Localizing a temperature of a device for testing

• US 7,330,041 B2
• Filed: 03/21/2005
• Issued: 02/12/2008
• Est. Priority Date: 06/14/2004
• Status: Expired due to Fees

• Current Assignee: FormFactor Beaverton, Inc. (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: McFadden, Bruce
• Primary Examiner(s): TANG, MINH NHUT
• Application Number:
  US11/086,126
• Publication Number:
  US 20050287685A1
• Time in Patent Office: 1,058 Days
• Field of Search: None
• US Class Current: 324/750.06
• CPC Class Codes: G01R 31/2874 related to temperature
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05

Abstract

Wafers or other structures comprising a plurality of dies or devices are tested at non-ambient temperatures by inducing a first heat flux through a substantial portion of a surface of the structure to modify a temperature of the structure and inducing a second heat flux through a local area of a surface of the structure, proximate the device under test, to modify the temperature the device under test.

Claims

1. A method of testing a device at a target temperature, said device being one of a plurality of devices included on a structure having at least one structure surface with a structure surface area, said method comprising the steps of:

(a) inducing a first heat flux through a structure surface over a substantial portion of said structure surface area;

(b) inducing a second heat flux through a surface of a local area of said structure, said local area being smaller than, and within, said structure surface area and proximate said device to be tested;

(c) sensing the temperature of said local area of said structure while said first heat flux and said second heat flux are induced through said surface;

(d) varying said second heat flux in response to the sensed said temperature of said local area so as to achieve said target temperature at said device to be tested; and

(e) measuring a performance parameter for said device at said target temperature.

2. The method of testing a device of claim 1 wherein said performance parameter is measured by at least one probe contacting said device to be tested.

3. The method of testing a device of claim 2 wherein said second heat flux is induced into said structure.

4. The method of testing a device of claim 2 wherein said second heat flux is induced out of said structure.

5. The method of testing a device of claim 1 wherein said second heat flux is provided by a laser that is pulsed over different intervals in response to the sensed said temperature of said local area.

6. The method of claim 5 wherein said target temperature at said device varies with time.

7. The method of testing a device of claim 6 wherein said target temperature varies cyclically with time.

8. The method of testing a device of claim 1 wherein said local area comprises less than seventy five percent of said structure surface area.

9. The method of testing a device of claim 1 wherein said local area comprises less than fifty percent of said structure surface area.

10. The method of testing a device of claim 1 wherein said local area comprises less than twenty five percent of said structure surface area.

11. The method of testing a device of claim 1 wherein said local area comprises less than ten percent of said structure surface area.

12. The method of testing a device of claim 1 wherein said local area approximates a device area of said device.

13. The method of testing a device of claim 1 further comprising varying said first heat flux in response to the sensed said temperature of said local area so as to achieve said target temperature at said device to be tested.

14. The method of testing a device of claim 1 wherein the step of sensing a temperature of said local area of said structure comprises the steps of:

(a) exciting said device;

(b) measuring a first response of said device to said excitation;

(c) inducing a heat flux through a surface of said local area;

(d) measuring a second response of said device to said excitation following said inducement of said heat flux through said surface of said local area; and

(e) inducing additional heat flux through said surface of said local area if said second response of said device has a predetermined relationship to said first response.

15. The method of testing a device of claim 14 wherein step of exciting said device comprises an application of a constant voltage to said device.

16. The method of testing a device of claim 14 wherein step of exciting said device comprises an application of a constant current to said device.

17. An apparatus for testing a device at a temperature, said device being one of a plurality of devices included on a structure having at least one structure surface with a structure surface area, said apparatus comprising:

(a) a first heat flux origin inducing a first heat flux through a structure surface over a substantial portion of said structure surface area;

(b) a second heat flux origin inducing a second heat flux through a local area of a structure surface, said local area being smaller than said structure surface area and proximate said device to be tested;

(c) a probe for measuring a performance parameter of said device by contacting a test pad on a surface of said device;

(d) a temperature sensor sensing a temperature of said local area wherein said temperature sensor comprises;

(ii) a source of excitation connectable to said device;

(ii) an output instrument to measure a response of said device to excitation by said source;

(iii) an arithmetic device to determine a difference between a first response from said output instrument and a temporally successive second response from said output instrument; and

(iv) a comparator to compare said difference to a value that calibrates a response of said output instrument to a temperature of said device; and

(e) a control responding to said sensed temperature of said local area to vary at least one of said first heat flux and said second heat flux.

18. The apparatus for testing a device of claim 17 wherein said first heat flux origin is a heat source.

19. The apparatus for testing a device of claim 18 wherein said second heat flux origin is a heat source.

20. The apparatus for testing a device of claim 18 wherein said second heat flux origin is a heat sink.

21. The apparatus for testing a device of claim 17 wherein said first heat flux origin is a heat sink.

22. The apparatus for testing a device of claim 21 wherein said second heat flux origin is a heat source.

23. The apparatus for testing a device of claim 21 wherein said second heat flux origin is a heat sink.

24. The apparatus for testing a device of claim 17 wherein said second heat flux origin induces said second heat flux through said local area comprising less than seventy five percent of said structure surface area.

25. The apparatus for testing a device of claim 17 wherein said second heat flux origin induces said second heat flux through said local area comprising less than fifty percent of said structure surface area.

26. The apparatus for testing a device of claim 17 wherein said second heat flux origin induces said second heat flux through said local area comprising less than twenty five percent of said structure surface area.

27. The apparatus for testing a device of claim 17 wherein said second heat flux origin induces said second heat flux through said local area comprising less than ten percent of said structure surface area.

28. The apparatus for testing a device of claim 17 wherein said second heat flux origin induces said second heat flux through said local area approximating a device area of said device.

29. The apparatus for testing a device of claim 17 wherein said first heat flux origin comprises a thermal chuck.

30. The apparatus for testing a device of claim 17 wherein said second heat flux origin comprises an optical source.

31. The apparatus for testing a device of claim 30 wherein said optical source comprises a laser.

32. The apparatus for testing a device of claim 30 where said optical source comprises a carbon dioxide laser.

33. The apparatus for testing a device of claim 17 wherein said control responds to said sensed temperature by varying a pulse produced by said second heat flux origin.

34. The apparatus for testing a device of claim 17 wherein said temperature sensor comprises an infrared radiation sensor.

35. The apparatus for testing a device of claim 17 wherein said source of excitation comprises a voltage source.

36. The apparatus for testing a device of claim 17 wherein said source of excitation comprises a current source.