Coating for aluminum component
First Claim
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1. A method of coating a surface of an aluminum component, the method comprising:
- (a) anodizing the surface of the aluminum component to form an anodized aluminum oxide layer;
(b) depositing an aluminum layer on the anodized aluminum oxide layer by a chemical vapor deposition process comprising;
(i) placing the component in a process zone of a substrate processing chamber; and
(ii) providing an energized process gas comprising an aluminum-containing gas in the process zone to deposit an aluminum layer on the anodized aluminum oxide layer;
(c) heating the aluminum layer to re-flow the aluminum layer; and
(d) forming a second aluminum oxide layer from the aluminum layer.
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Abstract
A coated aluminum component for a substrate processing chamber comprises an aluminum component having a surface; a first aluminum oxide layer formed on the surface of the aluminum component, the aluminum oxide layer having a surface comprising penetrating surface features; and a second aluminum oxide layer on the first aluminum oxide layer, the second aluminum oxide layer substantially completely filling the penetrating surface features of the first aluminum oxide layer. A method of forming the coated aluminum component is also described.
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Citations
29 Claims
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1. A method of coating a surface of an aluminum component, the method comprising:
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(a) anodizing the surface of the aluminum component to form an anodized aluminum oxide layer; (b) depositing an aluminum layer on the anodized aluminum oxide layer by a chemical vapor deposition process comprising; (i) placing the component in a process zone of a substrate processing chamber; and (ii) providing an energized process gas comprising an aluminum-containing gas in the process zone to deposit an aluminum layer on the anodized aluminum oxide layer; (c) heating the aluminum layer to re-flow the aluminum layer; and (d) forming a second aluminum oxide layer from the aluminum layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of coating an anodized surface of an aluminum component, the method comprising:
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(a) depositing an aluminum layer on the anodized surface of the aluminum component by a chemical vapor deposition process comprising; (i) placing the component in a process zone of a substrate processing chamber; and (ii) providing an energized process gas comprising an aluminum-containing gas in the process zone to deposit an aluminum layer on the anodized aluminum oxide layer; (b) heating the aluminum layer to re-flow the aluminum layer; and (c) forming an aluminum oxide layer from the aluminum layer. - View Dependent Claims (17, 18, 19, 20)
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21. A method of fabricating an aluminum component, the method comprising:
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(a) forming the aluminum component having a surface; (b) anodizing the cleaned surface of the aluminum component to form an anodized aluminum oxide layer; (c) depositing an aluminum layer on the anodized aluminum oxide layer by a chemical vapor deposition process comprising; (i) placing the component in a process zone of a substrate processing chamber; and (ii) providing an energized process gas comprising an aluminum-containing gas in the process zone to deposit an aluminum layer on the anodized aluminum oxide layer; (d) heating the aluminum layer to re-flow the aluminum layer; and (e) forming a second aluminum oxide layer from the aluminum layer. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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Specification