring region via elastic elements; and
a stator including fixed electrodes facing said mobile electrodes,said stator further including at least one stator element, carrying a plurality of said fixed electrodes, said stator element being fixed to a stator-anchoring region; and
wherein one of said rotor-anchoring region and stator-anchoring region extends along said centroidal axis and the other of said rotor-anchoring region and stator-anchoring region extends near said centroidal axis.
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Abstract
In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region via elastic elements. The stator includes at least one stator element, which carries a plurality of fixed electrodes and is fixed to a stator-anchoring region. One of the rotor-anchoring regions and stator-anchoring regions extends along the centroidal axis and at least another of the rotor-anchoring regions and stator-anchoring regions extends in the proximity of the centroidal axis.
51 Citations
39 Claims
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1. A micro-electromechanical structure comprising:
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a rotor having a centroidal axis extending substantially perpendicular to an upper face of said rotor, and including a suspended structure which carries mobile electrodes, said suspended structure being connected to a rotor-anchoring region via elastic elements; and a stator including fixed electrodes facing said mobile electrodes, said stator further including at least one stator element, carrying a plurality of said fixed electrodes, said stator element being fixed to a stator-anchoring region; and wherein one of said rotor-anchoring region and stator-anchoring region extends along said centroidal axis and the other of said rotor-anchoring region and stator-anchoring region extends near said centroidal axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A micro-electromechanical device, comprising:
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a semiconductor material substrate; a plurality of anchoring elements coupled to the substrate, one of the plurality being located at a centroidal axis of the device exten&
ng substantially perpendicular to a plane defined by an upper face of the substrate, the remainder of the plurality being located in the proximity of the centroidal axis of the device;a rotor lying in a spaced-apart relationship with respect to a surface of the substrate and movably coupled to the substrate by a first spring element extending between the rotor and one of the plurality of anchoring elements, the rotor being sized and positioned to surround the plurality of anchoring elements; and a stator lying in a spaced-apart relationship with respect to a surface of the substrate and coupled to the substrate by another one of the plurality of anchoring elements. - View Dependent Claims (22, 23, 24, 25, 26)
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27. A device comprising:
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a semiconductor substrate; a single rotor anchor coupled to the substrate at a centroidal axis of the device; a rotor movably coupled to the substrate via the single rotor anchor, only, and having a plurality of rotor electrodes; a plurality of stator anchors coupled to the substrate substantially equidistant from the rotor anchor; a stator coupled to the plurality of stator anchors and having a plurality of stator electrodes, each of the plurality of stator anchors being positioned closer to the rotor anchor than any stator electrode; and means for reducing sensitivity of the device to dilatation thereof. - View Dependent Claims (28, 29, 30)
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31. A micro-electromechanical device, comprising:
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a semiconductor material substrate; a plurality of anchoring elements coupled to the substrate in the proximity of a centroidal axis of the device; a rotor lying in a spaced-apart relationship with respect to a surface of the substrate and movably coupled to the substrate by a plurality of spring elements extending between the rotor and one of the plurality of anchoring elements, the rotor being sized and positioned to surround the plurality of anchoring elements; a stator lying in a spaced-apart relationship with respect to a surface of the substrate and coupled to the substrate by another one of the plurality of anchoring elements; a first plurality of rotor electrodes, each lying parallel to a first axis and extending from the rotor toward the stator from a first side of the rotor; a second plurality of rotor electrodes, each lying parallel to the first axis and extending from the rotor toward the stator from a second side of the rotor; a third plurality of rotor electrodes, each lying parallel to a second axis and extending from the rotor toward the stator from a third side of the rotor; a fourth plurality of rotor electrodes, each lying parallel to the second axis and extending from the rotor toward the stator from a fourth side of the rotor; a first plurality of stator electrodes, each lying parallel to the first axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the first plurality of rotor electrodes; a second plurality of stator electrodes, each lying parallel to the first axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the second plurality of rotor electrodes; a third plurality of stator electrodes, each lying parallel to the second axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the third plurality of rotor electrodes; and a fourth plurality of stator electrodes, each lying parallel to the second axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the fourth plurality of rotor electrodes. - View Dependent Claims (32, 33, 34, 35)
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36. A device comprising:
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a semiconductor substrate; a single rotor anchor coupled to the substrate at a centroidal axis of the device; a rotor movably coupled to the substrate via the single rotor anchor, only, and having a plurality of rotor electrodes; first and second stator anchors coupled to the substrate substantially equidistant from the rotor anchor; and two stator elements, only, for a first axis of detection of the device, each coupled to a respective one of the first and second stator anchors and having a plurality of stator electrodes. - View Dependent Claims (37, 38, 39)
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Specification