Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
First Claim
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1. A method of automation performed on a semiconductor manufacturing tool, comprising:
- (a) allowing a user to select one or more recipe parameters for a set of designed experiments;
(b) allowing a user to specify that the recipe parameters are not a linear function of time,(c) automatically running the set of designed experiments on the tool;
(d) collecting data resulting from running the experiments;
(e) time-scaling the collected data from running experiments based on recipe parameters specified as not a linear function of time to make the collected data appear as a linear function in a segment of time;
(f) creating a model based on the time-scaled collected data; and
(g) using the model to control the tool.
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Abstract
A method, system and medium of automation performed on a semiconductor manufacturing tool. The method creates a designed set of experiments for the tool and runs the created set of experiments. The method also collects data resulting from running the experiments and creates a model based on the collected data. The created model is used in automatically controlling the tool.
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Citations
34 Claims
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1. A method of automation performed on a semiconductor manufacturing tool, comprising:
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(a) allowing a user to select one or more recipe parameters for a set of designed experiments; (b) allowing a user to specify that the recipe parameters are not a linear function of time, (c) automatically running the set of designed experiments on the tool; (d) collecting data resulting from running the experiments; (e) time-scaling the collected data from running experiments based on recipe parameters specified as not a linear function of time to make the collected data appear as a linear function in a segment of time; (f) creating a model based on the time-scaled collected data; and (g) using the model to control the tool. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of automation performed on a tool to manufacture devices, comprising:
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(a) automatically creating a set of designed experiments based on one or more recipe parameters; (b) allowing a user to specify that the recipe parameters are not a linear function of time; (c) automatically running the set of designed experiments on the tool; (d) automatically collecting data resulting from running the experiments, wherein the data are collected on a wafer-by-wafer basis; (e) time-scaling the collected data from running experiments based on recipe parameters specified as not a linear function of time to make the collected data appear as a linear function in a segment of time; (f) automatically creating a model based on the collected data; and (g) using the model to control the tool.
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14. A method of automation performed on a tool to manufacture devices, comprising:
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(a) automatically running a set of designed experiments based on one or more recipe parameters on the tool; (b) automatically collecting data resulting from running the experiments; (c) where the recipe parameters are not a linear function of time, time-scaling the collected data to make the collected data appear as a linear function in a segment of time; (d) creating a model based on the time-scaled collected data and imported data; and (e) using the model to control the tool. - View Dependent Claims (15, 16)
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17. A computer-implemented system of automating a semiconductor manufacturing tool, comprising:
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(a) a computer; (b) a DOE system configured to automatically create a designed set of experiments based on one or more recipe parameters for the tool; (c) a controller configured to automatically run the created set of experiments on the tool and collect data resulting from running the experiments; and (d) a modeling environment configured to create a model based on the time-scaled collected data, wherein the controller is further configured to control the tool based on the created model, and wherein the DOE system, controller and modeling environment are integrated with each other, wherein the DOE system is further configured to allow a user to specify whether the recipe parameters are not a linear function of time, and to time-scale the collected data to make the collected data appear as a linear function in a segment of time if the recipe parameters are not a linear function of time. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25)
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26. A computer readable medium for storing instructions being executed by one or more computers, the instructions directing the one or more computers for automatically generating design of experiment (DOE), the instructions comprising implementation of:
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(a) automatically running a set of designed experiments based on one or more recipe parameters on the tool;
(b) allowing a user to specify that the recipe parameters are not a linear function of time;(c) automatically collecting data resulting from running the experiments;
(d) time-scaling the collected data from running experiments based on recipe parameters specified as not a linear function of time to make the collected data appear as a linear function in a segment of time;(e) creating a model based on the time-scaled collected data; and (f) using the model to control the tool. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34)
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Specification