Cast pedestal with heating element and coaxial heat exchanger

• US 7,327,948 B1
• Filed: 07/18/2005
• Issued: 02/05/2008
• Est. Priority Date: 04/26/2005
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Gentile, Stephen, Kamian, George, Woytowitz, Peter, Roham, Sassan, Shrinivasan, Krishnan
• Primary Examiner(s): ROBINSON, DANIEL LEON
• Application Number:
  US11/184,101
• Time in Patent Office: 932 Days
• Field of Search: 392/416, 392/407, 392/418, 392/419, 219/405, 219/411, 118/725, 118/724
• US Class Current: 392/416
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

The present invention provides a heat transfer assembly that, when coupled to an object, is capable of keeping the object at a uniform elevated temperature while removing large amounts of heat from an external source. The assembly may be contained in a pedestal for use in a UV-cure chamber. The heat transfer assembly includes a heating element to control the wafer temperature and a cooling element to remove incident IR heat from the wafer and pedestal. A heat resistant layer having a calibrated heat resistance is located between the heating and cooling elements and between the wafer and the cooling elements. The heat resistant layer is able to sustain high temperature gradient from the wafer to the coolant so that the coolant does not boil while permitting enough heat to be conducted away from the wafer to maintain the desired set-point temperature.

Claims

1. A pedestal for maintaining a workpiece exposed to an external heat source at a uniform temperature comprising a heat transfer assembly, said heat transfer assembly comprising:

a) a heating element for controlling the workpiece temperature;

b) a cooling element for removing heat generated by the heat source, said cooling element using a coolant having a boiling temperature of less than 200°

C. as a heat-transfer fluid; and

c) a heat resistant layer located between the heating and cooling elements;

said layer having a calibrated heat resistance such that coolant in the cooling element does not boil and the workpiece temperature is maintained.

2. The pedestal of claim 1, further comprising coaxial inner and outer tubes;

the cooling channel comprising the inner tube; and

the heat resistant layer comprising an annular space between the tubes.

3. The pedestal of claim 2, further comprising a spiral coil having a defined pitch between 0.01 and 10 inches and located in the annular gap.

4. The pedestal of claim 2, wherein the pedestal housing comprises aluminum and the coaxial tubes and heating elements are cast in the housing.

5. The pedestal of claim 1, wherein the heat resistant layer is located above a layer containing the cooling elements and below a layer containing the heating elements.

6. The pedestal of claim 1, wherein the external source is a UV lamp.

7. The pedestal of claim 1, wherein the uniform temperature is between 250 and 600°

C.

8. The pedestal of claim 1, wherein the uniform temperature is between 250 and 450°

C.

9. The pedestal of claim 1, wherein at least 3 kW of heat from the external source is incident on the workpiece.

10. The pedestal of claim 1, wherein the resistance of the heat resistant layer is variable.

11. The pedestal of claim 1, wherein the coolant is water.

21. The pedestal of claim 1 wherein the calibrated heat resistance of the heat resistant layer is such that the temperature of the coolant is maintained below the coolant boiling temperature.

12. A heat transfer assembly for maintaining a workpiece exposed to an external heat source at a uniform temperature of at least 200°

C. comprising;

a) a heating element for controlling the workpiece temperature;

b) a cooling element for removing heat generated by the heat source, said cooling element using a coolant having a boiling temperature of less than 200°

C. as a heat-transfer fluid; and

c) a heat resistant layer located between the heating and cooling elements;

said layer having a calibrated heat resistance such that coolant in the cooling element does not boil and the workpiece temperature is maintained.

13. The heat transfer assembly of claim 12, further comprising coaxial inner and outer tubes;

the cooling element comprising the inner tube; and

the heat resistant layer comprising an annular space between the tubes.

14. The heat transfer assembly of claim 12, wherein the temperate gradient across the heat resistant layer is at least 100°

C.

15. The heat transfer assembly of claim 12, wherein the heat resistant layer further comprises a spiral coil in the annular space.

16. The heat transfer assembly of claim 15, wherein the spiral coil is at a uniform pitch.

17. The heat transfer assembly of claim 16, wherein the pitch ranges from 0.01 inches to 10 inches.

18. The heat transfer assembly of claim 13, wherein the heat resistant layer further comprises a material selected from sand, ceramic beads or fiberglass in the annular space.

19. The heat transfer assembly of claim 13, wherein the heat resistant layer further comprises a compressed gas or a high-boiling liquid in the annular space.

20. The heat transfer assembly of claim 12, wherein the resistance of the heat resistant layer is variable.

22. The heat transfer assembly of claim 12 wherein the calibrated heat resistance of the heat resistant layer is such that the temperature of the coolant is maintained below the coolant boiling temperature.