Inkjet printhead with micro-electromechanical fluid ejection devices having integrated movement sensors
First Claim
1. An inkjet printhead comprising a plurality of micro-electromechanical ejection devices for ejecting ink onto print media, at least some of the devices comprising:
- a substrate;
a semiconductor layer positioned on the substrate, the substrate and the semiconductor layer defining a fluid inlet chamber;
a nozzle chamber defining structure positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet chamber and a fluid ejection port in fluid communication with the nozzle chamber;
an actuator that is fixed, at one end, to the substrate, the actuator incorporating a heating circuit electrically connected to the semiconductor layer, the heating circuit being configured to generate thermal differential expansion and contraction upon excitation and de-excitation by the semiconductor layer so as to effect displacement of the actuator relative to the substrate;
a fluid ejection member fixed to an opposite end of the actuator and positioned with respect to the nozzle chamber so that resultant displacement of the fluid ejection member causes fluid to be ejected from the fluid ejection port; and
a movement sensor that is positioned on the actuator to determine an extent of movement of the actuator.
3 Assignments
0 Petitions
Accused Products
Abstract
An inkjet printhead comprises a plurality of micro-electromechanical fluid ejection devices, each having a substrate and semiconductor layer positioned on the substrate. The substrate and the semiconductor layer define a fluid inlet chamber. A nozzle chamber defining structure is positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet chamber and a fluid ejection port in fluid communication with the nozzle chamber. An actuator is fixed, at one end, to the substrate. The actuator incorporates a heating circuit electrically connected to the semiconductor layer. The heating circuit is configured to generate thermal differential expansion and contraction upon excitation and de-excitation by the semiconductor layer so that the actuator is cyclically displaced relative to the substrate. A fluid ejection member is fixed to an opposite end of the actuator and positioned with respect to the nozzle chamber so that resultant displacement of the fluid ejection member causes fluid to be ejected from the fluid ejection port. A movement sensor is positioned on the actuator to determine an extent of movement of the actuator.
16 Citations
5 Claims
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1. An inkjet printhead comprising a plurality of micro-electromechanical ejection devices for ejecting ink onto print media, at least some of the devices comprising:
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a substrate; a semiconductor layer positioned on the substrate, the substrate and the semiconductor layer defining a fluid inlet chamber; a nozzle chamber defining structure positioned on the substrate to define a nozzle chamber in fluid communication with the fluid inlet chamber and a fluid ejection port in fluid communication with the nozzle chamber; an actuator that is fixed, at one end, to the substrate, the actuator incorporating a heating circuit electrically connected to the semiconductor layer, the heating circuit being configured to generate thermal differential expansion and contraction upon excitation and de-excitation by the semiconductor layer so as to effect displacement of the actuator relative to the substrate; a fluid ejection member fixed to an opposite end of the actuator and positioned with respect to the nozzle chamber so that resultant displacement of the fluid ejection member causes fluid to be ejected from the fluid ejection port; and a movement sensor that is positioned on the actuator to determine an extent of movement of the actuator. - View Dependent Claims (2, 3, 4, 5)
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Specification