Apparatus for controlling flow rate of gases used in semiconductor device by differential pressure
First Claim
1. An apparatus for controlling flow rate of gases used in semiconductor device fabrication by differential pressure, comprising:
- a body having a flow passage for the gas used in the semiconductor device fabrication;
a control valve for controlling a flow of the gas by opening or closing the flow passage of the body;
a differential pressure generation element installed in the flow passage of the body to generate differential pressure;
a tube installed to penetrate through the differential pressure generation element;
a pressure sensor received in the tube to detect the differential pressure in the flow passage generated by the differential pressure generation element; and
a central processing unit for calculating the flow rate of the gas according to a detection signal input from the pressure sensor and controlling the control valve.
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Abstract
Provided is apparatus for controlling flow rate of gases used in semiconductor device by differential pressure by generating differential pressure in a fluid path. A differential pressure generation element generates pressure difference in the fluid path of gases used in semiconductor device fabrication, a pressure, sensor which is installed at a bypass of the fluid path detects the pressure difference, and a central processing unit (CPU) measures and controls a flow rate of the gases, thereby the present invention is capable of controlling the flow rate precisely and rapidly, and enhancing the degree of purity of the gases by the filtering function of the differential pressure generation element itself.
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Citations
6 Claims
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1. An apparatus for controlling flow rate of gases used in semiconductor device fabrication by differential pressure, comprising:
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a body having a flow passage for the gas used in the semiconductor device fabrication; a control valve for controlling a flow of the gas by opening or closing the flow passage of the body; a differential pressure generation element installed in the flow passage of the body to generate differential pressure; a tube installed to penetrate through the differential pressure generation element; a pressure sensor received in the tube to detect the differential pressure in the flow passage generated by the differential pressure generation element; and a central processing unit for calculating the flow rate of the gas according to a detection signal input from the pressure sensor and controlling the control valve. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification