Micromechanical actuator with multiple-plane comb electrodes and methods of making
First Claim
1. A micro-electro-mechanical comb-drive actuator (1), comprising:
- a first semiconductor layer (10) having;
a movable element (12) supported by multiple hinges (14) to allow pivoting about an rotation axis and having a first and a second sets of comb electrodes (13) located on opposite sides of the axis;
a stationary element (11) having a third and a fourth sets of comb electrodes (15);
wherein the teeth of the first and the second sets of comb electrodes (13) are interdigitated in the same plane with the teeth of the third and the fourth sets of comb electrodes (15);
an electrical insulation layer (20) which supports and insulates the semiconductor layers; and
a second semiconductor layer (30) consisting a cavity (31);
wherein the first and the second sets of comb electrodes (13) are coupled to a first voltage (GND), and the third and the fourth sets of comb electrodes (15) are coupled to a second voltage (AC1), andwherein a first oscillating voltage difference between the first and the second voltages at around twice the resonant frequency of the application oscillates the movable element (13) about the rotation axis.
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Accused Products
Abstract
A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.
19 Citations
13 Claims
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1. A micro-electro-mechanical comb-drive actuator (1), comprising:
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a first semiconductor layer (10) having; a movable element (12) supported by multiple hinges (14) to allow pivoting about an rotation axis and having a first and a second sets of comb electrodes (13) located on opposite sides of the axis; a stationary element (11) having a third and a fourth sets of comb electrodes (15); wherein the teeth of the first and the second sets of comb electrodes (13) are interdigitated in the same plane with the teeth of the third and the fourth sets of comb electrodes (15); an electrical insulation layer (20) which supports and insulates the semiconductor layers; and a second semiconductor layer (30) consisting a cavity (31); wherein the first and the second sets of comb electrodes (13) are coupled to a first voltage (GND), and the third and the fourth sets of comb electrodes (15) are coupled to a second voltage (AC1), and wherein a first oscillating voltage difference between the first and the second voltages at around twice the resonant frequency of the application oscillates the movable element (13) about the rotation axis. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micro-electro-mechanical comb-drive actuator (2), comprising:
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a first semiconductor layer (90) having; a movable element (92) supported by multiple hinges (94) to allow pivoting about an axis and having a first and a second sets of comb electrodes (93) located on opposite sides of the axis; and a stationary element (91) having a third and a fourth sets of comb electrodes (95); wherein the teeth of the first and the second comb electrodes (93) are interdigitated in the same plane with the teeth of the third and the fourth comb electrodes (95); an electrical insulation layer (100) which supports and insulates the semiconductor layers (90, 110); and a second semiconductor layer (110) having; a cavity (111); and a fifth and a sixth sets of stationary comb electrodes (112′
, 112″
) electrically isolated and located on opposite sides of the rotation axis of the movable element (92);wherein the teeth of the fifth and the sixth sets of comb electrodes (112′
, 112″
) are interdigitated vertically with the first and the second sets of comb electrodes (93) of the movable element (92);wherein the first and the second sets of comb electrodes (93) are coupled to a first voltage (GND), the third and the fourth sets of comb electrodes (95) are coupled to a second voltage (AC1), the fifth set of comb electrodes (112′
) is coupled to a third voltage (AC2), and the sixth set of comb electrodes (112″
) is coupled to a fourth voltage (AC3), andwherein a first oscillating voltage difference between the first and the second voltages (GND, AC1) at around twice the resonant frequency of the application, and a second oscillating voltage difference between the first and the third voltages (GND, AC2) and a third oscillating voltage difference between the first and the fourth voltages (GND, AC3) at around the resonant frequency of the application oscillate the movable element (92) about the rotation axis. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification