Line pressure measurement using differential pressure sensor
First Claim
1. A pressure sensor assembly for sensing a pressure of a process fluid, comprising:
- a sensor body having a cavity formed therein, the cavity configured to couple to a process fluid pressure and change in size in response to the process fluid pressure;
a deflectable diaphragm in the cavity configured to deflect in response to the first process fluid pressure;
a primary electrode coupled to a wall of the cavity to form a primary capacitor between the primary electrode and the deflectable diaphragm;
a secondary electrode coupled to the wall of the cavity to form a secondary capacitor between the secondary electrode and the deflectable diaphragm; and
circuitry coupled to the primary capacitor and the secondary capacitor configured to calculate a line pressure of the process fluid as a function of variation in at least the primary capacitor and the secondary capacitor due to change in the size of the cavity from the process fluid pressure.
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Accused Products
Abstract
A pressure sensor assembly for sensing a pressure of a process fluid includes a sensor body having a cavity formed therein to couple to a process fluid pressure. A deflectable diaphragm in the cavity deflects in response to the first and second process fluid pressures. A first primary electrode couples to a wall of the cavity and forms a first primary capacitor between the first primary electrode and the deflectable diaphragm. A first secondary electrode couples to the wall of the cavity to form a first secondary capacitor between the first secondary electrode and the deflectable diaphragm. A second primary electrode and second secondary electrode are preferably coupled to a wall of the cavity opposite the first. Line pressure of the process fluid is determined based upon variation in the secondary capacitors relative to the primary capacitors.
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Citations
25 Claims
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1. A pressure sensor assembly for sensing a pressure of a process fluid, comprising:
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a sensor body having a cavity formed therein, the cavity configured to couple to a process fluid pressure and change in size in response to the process fluid pressure; a deflectable diaphragm in the cavity configured to deflect in response to the first process fluid pressure; a primary electrode coupled to a wall of the cavity to form a primary capacitor between the primary electrode and the deflectable diaphragm; a secondary electrode coupled to the wall of the cavity to form a secondary capacitor between the secondary electrode and the deflectable diaphragm; and circuitry coupled to the primary capacitor and the secondary capacitor configured to calculate a line pressure of the process fluid as a function of variation in at least the primary capacitor and the secondary capacitor due to change in the size of the cavity from the process fluid pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of determining a line pressure of a process fluid, comprising:
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applying a pressure of the process fluid to a sensor body having a cavity formed therein and responsively causing a size of the cavity to change, the cavity including a deflectable diaphragm and a primary electrode which forms a primary capacitor with the diaphragm, the sensor body further including a secondary electrode forming a secondary capacitor with a cavity; calculating the line pressure of the process fluid as a function of variation in at least the primary capacitor and the secondary capacitor due to change in the size of the cavity in response to the process fluid pressure. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A pressure sensor comprising;
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a deflectable diaphragm configured to receive first and second pressures applied to opposing sides; first and second primary electrodes configured to form first and second primary capacitors with the deflectable diaphragm; first and second secondary electrodes configured to form first and second secondary capacitors with the deflectable diaphragm; circuitry configured to calculate differential pressure and further configured to calculate line pressure as a function of variations in the first and second primary capacitors and first and second secondary capacitors. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification