Method for protecting encapsulated sensor structures using stack packaging
First Claim
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1. A micro-mechanical sensor device, comprising:
- a first chip;
a micro-mechanical sensor chip having an embedded micro-mechanical sensor structure and a protective membrane arranged on the embedded micro-mechanical sensor structure, wherein the micro-mechanical sensor chip is arranged onto the first chip so that the protective membrane faces toward the first chip; and
at least one additional micro-mechanical sensor chip arranged at least one of on, underneath, and between the micro-mechanical sensor chip and the first chip to provide a multi-sensor device.
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Abstract
A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, in which the micro-mechanical sensor structure is fabricated with a protective membrane, the micro-mechanical sensor chip is arranged so that a surface of the protective membrane faces toward a second chip, and the micro-mechanical sensor chip is secured to the second chip.
29 Citations
20 Claims
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1. A micro-mechanical sensor device, comprising:
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a first chip; a micro-mechanical sensor chip having an embedded micro-mechanical sensor structure and a protective membrane arranged on the embedded micro-mechanical sensor structure, wherein the micro-mechanical sensor chip is arranged onto the first chip so that the protective membrane faces toward the first chip; and at least one additional micro-mechanical sensor chip arranged at least one of on, underneath, and between the micro-mechanical sensor chip and the first chip to provide a multi-sensor device. - View Dependent Claims (2, 3)
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4. A micro-mechanical sensor device, comprising:
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a first chip; and a micro-mechanical sensor chip having an embedded micro-mechanical sensor structure and a protective membrane arranged on the embedded micro-mechanical sensor structure, wherein; the micro-mechanical sensor chip is arranged directly onto the first chip so that the protective membrane faces toward the first chip; and the protective membrane is arranged between the first chip and the micro-mechanical sensor chip. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification