Silicide-silicon oxide-semiconductor antifuse device and method of making

• US 7,329,565 B2
• Filed: 11/12/2004
• Issued: 02/12/2008
• Est. Priority Date: 03/13/2002
• Status: Expired due to Fees

• Current Assignee: SanDisk Technologies LLC (Western Digital Corporation)
• Original Assignee: SanDisk 3D LLC (Western Digital Corporation)
• Inventors: Herner, S. Brad
• Primary Examiner(s): Pham; Thanhha S.
• Application Number:
  US10/986,196
• Publication Number:
  US 20050112804A1
• Time in Patent Office: 1,187 Days
• Field of Search: 438/131, 438/467, 438/600
• US Class Current: 438/131
• CPC Class Codes: H01L 23/5252 comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
• CPC Class Codes: H01L 27/0688 Integrated circuits having a three-dimensional layout
• CPC Class Codes: H01L 27/101 including resistors or capacitors only
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An antifuse contains a first silicide layer, a grown silicon oxide antifuse layer on a first surface of the first silicide layer, and a first semiconductor layer having a first surface in contact with the antifuse layer.

Claims

1. A method of making an antifuse comprising:

forming a first silicide layer over a substrate, wherein the first silicide layer comprises a first cobalt silicide layer;

growing an insulating antifuse layer on a first surface of the first silicide layer by converting a portion of the first silicide layer to the insulating antifuse layer; and

forming a first semiconductor layer on the insulating antifuse layer.

2. The method of claim 1, wherein:

growing the insulating antifuse layer comprises thermally growing a silicon oxide layer; and

the first semiconductor layer comprises an intrinsic or lightly doped polysilicon or single crystalline silicon layer of the first conductivity type.

3. The method of claim 1 further comprising:

forming a heavily doped third semiconductor layer over the substrate;

forming the first cobalt silicide layer on the third semiconductor layer; and

forming a heavily doped second semiconductor layer of the first conductivity type on the first semiconductor layer.

4. The method of claim 3, wherein the first, the heavily doped second and the heavily doped third semiconductor layers comprise n-type polysilicon layers.

5. The method of claim 3, wherein the first and the heavily doped second semiconductor layers comprise n-type polysilicon layers and the heavily doped third semiconductor layer comprises a p-type polysilicon layer.

6. The method of claim 3, further comprising forming a second cobalt silicide layer on the heavily doped second semiconductor layer.

7. The method of claim 6, wherein:

The insulating antifuse layer is 2 to 15 nm thick;

the first and the second cobalt silicide layers are 30 to 100 nm thick;

the first semiconductor layer is 30 to 800 nm thick;

the heavily doped second semiconductor layer is 30 to 500 nm thick; and

the heavily doped third semiconductor layer is 30 to 500 nm thick.

8. The method of claim 6, further comprising:

patterning the heavily doped third semiconductor layer to form first rails extending in a first direction;

then forming the first cobalt silicide layer on the heavily doped third semiconductor layer; and

then growing the antifuse layer on the first cobalt silicide layer.

9. The method of claim 8, further comprising:

forming an insulating fill layer over and between the first rails; and

planarizing the insulating fill layer using chemical mechanical polishing to form insulating fill regions between adjacent first rails.

10. The method of claim 9, further comprising patterning the first semiconductor layer, the heavily doped second semiconductor layer and the second cobalt silicide layer to form a second rail stack disposed in a second direction different than the first direction.

11. The method of claim 10, further comprising:

forming a second antifuse layer on the second cobalt silicide layer;

forming an intrinsic or lightly doped fourth semiconductor layer of the first conductivity type on the first antifuse layer;

forming a heavily doped fifth semiconductor layer of the first conductivity type on the intrinsic or lightly doped fourth semiconductor layer;

forming a third cobalt silicide layer on the heavily doped fifth semiconductor layer; and

forming a third rail stack disposed in the first direction.

12. The method of claim 3, further comprising:

forming an interlayer insulating layer over the substrate;

forming the heavily doped third semiconductor layer comprising a polysilicon layer on the interlayer insulating layer;

patterning the heavily doped third semiconductor layer to form a plurality of first rails disposed in a first direction;

forming an insulating fill layer over and between the first rails;

planarizing the insulating fill layer using chemical mechanical polishing to form first insulating fill regions between adjacent first rails, such that at least top surfaces of the first rails are exposed;

depositing a first cobalt layer on the first rails and the insulating fill regions;

forming a first capping layer on the first cobalt layer;

annealing the first cobalt layer at a first temperature to react portions of the first cobalt layer with the first rails to form the first cobalt silicide layer on the first rails;

selectively etching the capping layer and unreacted portions of the first cobalt layer;

annealing the first cobalt silicide layer at a second temperature higher than the first temperature;

growing the insulating antifuse layer on the first cobalt silicide layer by exposing the first cobalt silicide layer to an oxygen containing ambient at a temperature above room temperature;

forming the first semiconductor layer on the insulating antifuse layer;

forming the heavily doped second semiconductor layer on the first semiconductor layer; and

patterning the first semiconductor layer and the heavily doped second semiconductor layer to form second rail stacks extending in a second direction different from the first direction.

13. The method of claim 12, wherein:

growing the insulating antifuse layer comprises exposing the first cobalt silicide layer to oxygen gas in a rapid thermal annealing system at 600°

C. to 850°

C. for 20 to 60 seconds;

forming the first semiconductor layer comprises depositing a first polysilicon layer; and

forming the second semiconductor layer comprises depositing a second polysilicon layer on the first polysilicon layer or doping an upper portion of the first polysilicon layer with dopant of the first conductivity type.

14. The method of claim 1, further comprising passing a programming current between the first cobalt silicide layer and the first semiconductor layer to form a conductive link through the insulating antifuse layer between first cobalt silicide layer and the first semiconductor layer.

15. The method of claim 1, wherein the step of growing the insulating antifuse layer on the first surface of the first silicide layer comprises converting an upper portion of the first silicide layer to silicon oxide by exposing the first silicide layer to an oxygen containing ambient to form a silicon oxide insulating antifuse layer.

16. A method of making an antifuse comprising:

forming a first silicide layer over a substrate wherein the first silicide layer comprises a first cobalt silicide layer;

growing a silicon oxide antifuse layer on a first surface of the first silicide layer by oxidizing a surface of the first silicide layer; and

forming a first semiconductor layer on the silicon oxide antifuse layer.

17. The method of claim 16, wherein:

the step of growing the silicon oxide antifuse layer comprises growing the silicon oxide antifuse layer by one of dry thermal oxidation, wet thermal oxidation, plasma enhanced oxidation, chemical oxidation or electrochemical oxidation.

18. The method of claim 17, wherein:

the step of growing the silicon oxide antifuse layer comprises growing the silicon oxide antifuse layer by one of dry thermal oxidation or wet thermal oxidation.

19. The method of claim 16, further comprising programming the antifuse such that a diode is formed in the programmed device.