Evanescent waveguide couplers

• US 7,333,690 B1
• Filed: 03/24/2006
• Issued: 02/19/2008
• Est. Priority Date: 03/28/2005
• Status: Expired due to Fees

• Current Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Original Assignee: Kla-Tencor Technologies Corporation (KLA Corporation)
• Inventors: Hess, Harald, Peale, David R.
• Primary Examiner(s): Font; Frank G.
• Assistant Examiner(s): LEPISTO, RYAN A
• Application Number:
  US11/277,488
• Time in Patent Office: 697 Days
• Field of Search: 385/30
• US Class Current: 385/30
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/2821 using lateral coupling between contiguous fibres to split or combine optical signals
• CPC Class Codes: G02B 6/2835 formed or shaped by thermal treatment, e.g. couplers

Abstract

A multi-port planar evanescent coupler having N inputs and M outputs, where both N and M are each no less than three, formed of combinations of at least one of at least one planar evanescent 2×2 coupler and at least one planar evanescent 3×3 coupler subunits, with phase shifting segments in selected waveguides disposed between the planar evanescent coupler subunits. The multi-port planar evanescent coupler can be used in phase measurement and detection devices, such as interferometers, optical receivers, and laser gyroscopes.

Claims

1. A multi-port N-input, M-output, planar evanescent waveguide coupler, where M and N are each larger than two, the coupler including:

at least two planar evanescent waveguide coupler subunits having interaction lengths, and

at least three waveguides optically connecting the coupler subunits,

wherein the interaction lengths of the at least two planar evanescent waveguide coupler subunits are selected so that at least two of the M-outputs have maximum intensity locations separated by about one hundred twenty degrees as a function of the phase difference.

2. A multi-port N-input, M-output, planar evanescent waveguide coupler, where M and N are each larger than two, the coupler including:

at least two planar evanescent waveguide coupler subunits having interaction lengths, and

at least three waveguides optically connecting the coupler subunits,

wherein the interaction lengths are not equal.

3. A multi-port N-input, M-output, planar evanescent waveguide coupler, where M and N are each larger than two, the coupler including:

at least two planar evanescent waveguide coupler subunits,

at least three waveguides optically connecting the coupler subunits, and

at least one phase shifting region disposed along at least one of the at least three waveguides,

wherein the at least one phase shifting region includes a first phase shifting region selected so that at least two of the M-outputs have maximum intensity locations separated by about one hundred twenty degrees as a function of the phase difference.

4. A differential phase measurement system, comprising:

a source of electromagnetic radiation,

a multi-port N-input, M-output, planar evanescent waveguide coupler, where M and N are each larger than two, the coupler including,

at least two planar evanescent waveguide coupler subunits having interaction lengths, and

at least three waveguides optically connecting the coupler subunits,

a detection system configured to detect at least two outputs, and

a signal processing means,

wherein the interaction lengths of the at least two planar evanescent waveguide coupler subunits are selected so that at least two of the M-outputs have maximum intensity locations separated by about one hundred twenty degrees as a function of the phase difference.

5. A differential phase measurement system, comprising:

a source of electromagnetic radiation,

a multi-port N-input, M-output, planar evanescent waveguide coupler, where M and N are each larger than two, the coupler including,

at least two planar evanescent waveguide coupler subunits having interaction lengths, and

at least three waveguides optically connecting the coupler subunits, a detection system configured to detect at least two outputs, and

a signal processing means,

wherein the interaction lengths are not equal.

6. A differential phase measurement system, comprising:

a source of electromagnetic radiation,

a multi-port N-input, M-output, planar evanescent waveguide coupler, where M and N are each larger than two, the coupler including,

at least two planar evanescent waveguide coupler subunits, and

at least three waveguides optically connecting the coupler subunits

a detection system configured to detect at least two outputs,

a signal processing means, and

at least one phase shifting region disposed along at least one of the at least three waveguides,

wherein the at least one phase shifting region includes a first phase shifting region selected so that at least two of the M-outputs have maximum intensity locations separated by about one hundred twenty degrees as a function of the phase difference.