Method for manufacturing granular silicon crystal
First Claim
1. A method for manufacturing a granular silicon crystal comprising:
- allowing silicon melt in a crucible to be granularly discharged and fallen from a nozzle part composed of silicon carbide or silicon nitride; and
cooling and solidifying the granular silicon melt during falling,to the silicon melt in the crucible, a carbon source being added when the nozzle part is composed of silicon carbonate, and a nitrogen source being added when the nozzle part is composed of silicon nitride.
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Abstract
In a method for manufacturing a granular silicon crystal by allowing silicon melt in a crucible to be granularly discharged and fallen from a nozzle part composed of silicon carbide or silicon nitride, and cooling and solidifying the granular silicon melt during falling, a carbon source is added when the nozzle part is composed of silicon carbide, and a nitrogen source is added when the nozzle part is composed of silicon nitride, to the silicon melt in the crucible. Thereby, melt droplets of uniform size can be generated, so that granular silicon crystals having narrow variations in particle size can be manufactured at high productivity and superior reproducibility.
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Citations
19 Claims
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1. A method for manufacturing a granular silicon crystal comprising:
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allowing silicon melt in a crucible to be granularly discharged and fallen from a nozzle part composed of silicon carbide or silicon nitride; and cooling and solidifying the granular silicon melt during falling, to the silicon melt in the crucible, a carbon source being added when the nozzle part is composed of silicon carbonate, and a nitrogen source being added when the nozzle part is composed of silicon nitride. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification