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Micromechanical actuator with multiple-plane comb electrodes and methods of making

  • US 7,329,930 B2
  • Filed: 03/08/2004
  • Issued: 02/12/2008
  • Est. Priority Date: 03/08/2004
  • Status: Expired due to Fees
First Claim
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1. A micro-electro-mechanical comb-drive actuator (1), comprising:

  • a first semiconductor layer (10) having;

    a movable element (12) supported by multiple hinges (14) to allow pivoting about an rotation axis and having a first and a second sets of comb electrodes (13) located on opposite sides of the axis;

    a stationary element (11) having a third and a fourth sets of comb electrodes (15);

    wherein the teeth of the first and the second sets of comb electrodes (13) are interdigitated in the same plane with the teeth of the third and the fourth sets of comb electrodes (15);

    an electrical insulation layer (20) which supports and insulates the semiconductor layers; and

    a second semiconductor layer (30) consisting a cavity (31);

    wherein the first and the second sets of comb electrodes (13) are coupled to a first voltage (GND), and the third and the fourth sets of comb electrodes (15) are coupled to a second voltage (AC1), andwherein a first oscillating voltage difference between the first and the second voltages at around twice the resonant frequency of the application oscillates the movable element (13) about the rotation axis.

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