Apparatus and method for detecting photon emissions from transistors
First Claim
1. A method for analyzing and displaying collected photon emissions data of a plurality of photons to discriminate between photons emitted from a transistor and photons emitted from other sources, the collected photon emissions data of each photon comprising a spatial component and a temporal component respectively corresponding with a location where the photon was detected and a time when the photon was detected, the method comprising:
- correlating the collected photon emissions data of each photon with the collected photon emission data of some or all of the plurality of photons to obtain correlated photon emission data for the photon;
assigning a weight to each photon as a function of the correlated photon emission data of the photon;
determining from the weight of each photon a likelihood that the photon originated from a transistor photon emission; and
displaying the likelihood.
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Abstract
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.
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Citations
20 Claims
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1. A method for analyzing and displaying collected photon emissions data of a plurality of photons to discriminate between photons emitted from a transistor and photons emitted from other sources, the collected photon emissions data of each photon comprising a spatial component and a temporal component respectively corresponding with a location where the photon was detected and a time when the photon was detected, the method comprising:
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correlating the collected photon emissions data of each photon with the collected photon emission data of some or all of the plurality of photons to obtain correlated photon emission data for the photon; assigning a weight to each photon as a function of the correlated photon emission data of the photon; determining from the weight of each photon a likelihood that the photon originated from a transistor photon emission; and displaying the likelihood. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for discriminating between photons emitted from a transistor and photons emitted from background sources, the method comprising:
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detecting emissions data of a plurality of photons to obtain collected photon emission data, the collected photon emission data of each photon having a spatial component corresponding with a detection location of the photon and a temporal component corresponding with a detection time of the photon, spatially correlating the collected photon emission data of a photon from among the plurality of photons with the collected photon emission data of some or all of the plurality of photons to obtain spatially correlated photon emission data for the photon; temporally correlating the collected photon emission data of the photon with the collected photon emission data of some or all of the plurality of photons to obtain temporally correlated photon emission data for the photon; assigning a weight to the photon as a function of the spatially correlated photon emission data of the photon and the temporally correlated photon emission data of the photon; and determining from the weight of the photon a likelihood that the photon was emitted from the transistor. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification