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Method and apparatus for radiation analysis and encoder

  • US 7,330,253 B2
  • Filed: 11/30/2005
  • Issued: 02/12/2008
  • Est. Priority Date: 06/26/1998
  • Status: Expired due to Fees
First Claim
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1. A system for analyzing one or more components of an incident radiation beam, the system comprising:

  • first optics configured to focus the radiation beam to form an image in an encoding plane for each of one or more components of the beam;

    a spatial radiation modulator comprising a substrate and at least one radiation filter located on the substrate, wherein the modulator is adapted to encode the components of the radiation beam when the radiation beam and the modulator are moved relative to one another according to a relative motion that comprises a substantially repeating motion substantially having a period of repetition;

    a detector configured to provide a signal based on a received radiation beam;

    second optics configured to direct the encoded radiation beam onto the detector; and

    a processor configured to analyze a signal generated by the detector in response to the encoded radiation beam.

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