Spectroscopic ellipsometer and polarimeter systems
First Claim
1. A spectroscopic rotating compensator material system investigation system comprising a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and at least one detector system which contains a multiplicity of detector elements, said spectroscopic rotating compensator material system investigation system further comprising at least one compensator(s) positioned at a location selected from the group consisting of:
- before said stage for supporting a material system;
after said stage for supporting a material system; and
both before and after said stage for supporting a material system;
such that when said spectroscopic rotating compensator material system investigation system is used to investigate a material system present on said stage for supporting a material system, said analyzer and polarizer are maintained essentially fixed in position and at least one of said at least one compensator(s) is caused to continuously rotate while a polychromatic beam of electromagnetic radiation produced by said source of a polychromatic beam of electromagnetic radiation is caused to pass through said polarizer and said compensator(s), said polychromatic beam of electromagnetic radiation being also caused to interact with said material system, pass through said analyzer and interact with said dispersive optics such that a multiplicity of essentially single wavelengths are caused to simultaneously enter a corresponding multiplicity of detector elements in said at least one detector system;
said spectroscopic rotating compensator material system investigation system being further characterized by the presence of at least one multi-element lens positioned before and/or after said stage for supporting a material system.
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Accused Products
Abstract
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system further having at least one multi-element lens and optionally being present in an environmental control chamber.
70 Citations
26 Claims
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1. A spectroscopic rotating compensator material system investigation system comprising a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and at least one detector system which contains a multiplicity of detector elements, said spectroscopic rotating compensator material system investigation system further comprising at least one compensator(s) positioned at a location selected from the group consisting of:
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before said stage for supporting a material system; after said stage for supporting a material system; and both before and after said stage for supporting a material system; such that when said spectroscopic rotating compensator material system investigation system is used to investigate a material system present on said stage for supporting a material system, said analyzer and polarizer are maintained essentially fixed in position and at least one of said at least one compensator(s) is caused to continuously rotate while a polychromatic beam of electromagnetic radiation produced by said source of a polychromatic beam of electromagnetic radiation is caused to pass through said polarizer and said compensator(s), said polychromatic beam of electromagnetic radiation being also caused to interact with said material system, pass through said analyzer and interact with said dispersive optics such that a multiplicity of essentially single wavelengths are caused to simultaneously enter a corresponding multiplicity of detector elements in said at least one detector system; said spectroscopic rotating compensator material system investigation system being further characterized by the presence of at least one multi-element lens positioned before and/or after said stage for supporting a material system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
and wherein each of said at least two elements are individually selected to be made of different materials; w) said at least one multi-element lens is characterized by at least one selection from the group consisting of; a) the focal length is between forty and forty-one millimeters over a range of wavelengths of at least two-hundred to seven-hundred nanometers; b) the focal length varies by less than five (5%) percent over a range of wavelengths of between two-hundred and five-hundred nanometers; and c) the spot diameter at the focal length is less than seventy-five microns over a range of wavelengths of at least two-hundred to seven-hundred nanometers; x) said at least one multi-element lens comprises; an element made of a selection from the group consisting of; CaF2; and fused silica; y) at least one thereof; is made of two elements, one of said elements being made of Fused Silica and the other of CaF2; z) said at least one multi-element lens comprises; a converging element selected from the group consisting of; a positive miniscus; an asymmetric convex; and/or a diverging element selected from the group consisting of; a negative miniscus; an asymmetric concave; said selected at least one multi-element lens being characterized in that it demonstrates at least some birefringence.
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3. A spectroscopic rotating compensator material system investigation system as in claim 1, in which said at least one multi-element lens comprises three lenses present in a tube, each thereof being precisely located with respect to one another and secured in said position by cement which is entered into said holes through the wall of said tube when an acceptable effect on said beam of electromagnetic radiation is achieved.
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4. A spectroscopic rotating compensator material system investigation system as in claim 1, in which said at least one multi-element lens is comprised of two calcium fluoride lenses disposed on opposite sides of a fused silica lens, or two fused silica lenses disposed on opposite sides of a calcium fluoride lens, and is characterized by at least one selection from the group consisting of:
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a) the focal length is between forty and forty-one millimeters over a range of wavelengths of at least two-hundred to seven-hundred nanometers; b) the focal length varies by less than five (5%) percent over a range of wavelengths of between two-hundred and five-hundred nanometers; and c) the spot diameter at the focal length is less than seventy-five microns over a range of wavelengths of at least two-hundred to seven-hundred nanometers.
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5. A spectroscopic rotating compensator material system investigation system as in claim 1, in which said at least one multi-element lens is comprised of two calcium fluoride lenses disposed on opposite sides of a fused silica lens, said multi-element lens being characterized in that it demonstrates at least some birefringence.
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6. A spectroscopic rotating compensator material system investigation system as in claim 1, in which said at least one multi-element lens is comprised of a calcium fluoride lens with two fused silica lenses disposed on opposite sides thereof of, said multi-element lens being characterized in that it demonstrates at least some birefringence.
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7. A spectroscopic rotating compensator material system investigation system as in claim 1 in which the rotating compensator is of a type selected from the group consisting of:
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Berek-type with optical axis essentially perpendicular to a surface thereof; non-Berek-type with an optical axis essentially parallel to a surface thereof; zero-order wave plate; zero-order waveplate constructed from two multiple order waveplates; a sequential plurality of zero-order waveplates, each constructed each from a plurality of multiple order waveplates; rhomb; polymer; achromatic crystal; and pseudo-achromatic; and in which said compensator provides retardance within a range of thirty (30.0) to less than one-hundred-thirty-five (135) degrees over a range of wavelengths defined by a selection from the group consisting of; a) minimum wavelength is less than/equal to one-hundred-ninety (190) and maximum wavelength greater than/equal to seventeen-hundred (1700) nanometers; b) minimum wavelength is less than/equal to two-hundred-twenty (220) and maximum wavelength MAXW greater than/equal to one-thousand (1000) nanometers; c) within a range of wavelengths defined by a maximum wavelength (MAXW) and a minimum wavelength (MINW) range where (MAXW)/(MINW) is at least four-and-one-half (4.5); or said compensator provides retardance within a range of seventy-five (75.0) to less than one-hundred-thirty-five (135) degrees over a range of wavelengths defined by a selection from the group consisting of; a) between one-hundred-ninety (190) and seven-hundred-fifty (750) nanometers; b) between two-hundred-forty-five (245) and nine-hundred (900) nanometers; c) between three-hundred-eighty (380) and seventeen-hundred (1700) nanometers; d) within a range of wavelengths defined by a maximum wavelength (MAXW) and a minimum wavelength (MINW) wherein the ratio of (MAXW)/(MINW) is at least one-and-eight-tenths.
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8. A spectroscopic rotating compensator material system investigation system as in claim 1 which is characterized by a mathematical model comprising calibration parameters, at least one of which is a member of the group consisting of:
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effective polarizer azimuthal angle orientation (Ps); present material system PSI (Ψ
), as a function of angle of incidence and a thickness;present material system DELTA (Δ
), as a function of angle of incidence and a thickness;compensator azimuthal angle orientation (Cs); matrix components of said compensator; analyzer azimuthal angle orientation (As); and detector element image persistence (xn) and read-out (pn) nonidealities; which mathematical model is effectively a transfer function which enables calculation of electromagnetic beam magnitude as a function of wavelength detected by a detector element (DE), given magnitude as a function of wavelength provided by said source of polychromatic beam of electromagnetic radiation (EPCLB);
said calibration parameter(s) selected from the group consisting of;effective polarizer azimuthal angle orientation (Ps); present material system PSI (Ψ
), as a function of angle of Incidence and a thickness;present material system DELTA (Δ
), as a function of angle of incidence and a thickness;compensator azimuthal angle orientation; matrix components of said compensator (Cs) as a function of wavelength; analyzer azimuthal angle orientation (As); and detector element image persistence (xn) and read-out (pn) nonidealities; being, in use, evaluated by performance of a mathematical regression of said mathematical model onto at least one, multi-dimensional, data set(s), said at least one, multi-dimensional, data set(s) being magnitude values vs. wavelength and a at least one parameter selected from the group consisting of; angle-of-incidence of said polychromatic beam of electromagnetic radiation with respect to a present material system (MS); and effective or actual azimuthal angle rotation of one element selected from the group consisting of; said polarizer (P); and said analyzer (A); obtained over time, while said compensator (C) is caused to continuously rotate; said at least one, multi-dimensional, data set(s) each being normalized to a selection from the group consisting of; a data set D.C. component; a data set A.C. component; a parameter derived from a combinations of a data set D.C. component and a data set A.C. component.
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9. A spectroscopic rotating compensator material system investigation system as in claim 1 which further comprises an environmental control chamber in which is present said spectroscopic rotating compensator material system investigation system, said environmental control chamber is characterized by a selection from the group consisting of:
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it comprises at least one chamber region in which is present polarization state generator comprising component(s) prior to said material system, said material system, and polarization state detector comprising component(s) after said material system; it comprises at least three chamber regions, in one of which is present polarization state generator comprising component(s) prior to said material system, in the second of which is present the material system and in the third of which is present polarization state detector comprising component(s) after said material system; it comprises at least two chamber regions, in one of which is present polarization state generator comprising component(s) prior to said material system and said material system, and in the second of which is present polarization state detector comprising component(s) after said material system; it comprises at least two chamber regions, in one of which is present polarization state generator comprising component(s) prior to said material system, and in the second of which is present polarization state detector comprising component(s) after said material system and said material system.
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10. A spectroscopic ellipsometer or polarimeter system as in claim 1 in which the multiplicity of detector elements are arranged in a selection from the group consisting of:
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one-dimensional array; two-dimensional array; and three-dimensional array.
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11. A spectroscopic rotating compensator material system investigation system comprising a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and at least one detector system which contains a multiplicity of detector elements, said spectroscopic rotating compensator material system investigation system further comprising at least one pseudo-achromatic compensator(s) positioned at a location selected from the group consisting of:
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before said stage for supporting a material system; after said stage for supporting a material system; and both before and after said stage for supporting a material system; there being in the path of a polychromatic beam of electromagnetic radiation, provided by said source thereof, at least four apertures between said source of polychromatic beam of electromagnetic radiation and said stage for supporting a material system, and at least three apertures between said stage for supporting a material system and said at least one detector system; said spectroscopic rotating compensator material system investigation system being further characterized in that it further comprises at least one multi-element lens in the pathway of said polychromatic beam of electromagnetic radiation; such that when said spectroscopic rotating compensator material system investigation system is used to investigate a material system present on said stage for supporting a material system, said analyzer and polarizer are maintained essentially fixed in position and at least one of said at least one compensator(s) is caused to continuously rotate while a polychromatic beam of electromagnetic radiation produced by said source of a polychromatic beam of electromagnetic radiation is caused to pass through said polarizer and said at least one compensator(s) and said at least four apertures between said source of polychromatic beam of electromagnetic radiation and said stage for supporting a material system, said polychromatic beam of electromagnetic radiation being also caused to interact with a material system on said stage for supporting a material system, pass through said analyzer and said at least three apertures between said stage for supporting a material system, and interact with said dispersive optics such that a multiplicity of essentially single wavelengths are caused to simultaneously enter a corresponding multiplicity of detector elements in said at least one detector system; said polychromatic beam of electromagnetic radiation also being caused to pass through said at least one multi-element lens. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
and wherein each of said at least two elements are individually selected to be made of different materials; w) said at least one multi-element lens is characterized by at least one selection from the group consisting of; a) the focal length is between forty and forty-one millimeters over a range of wavelengths of at least two-hundred to seven-hundred nanometers; b) the focal length varies by less than five (5%) percent over a range of wavelengths of between two-hundred and five-hundred nanometers; and c) the spot diameter at the focal length is less than seventy-five microns over a range of wavelengths of at least two-hundred to seven-hundred nanometers; x) said at least one multi-element lens comprises; an element made of a selection from the group consisting of; CaF2; and fused silica; y) at least one thereof; is made of two elements, one of said elements being made of Fused Silica and the other of CaF2; z) said at least one multi-element lens comprises; a converging element selected from the group consisting of; a positive miniscus; an asymmetric convex; and/or a diverging element selected from the group consisting of; a negative miniscus; an asymmetric concave; said selected at least one multi-element lens being characterized in that it demonstrates at least some birefringence.
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13. A spectroscopic rotating compensator material system investigation system as in claim 11, in which said at least one multi-element lens comprises three lenses present in said tube, each thereof being precisely located with respect to one another and secured in said position by cement which is entered into said holes through the wall of said tube when an acceptable effect on said beam of electromagnetic radiation is achieved.
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14. A spectroscopic rotating compensator material system investigation system as in claim 11, in which said at least one multi-element lens is comprised of two calcium fluoride lenses disposed on opposite sides of a fused silica lens, or two fused silica lenses disposed on opposite sides of a calcium fluoride lens, and is characterized by at least one selection from the group consisting of:
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a) the focal length is between forty and forty-one millimeters over a range of wavelengths of at least two-hundred to seven-hundred nanometers; b) the focal length varies by less than five (5%) percent over a range of wavelengths of between two-hundred and five-hundred nanometers; and c) the spot diameter at the focal length is less than seventy-five microns over a range of wavelengths of at least two-hundred to seven-hundred nanometers.
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15. A spectroscopic rotating compensator material system investigation system as in claim 11, in which said at least one multi-element lens is comprised of two calcium fluoride lenses disposed on opposite sides of a fused silica lens, said multi-element lens being characterized in that it demonstrates at least some birefringence.
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16. A spectroscopic rotating compensator material system investigation system as in claim 11, in which said at least one multi-element lens is comprised of a calcium fluoride lens with two fused silica lenses disposed on opposite sides thereof of, said multi-element lens being characterized in that it demonstrates at least some birefringence.
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17. A spectroscopic rotating compensator material system investigation system as in claim 11, in which the rotating compensator comprises a selection from the group consisting of:
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comprised of a combination of at least two zero-order waveplates, said zero-order waveplates and having their respective fast axes rotated to a position offset from zero or ninety degrees with respect to one another; comprised of a combination of at least a first and a second effective zero-order wave plate, said first effective zero-order wave plate being comprised of two multiple order waveplates which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another, and said second effective zero-order wave plate being comprised of two multiple order waveplates which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another;
the fast axes of the multiple order waveplates in said second effective zero-order wave plate being rotated to a position at a nominal forty-five degrees to the fast axes of the multiple order waveplates and in said first effective zero-order waveplate;comprised of a combination of at least a first and a second effective zero-order wave plate, said first effective zero-order wave plate being comprised of two multiple order waveplates which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another, and said second effective zero-order wave plate being comprised of two multiple order waveplates which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another;
the fast axes of the multiple order waveplates in said second effective zero-order wave plate being rotated to a position away from zero or ninety degrees with respect to the fast axes of the multiple order waveplates and in said first effective zero-order waveplate; andcomprised of a combination of at least one zero-order waveplate and at least one effective zero-order waveplate, said effective zero-order wave plate being comprised of two multiple order waveplates which are combined with the fast axes thereof oriented at a nominal ninety degrees to one another, the fast axes of the multiple order waveplates in said effective zero-order wave plate being rotated to a position away from zero or ninety degrees with respect to the fast axis of the zero-order waveplate; Berek-type with optical axis essentially perpendicular to a surface thereof; non-Berek-type with an optical axis essentially parallel to a surface thereof; zero-order wave plate; zero-order waveplate constructed from two multiple order waveplates; a sequential plurality of zero-order waveplates, each constructed each from a plurality of multiple order waveplates; rhomb; polymer; achromatic crystal; and pseudo-achromatic; and in which said compensator provides retardance within a range of thirty (30.0) to less than one-hundred-thirty-five (135) degrees over a range of wavelengths defined by a selection from the group consisting of; a) minimum wavelength is less than/equal to one-hundred-ninety (190) and maximum wavelength greater than/equal to seventeen-hundred (1700) nanometers; b) minimum wavelength is less than/equal to two-hundred-twenty (220) and maximum wavelength MAXW greater than/equal to one-thousand (1000) nanometers; c) within a range of wavelengths defined by a maximum wavelength (MAXW) and a minimum wavelength (MINW) range where (MAXW)/(MINW) is at least four-and-one-half (4.5); or said compensator provides retardance within a range of seventy-five (75.0) to less than one-hundred-thirty-five (135) degrees over a range of wavelengths defined by a selection from the group consisting of; a) between one-hundred-ninety (190) and seven-hundred-fifty (750) nanometers; b) between two-hundred-forty-five (245) and nine-hundred (900) nanometers; c) between three-hundred-eighty (380) and seventeen-hundred (1700) nanometers; d) within a range of wavelengths defined by a maximum wavelength (MAXW) and a minimum wavelength (MINW) wherein the ratio of (MAXW)/(MINW) is at least one-and-eight-tenths.
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18. A spectroscopic rotating compensator material system investigation system as in claim 11 which is characterized by a mathematical model comprising calibration parameters, at least one of which is a member of the group consisting of:
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effective polarizer azimuthal angle orientation (Ps); present material system PSI (Ψ
), as a function of angle of incidence and a thickness;present material system DELTA (Δ
), as a function of angle of incidence and a thickness;compensator azimuthal angle orientation (Cs); matrix components of said compensator; analyzer azimuthal angle orientation (As); and detector element image persistence (xn) and read-out (pn) nonidealities; which mathematical model is effectively a transfer function which enables calculation of electromagnetic beam magnitude as a function of wavelength detected by a detector element (DE), given magnitude as a function of wavelength provided by said source of polychromatic beam of electromagnetic radiation (EPCLB);
said calibration parameter(s) selected from the group consisting of;effective polarizer azimuthal angle orientation (Ps); present material system PSI (Ψ
), as a function of angle of incidence and a thickness;present material system DELTA (Δ
), as a function of angle of incidence and a thickness;compensator azimuthal angle orientation; matrix components of said compensator (Cs) as a function of wavelength; analyzer azimuthal angle orientation (As); and detector element image persistence (xn) and read-out (pn) nonidealities; being, in use, evaluated by performance of a mathematical regression of said mathematical model onto at least one, multi-dimensional, data set(s), said at least one, multi-dimensional, data set(s) being magnitude values vs. wavelength and a at least one parameter selected from the group consisting of; angle-of-incidence of said polychromatic beam of electromagnetic radiation with respect to a present material system (MS); and effective or actual azimuthal angle rotation of one element selected from the group consisting of; said polarizer (P); and said analyzer (A); obtained over time, while said compensator (C) is caused to continuously rotate; said at least one, multi-dimensional, data set(s) each being normalized to a selection from the group consisting of; a data set D.C. component; a data set A.C. component; a parameter derived from a combinations of a data set D.C. component and a data set A.C. component.
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19. A spectroscopic rotating compensator material system investigation system as in claim 11 which further comprises an environmental control chamber in which is present said spectroscopic rotating compensator material system investigation system, said environmental control chamber is characterized by a selection from the group consisting of:
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it comprises at least one chamber region in which is present polarization state generator comprising component(s) prior to said material system, said material system, and polarization state detector comprising component(s) after said material system; it comprises at least three chamber regions, in one of which is present polarization state generator comprising component(s) prior to said material system, in the second of which is present the material system and in the third of which is present polarization state detector comprising component(s) after said material system; it comprises at least two chamber regions, in one of which is present polarization state generator comprising component(s) prior to said material system and said material system, and in the second of which is present polarization state detector comprising component(s) after said material system; it comprises at least two chamber regions, in one of which is present polarization state generator comprising component(s) prior to said material system, and in the second of which is present polarization state detector comprising component(s) after said material system and said material system.
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20. A spectroscopic ellipsometer or polarimeter system as in claim 11 in which the multiplicity of detector elements are arranged in a selection from the group consisting of:
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one-dimensional array; two-dimensional array; and three-dimensional array.
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21. A spectroscopic rotating compensator material system investigation system comprising a source of a polychromatic beam of electromagnetic radiation, a first aperture, a second aperture, a fixed polarizer, a rotating compensator, a third aperture, a forth aperture, a first substantially achromatic lens, a fifth aperture, a stage for supporting a material system, a sixth aperture, a second substantially achromatic lens, a seventh aperture, an eighth aperture, a fixed analyzer, a ninth aperture, a third substantially achromatic lens, an optical fiber and at least one detector system which comprises a dispersive element and a multiplicity of detector elements, there further being a UV filter present between said source of a polychromatic beam of electromagnetic radiation and said stage for supporting a material system;
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such that when said spectroscopic rotating compensator material system investigation system is used to investigate a material system present on said stage for supporting a material system, said fixed analyzer and fixed polarizer are maintained essentially fixed in position and said rotating compensator is caused to continuously rotate while a polychromatic beam of electromagnetic radiation produced by said source of a polychromatic beam of electromagnetic radiation is sequentially caused to pass through said first aperture, second aperture, fixed polarizer, rotating compensator, third aperture, forth aperture, first substantially achromatic lens, fifth aperture, said polychromatic beam of electromagnetic radiation also passing through said UV filter, then interact with a material system placed on said stage for supporting a material system, then sequentially pass through said sixth aperture, second substantially achromatic lens, seventh aperture, eighth aperture, fixed analyzer, ninth aperture, third substantially achromatic lens, enter said optical fiber and therevia enter said detector system; at least one of said first, second and third substantially achromatic lenses being characterized in that it comprises at least two elements which are made from different materials independently selected from the group consisting of; CaF2; BaF2; LiF; MgF2; fused silica; a void region; a gas filled region; a liquid filled region; and a functional equivalent to a void region. - View Dependent Claims (22, 23, 24, 25, 26)
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Specification